• Journal of the Korean Vacuum Society
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• v.22 no.6
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• pp.298-305
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• 2013

Uniform silica nanobeads were synthesized by St$\ddot{o}$ber method and assembled in the form of monolayer on glass substrate using sonication method. Before the assembly of silica nanobeads, glass substrates were treated with molecular linkers, such as CP-TMS and PEI, and nanobeads were dispersed in toluene. In attachment test, SO (sonication without stacking) method and SS (sonnication with stacking) method was used and sonication time was controled. After the experiment, microbalance was use to measure deviation between before and after the attachment experiment then calculate percent of coverage. Minutely observe with SEM (Scanning Electron Microscopy) then select the most close-packed and monolayer assembled cover glass and calculate DOC (Degree of Coverage). In SO method, DOC increased very sharply and reach over 140 percent point, also got lots of multi-layer region. On the other hand, in SS method DOC increased slower than SO method but more close-packed and monolayer assembled.

• Polymer(Korea)
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• v.36 no.6
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• pp.721-726
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• 2012

Thermoplastic polyurethane (TPU) elastomer is used as an encapsulant in undersea sonar devices. A new material for sonar encapsulant exhibiting better mechanical strength than TPU along with a lower swelling ratio for seawater and oil is required to prolong its application. TPU grafted silica nanoparticles (TPU-g-silica) were prepared and then they were melt mixed with TPU to fabricate desirable composites for underwater applications. The composite containing silica nanoparticles exhibited better tensile strength and lower swelling ratios in the seawater and oil than TPU regardless of the surface treatment of the silica particles. At fixed silica content in the composite, the TPU/TPU-g-silica composite exhibited better tensile strength and lower swelling ratio than the TPU composite with the pristine silica particles. Furthermore, the TPU/TPU-g-silica composite exhibited enhanced tensile strength as compared to TPU after being impregnated with oil.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.13.1-13.1
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• 2009

에어로젤은 인류가 개발한 소재 중에서 가장 가벼운 고체로, 기공률이 90%이상이고 비표면적은 ~1000m2/g, 기공의 크기는 10nm 크기로 이루어진 나노기공 물질이다. 1931년에 Kisley가 물유리로부터 실리카 에어로젤을 합성한 이래로 실리카 에어로젤에 대한 연구가 가장 많이 이루어져왔으며, 단열소재, 흡음재, 체렌코프우주선 디텍터, 반도체의 초저유전소재, 유출된 석유의 정제, 촉매 등에 대한 응용에 대해서도 연구가 많이 이루어져 왔다. 그리고TiO2와 같은 광촉매 에어로젤 소재, 카본 에어로젤 소재등 다양한 나노기공 소재에 대해서도 연구가 이루어지고 있으며, 카본 에어로젤의 경우 나노기공과 비표면적을이용한 전기이중층 커패시터 (EDLC)에 대한 연구도 이루어지고 이다. 본 연구에서는 첫째로, 실리카 에어로젤에 대한 연구결과를 소개하고 이의 단열소재로서의 응용가능성에대하여 언급하고자 한다. 실리카 에어로젤 나노기공 소재의 경우, 기공크기가 10nm크기로 매우 작고 공기의 자유이동길이와 거의 비슷하여서 대류에 의한 열전달을 낮출 수 있으며, 낮은 고체함량으로 인하여 포논에 의한 열전달을 낮출 수 있기 때문에 단열소재로서 최고의 성능을 나타낸다. 하지만, 문제는 높은 기공률로 인한 기계적인 취약성이 문제이다. 따라서 이를 보완하기 위항 섬유로 에어로젤을 보강할 수 있는데, 이를통하여 에어로젤 나노기공소재와 섬유보강에 의한 복합화에 대하여 말하고자 한다. 또 다른 하나의 연구방법은유기-무기 하이브리드 나노기공 소재를 합성하는 것이다. 여기서는하나의 방법으로 MTEOS-TEOS의 하이브리드화와 초임계 건조공정에 의한 나노기공 소재에 대한 연구결과를소개하고자 한다. 마지막으로 카본 에어로젤 나노기공소재의 합성과 나노기공 구조의 제어 및 물성평가에 대한 것을 말하고자하는데, 본 발표에서는 레소시놀과 포름알데히드를 촉매에 의한 중합반응을 통하여 유기 에어로젤 소재를 합성하고 분위기에서탄소화 공정을 통하여 카본에어로젤을 합성하였다. 또한 금속 니켈을 도입하는 것에 의하여 탄소/니켈 복합 하이브리드 에어로젤 소재를 합성하고 슈퍼커패시터 전기화학 특성에 대한 연구결과를 발표하고자 한다.

• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.3
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• pp.5-13
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• 2023

In this study, a comparative study is conducted on the synthesis methods for silica nanoparticle employing the silicon sludge waste generated from the semiconductor manufacturing processes. Specifically, acid-washed silicon sludge wastes with no impurities are employed as the precursors of sol-gel and hydrothermal methods for silica nanoparticles preparation. The morphologies and properties of silica nanoparticles synthesized via two synthetic methods are examined by various analysis methods. As a result, silica nanoparticles from the sol-gel method are fabricated with high purity and uniform shape, while the hydrothermal method exhibits advantages in yield and ease of synthetic process. This comparative study offers detailed experimental results on the two synthetic methods for silica nanoparticle synthesis, which may contribute to the establishment of manufacturing high-value materials using the by-products generated in the semiconductor process.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.21-29
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• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.89.2-89.2
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• 2012

$150^{\circ}$ 이상의 접촉각을 가지는 초소수성 표면은 self-cleaning, anti-fingerprint, anti-contamination 등의 특성을 가지므로 전자, 도료, 자동차 등 다양한 산업에서 활용될 수 있다. 재료 표면의 친/소수성은 물리적 요인과 화학적 요인 두 가지 요인을 조절함으로써 제어할 수 있다. 즉, 표면의 거칠기를 크게 하거나 표면에너지를 낮춰줌으로써 초소수성 표면을 구현할 수 있다. 실리카는 자연계에 매우 풍부하게 존재하고 있으며, 생체무해하며 내구성과 내마모성, 화학적 안정성, 고온 안정성 등을 지니고 있어 박막소재로 이용하기에 우수한 특징을 지니고 있다. 이러한 실리카 초소수성 코팅층을 형성하는 방법으로 본 연구에서는 전기분무법으로 마이크로 크기의 실리카 입자로 형성된 코팅층을 형성하였다. 이러한 마이크로 구조의 표면거칠기를 더욱 높이기 위하여 금 나노입자를 부가적으로 형성시켜 마이크로-나노구조 혼성의 계층구조를 만들고자 하였다. 금 나노입자는 자외선 조사 광환원법을 사용하였고, 이러한 계층구조에 플루오린 처리를 하여 계층구조 초소수성 코팅층을 형성하였다. 계층구조를 가지는 실리카 코팅층은 물 이외에 표면장력이 낮은 용액에서도 높은 접촉각을 보였고, 이러한 코팅층의 고온 안정성과 내구성, UV 저항성 등을 조사하여 실제 응용 가능성을 검토하였다.

• Polymer(Korea)
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• v.37 no.3
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• pp.308-315
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• 2013

In this study, we performed surface modification of silica nanoparticles with bis[3-(triethoxysilylpropyl)]tetrasulfide (TESPT) silane coupling agent to study the effects of treatment temperature, treatment time, and amount of TESPT used on the silanization degree with Fourier transform infrared spectroscopy (FTIR), thermogravimetric analysis (TGA), elemental analysis (EA) and solid state $^{13}C$ and $^{29}Si$ cross-polarization magic angle spinning (CP/MAS) nuclear magnetic resonance spectroscopy (NMR). We found peak area of isolated silanol groups at $3747cm^{-1}$ decreased, but peak area of $-CH_2$ asymmetric stretching of TESPT at $2938cm^{-1}$ increased with the amount of TESPT from FTIR measurements. We also used universal testing machine (UTM) to study mechanical properties of styrene butadiene rubber (SBR) nanocomposites with 20 phr (parts per hundred of rubber) of pristine and TESPT modified silicas, respectively. The tensile strength and 100% modulus of modified silica/SBR nanocomposite were enhanced from 5.65 to 9.38MPa, from 1.62 to 2.73 MPa, respectively, compared to those of pristine silica/SBR nanocomposite.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2011.05a
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• pp.61-62
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• 2011

