• Title/Summary/Keyword: 나노 공정법

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Solution-based Synthesis of Two-dimensional Materials for Electrochemical Capacitors (전기화학 커패시터 응용을 위한 용액기반의 2차원 소재 제조)

  • Choi, Bong Gill
    • Applied Chemistry for Engineering
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    • v.28 no.3
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    • pp.272-278
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    • 2017
  • Two-dimensional (2D) materials, especially graphene and $MoS_2$ sheets, have gained much attention and shown great promise for the application in supercapacitors. To widely use the 2D materials for supercapacitors, highly efficient, low cost, and environmentally friendly synthetic methods for the preparation of 2D materials should be developed. Here, we will review recently developed solution-based processes for preparing 2D materials for supercapacitors. Chemical exfoliation-reduction, chemical intercalation, and liquid phase exfoliation methods will be introduced. Moreover, the electrochemical characteristics of graphene and $MoS_2$-based electrodes for supercapacitors are summarized. In addition to solution-based processes, other challenges and opportunities are discussed in terms of controlling nanosheet compositions, sizes, and thicknesses.

Plasma-assisted nitrogen doping on CVD-graphenes

  • Lee, Byeong-Ju;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.278.2-278.2
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    • 2013
  • 그래핀은 우수한 전기적, 기계적, 광학적 특성들로 인하여 전자소자, 센서, 에너지 재료 등으로의 응용이 가능하다고 알려진 단 원자층의 탄소나노재료이다. 특히 그래핀을 전자소자로 응용하기 위해서는 캐리어 농도, 전하 이동도, 밴드갭 등의 전기적 특성을 향상시키거나 제어하는 것이 요구되며, 에너지 소재로의 응용을 위해서는 높은 전기전도도와 함께 기능화를 통한 촉매작용을 부여하여 효율을 향상시키는 것이 요구된다. 일반적으로 화학적 도핑은 그래핀의 전기적 특성을 제어하는 효율적인 방법으로 알려져 있다. 화학적 도핑의 방법으로 질소, 수소, 산소 등 다양한 이종원소를 열처리 또는 플라즈마 처리함으로써 그래핀을 구성하는 탄소원자를 이종원자로 치환하거나 흡착시켜 기능화 처리된 그래핀을 얻는 방법들이 제시되었다. 이중 플라즈마를 이용한 도핑방법은 저온에서 처리가 가능하고, 처리시간, 공정압력, 인가전압 등 플라즈마 변수를 변경하여 도핑정도를 비교적 수월하게 제어할 수 있다는 장점을 가지고 있다. 본 연구에서는 열화학기상증착법으로 합성된 그래핀을 직류 플라즈마로 처리함으로써 효율적인질소도핑 조건을 도출하고자 하였다. 그래핀의 합성은 200 nm 두께의 니켈 박막이 증착된 몰리브덴 호일을 사용하였으며, 원료가스로는 메탄을 사용하였다. 그래핀의 질소 도핑은 평행 평판형 직류 플라즈마 장치를 이용하여 암모니아($NH_3$) 플라즈마로 처리하였으며, 플라즈마 파워와 처리시간을 변수로 최적의 도핑조건 도출 및 도핑 정도를 제어하였다. 그래핀의 질소 도핑 정도는 라만 스펙트럼의 G밴드의 위치와 반치폭(Full width at half maximum; FWHM)의 변화를 통해 확인하였다. NH3 플라즈마 처리 후 G밴드의 위치가 장파장 방향으로 이동하며, 반치폭은 감소하는 것을 통해 그래핀의 질소도핑을 확인하였다.

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Optimization of Synthesis Process for Zeolite 4A Using Statistical Experimental Design (통계적 실험계획법을 이용한 제올라이트 4A 합성 최적화)

  • Yun, Mi Hee;Yoo, Kye Sang
    • Applied Chemistry for Engineering
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    • v.28 no.3
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    • pp.286-289
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    • 2017
  • Synthesis of zeolite 4A was carried out to optimize the nanoparticle synthesis process using statistical experimental design method. The zeolite 4A was synthesized by controlling the concentration of the silicon precursor, sodium metasilicate (SMS), and characterized by XRD, SEM and nitrogen adsorption. In particular, the property of zeolite 4A can be determined by XRD analysis. Using the general factor analysis in the design of experiments, we analyzed main effects and interactions according to the reactor, reaction temperature and reaction time. The optimum reaction condition for the synthesis of zeolite 4A crystallinity was using an autoclave for 3 hours at $110^{\circ}C$. Furthermore, the optimal synthesis conditions of zeolite 4A with various crystallinity using Ludox as a silicon precursor were presented of what using both the surface and contour plot.