실리카 나노입자를 분산시킨 기능성 코팅 소재를 개발하였다. 본 기능성 코팅 소재는 마그내슘 판재에 적용하여 내스크래치 및 내부식성을 향상시키기 위한 것이다. 최근 마그네슘 판재는 스마트 폰 및 이동통신 기기의 외장재소재로 각광을 받고 있다. 그러나 표면의 기계적 강도가 약하고, 특히 수분에 의한 부식이 심각하여 사용에 많은 제한을 받고 있다. 본 연구에서는 실리카 나노입자가 분산된 유무기 하이브리드 코팅을 적용하여 기계적 강도 및 내부식성을 향상하고자 하였다. 분산하는 나노입자의 크기를 달리하여 코팅층으로부터 각각 다른 물리적 화학적 특성을 유도할 수 있었다. 각 코팅 층의 특성은 연필경도, 기판 휨 각도, 그리고 electrochemical impedance spectroscopy 등을 이용하여 평가하였고, 최종적으로 휴대폰 신뢰성 평가 기법을 적용하여 상용화 적용성도 평가하였다.

• Journal of the Microelectronics and Packaging Society
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• v.17 no.4
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• pp.83-88
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• 2010

The composite electroplating is accomplished by adding inert materials during the electroplating. Permalloy is the term for Ni-Fe alloy and it is used for industrial applications due to its high magnetic permeability. Microhardness for microdevices is enhanced after composite coating and it increases the life cycle. However, the hydroxyl group on the silica makes their surface susceptible to moisture and it causes the silica nanoparticles to be agglomerated in the aqueous solution. The agglomeration problem causes poor dispersion which eventually interrupts uniform deposition of silica nanoparticles. In this study, the dispersion of silica nanoparticles in the permalloy electroplated layer is reported with variation of additives and sonication time. Longer sonication period guaranteed better silica nanopowder dispersion and sonication period also influenced on composition of deposits. The amount of silica nanopowder codeposition and surface morphologies were influenced with variation of additives. In alkaline bath, smooth surface morphology and relatively high contents of silica nanopowder codeposition were obtained with addition of sodium lauryl sulfate.

• Journal of the Korea Organic Resources Recycling Association
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• v.31 no.3
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• pp.15-25
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• 2023

In this study, silicon sludge from semiconductor dicing process is recycled to fabricate silica nanoparticles, which are applied as dispersing materials for electro-responsive (ER) smart fluid. In specific, metal impurities are removed from silicon sludge by acid washing to obtain the high-purity silicon powder. And then, silica nanoparticles are synthesized by facile hydrothermal method employing the silicon powder as reactant material. To control the size of silica nanoparticles, the reaction time of hydrothermal method is varied as 8, 15, 20, and 30 hours are applied to control the size of silica nanoparticles. Sizes of silica nanoparticles are increased proportionally to the reaction time owing to the increased numbers of hydrolysis and condensation reactions. As-synthesized silica nanoparticles are prepared as electro-responsive smart fluids by dispersing into silicon oil. Silica nanoparticles synthesized by 30 hours of hydrothermal reaction (SiO₂-H30) exhibit the highest shear stress of 21.4 Pa under an applied electric field strength of 3.0kV mm^-1. Such enhancement in ER performance of SiO₂-H30 among various silica nanoparticles are attribute to the reinforcing effect originated from the mixed particle size, which allowing the formation of rigid chain-like structures. Accordingly, this study successfully propose a recycling method of silicon sludge to synthesize silica nanoparticles and their derived ER fluids, which may suggest new possibility to ESG management emphasizing the eco-friendliness.