Recycling of Acidic Etching Waste Solution Containing Heavy Metals by Nanofiltration (II) : Dead-end Nanofiltration of PCB Etching Waste Solution Containing Copper Ion (나노여과에 의한 중금속 함유 산성 폐에칭액의 재생(II) : 구리이온을 함유한 PCB 폐에칭액의 Dead-end 나노여과)

  • Nam, Sang-Won;Jang, Kyung-Sun;Youm, Kyung-Ho
    • Membrane Journal
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    • v.23 no.1
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    • pp.92-99
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    • 2013
  • In this study the nanofiltration (NF) membrane treatment of a sulfuric acid waste solutions containing copper ion ($Cu^{+2}$) discharging from the etching processes of the printed circuit board (PCB) manufacturing industry has been studied for the recycling of acid etching solution. SelRO MPS-34 4040 NF membrane from Koch company was tested to obtain the basic NF data for recycling of etching solution and separation efficiency (total rejection) of copper ion. NF experiments were carried out with a dead-end membrane filtration laboratory system. The pure water flux was increased with the increasing storage time in sulfuric acid solution and lowering pH of acid solution because of the enhancement of NF membrane damage by sulfuric acid. The permeate flux of acid solution was decreased with the increasing copper ion concentration. Total rejection of copper ion was decreased with the increasing storage time in sulfuric acid solution and copper ion concentration, and lowering the pH of acid solution. The total rejection of copper ion was decreased from initial 37% to 15% minimum value.

Effect of TiAIN-based Nanoscale Multilayered Coating on the Cutting Performance of WC-Co Insert (WC-CO 인써트의 절삭 성능에 미치는 TiAIN계 나노 다층막 코팅의 영향)

  • Lim Hee-Youl;Park Jong-Keuk;Kim Kyung-Bae;Choi Doo-Jin;Baik Young-Joon
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.110-116
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    • 2006
  • The mechanical property and cutting performance of the cutting tools coated with nanoscale nyktukatered nitride film have been investigated. $Ti_{0.54}Al_{0.46}N-CrN$ and $Ti_{0.84}Al_{0.16}N-NlN$ systems, which showed super-lattice in nanoscale multilayered coating, were deposited on WC-Co insert by UBM sputtering, The superlattice coatings with different bilayer periods were manufactured by controlling deposition parameters. The superlattice formation and hardness of the nanoscale multilayered nitride film and the cutting performance of the insert coated with the film were examined. The hardness and cutting performance were dependent on the bilayer periods of the coatings. The flank wear of the inserts with superlattice coatings were decreased over $20\%$, compared to those of commonly used cutting tools coated with TiAIN single phase.

Preparation of Iron Nano-particle by Slurry Reduction Method from Leaching Solution of Spent Nd magnet (폐네오디뮴 자석 침출용액으로부터 Slurry 환원법을 이용한 철 Nano 분말 제조)

  • Ahn, Jong-Gwan;Gang, Ryunji;You, Haebin;Yoon, Ho-Sung
    • Resources Recycling
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    • v.23 no.6
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    • pp.22-29
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    • 2014
  • Recycling process of iron should be developed for efficient recovery of neodymium (Nd), rare metal, from acid-leaching solution of Nd magnet. In this study, $FeCl_3$ solution as iron source was used for preparation of iron nano particles with the condition of various factors, such as, reductant, and surfactant. $Na_4P_2O_7$ and Polyvinylpyrrolidone (PVP) as surfactants, $NaBH_4$ as reductant, and palladium chloride ($PdCl_2$) as a nucleation seed were used. Iron powder was analyzed by using XRD, SEM for measuring shape and size. Iron nano particles were prepared at the ratio of 1:5 (Fe (III) : $NaBH_4$). Size and shape of iron particles were round-form and 50 ~ 100 nm size. Zeta-potential of iron at the 100 mg/L of $Na_4P_2O_7$ was negative value, which was good for dispersion of metal particle. When $Na_4P_2O_7$ (100 mg/L), PVP($FeCl_3:PVP$ = 1 : 4, w/w) and Pd($FeCl_3:PdCl_2$ = 1 : 0.001, w/w) were used, iron nano particles which were round-shape, well-dispersed and near 100 nm-sized range. In this condition, $FeCl_3$ solution changed with spent Nd leachate solution, and then it is possible to be made round-formed iron nano particles at pH 9 and at the reaction bath over 20 L which is not include any surfactant.

Preparation of Porous PMMA/TiO2 Microspheres by Spray Drying Process (스프레이 건조법을 이용한 PMMA/TiO2 다공성 입자 제조 및 특성 연구)

  • Paik, Dong-Hyun;Lee, Hyunsuk;Gang, Rae-Hyoung;Kim, Yong-Jin;Lee, John Hwan;Choi, Sung-Wook
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.42 no.1
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    • pp.1-7
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    • 2016
  • Highly porous polymethyl methacrylate (PMMA) microspheres impregnated by $TiO_2$ powder were prepared by spray drying method. The particle size and the porosity were controlled by optimizing the co-solvent ratio and the polymer concentration. $TiO_2$ powder was impregnated into the microspheres upto 74.6 wt% content based on the weight of the resultant $PMMA/TiO_2$ microspheres. SEM images showed that $TiO_2$ powder was well distributed throughout the inside of the microsphere. EDX mapping showed that the Ti signal was well detected from every part of the microspheres, which was the evidence of the formation of the $PMMA/TiO_2$ composite. Hg porosimetry result showed that the porosity was found to be over 50% regardless of the $TiO_2$ contents. The final product was found to have high oil-absorbing capacity and great hiding power, both of which are key properties in designing the microsphere materials for make-up cosmetics application.

Preparations of PAN-based Activated Carbon Nanofiber Web Electrode by Electrostatic Spinning and Their Applications to EDLC (정전방사에 의한 PAN계 활성화 탄소 나노섬유 전극 제조와 EDLC 응용)

  • Kim, Chan;Kim, Jong-Sang;Lee, Wan-Jin;Kim, Hyung-Sup;Edie, Dan D.;Yang, Kap-Seung
    • Journal of the Korean Electrochemical Society
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    • v.5 no.3
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    • pp.117-124
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    • 2002
  • Poly(acrylonitrile)(PAN) solutions in dimethylformamide(DMF) were electrospun to prepare webs consisting of 400nm ultra-fine fibers. The webs were oxidatively stabilized, activated by steam and resulted to be activated carbon fibers(ACFs). The specific surface area was $800\~1230 m^2/g$, which showed a trend of a decrease of the surface area with an increase in activation temperature, showing opposite behavior to the other ACFs. The activation energy of the stabilized fibers for the steam activation was determined as 29.2 kJ/mol to be relatively low indicating the easier activation than that of other carbonized fibers. The ACF webs were characterized by pore size and specific surface uea which would be related to the specific capacitance of the electrical double layer capacitor (EDLC). The specific capacitances measured were 27 F/g, 25 F/g, 22 F/g at the respective activation temperature of $700^{circ}C,\;750^{\circ}C\;800^{\circ}C$, showing similar trend with the specific surface area i.e., the higher activation temperature was, the lower specific capacitance resulted.

A study on the selectivity in Acid- and Alkali-Based optimization Electrolytes for Electrochemical Mechanical (ECMP 적용을 위한 Acid-와 Alkali-Based 최적화 전해액 선정에 관한 연구)

  • Lee, Young-Kyun;Kim, Young-Min;Park, Sun-Jun;Lee, Chang-Suk;Bae, Jae-Hyun;Seo, Yong-Jin;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.484-484
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    • 2009
  • 반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.

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Spark plasma sintering 소결법에 의해 제작 된 Ti-Al-Si 합금타겟의 물성과 합금타겟을 이용하여 제작한 박막에 관한 연구

  • Lee, Han-Chan;Jeong, Deok-Hyeong;Mun, Gyeong-Il;Lee, Bung-Ju;Sin, Baek-Gyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.237.1-237.1
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    • 2013
  • Ti 와 Al 은 금속간의 화합물이 내산화성에 우수한 성질을 가지고 있으며 낮은 밀도와 고온에도 큰 변화가 없는 성질을 가지고 있다. 그리하여 내식 및 부식 관련 연구나 고온재료를 필요로 하는 우주, 엔진 제품 등에 많은 연구가 진행되고 있다. 또한 Ti-Al-N 박막은 경도가 우수하여 고속 공구 부품에 널리 사용되고 있으며 최근 Ti-Al-N 에 Si 첨가로 인하여 40 GPa 이상의 고경도와 1,000도 이상의 산화온도를 지닌 나노 혼합물 코팅을 형성 시키는 것으로 알려져 있다. 본 연구에서는 Ti, Al, Si 원분말을 PBM (Planetary Ball Milling) 방법을 사용하여 Ti-Al-Si 혼합분말로 제조하고, 제조된 분말들은 SPS (Spark Plasma Sintering) 공정을 통하여 Ti-Al-Si 합금타겟을 제작하였다. 제작된 Ti-Al-Si 합급타겟을 사용한 Sputtering 공정을 수행하여 Ti-Al-Si 3원계 박막을 증착하였다. 그 결과 기존 Ti (82 ${\mu}m$), Al (32 ${\mu}m$), Si (16 ${\mu}m$) 크기의 원분말들이 PBM (Planetary Ball Milling) 공정 후 Ti-Al-Si (18 ${\mu}m$) 로 입도가 작아진 것을 확인 할 수 있었고, 소결 후 타겟이 99% 이상의 높은 밀도를 가졌으며 원분말의 조성과 동일한 조성을 가진 타겟이 제작되었음을 확인하였다. Ti-Al-Si 타겟의 경도는 약 1,000 Hv 이상의 값을 보였으며, Ti-Al-Si-N 박막의 경우 타겟의 조성과 동일하였고 경도는 약 35 GPa 로 높은 경도 값을 가지는 것을 확인하였다. 내산화 테스트 결과 Ti-Al-Si-N 박막은 1,000도 에서도 박막의 손상이 가지 않았다.

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