• Title/Summary/Keyword: 깊이측정

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InSb 적외선 소자제작을 위한 $SiO_2$, $Si_3N_4$증착 온도에 따른 계면 특성 연구

  • Kim, Su-Jin;Park, Se-Hun;Lee, Jae-Yeol;Seok, Cheol-Gyun;Park, Jin-Seop;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.57-58
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    • 2011
  • III-V족 화합물 반도체의 일종인 InSb는 77 K에서 0.23 eV의 작은 밴드 갭을 가지며 높은 전하 이동도를 가지고 있기 때문에 대기권에서 전자파 흡수가 일어나지 않는 3~5 ${\mu}m$범위의 장파장 적외선 감지가 가능하여 중적외선 감지 소자로 이용되고 있다. 하지만 InSb는 밴드 갭이 매우 작기 때문에, 소자 제작시 누설전류에 의한 소자 특성의 저하가 문제시 되고 있다. 또한 다른 화합물 반도체에 비해 녹는점이 낮고, 휘발성이 강한 5족 원소인 Sb의 승화로 기판의 화학양론적 조성비(stoichiometry)가 변하기 쉬워, 계면특성 저하의 원인이 된다. 따라서 우수한 특성을 가지는 적외선 소자의 구현을 위해서, 저온에서 계면 특성이 우수한 고품질의 절연막 증착 연구가 필수적이다. 본 연구에서는 InSb 기판 위에 $SiO_2$, $Si_3N_4$의 절연막 형성시 증착온도의 변화에 따른 계면 트랩 밀도를 분석하였다. $SiO_2$, $Si_3N_4$ 절연막은 플라즈마 화학 기상 증착법(PECVD)을 이용하여 n형 InSb 기판 위에 증착하였으며, 증착온도를 $120^{\circ}C$부터 $240^{\circ}C$까지 변화시켰다. Metal oxide semiconductor(MOS) 구조 제작을 통하여, 커패시턴스-전압(C-V)분석을 진행하였으며, 절연막과 InSb 사이의 계면 트랩 밀도를 Terman method를 이용하여 계산하였다[1]. 또한, $SiO_2$$Si_3N_4$의 XPS 분석과 TOF-SIMS 분석을 통하여 계면 트랩 밀도의 원인을 밝혀 보았다. $120{\sim}240^{\circ}C$ 온도 범위에서 계면 트랩 밀도는 $Si_3N_4$의 경우 $2.4{\sim}4.9{\times}10^{12}cm^{-2}eV^{-1}$, $SiO_2$의 경우 $7.1{\sim}7.3{\times}10^{11}cm^{-2}eV^{-1}$ 값을 나타냈고, 두 절연막 모두 증착 온도가 증가할수록 계면 트랩 밀도가 증가하는 경향을 보였다. 그러나 모든 샘플에서 $Si_3N_4$의 경우, flat band voltage가 음의 전압으로 이동한 반면, $SiO_2$의 경우, 양의 전압으로 이동하는 것을 확인할 수 있었다. 계면 트랩 밀도 증가의 원인을 확인하기 위해서, oxide를 $120^{\circ}C$, $240^{\circ}C$에서 증착시킨 샘플을 XPS 분석을 통하여 깊이에 따른 성분분석을 하였고, 그 결과, $240^{\circ}C$에서 증착된 샘플에서 계면에서 $In_2O_3$$Sb_2O_3$ 피크의 증가를 확인하였다. 이는 계면에서 oxide양이 증가함을 의미하며, 이렇게 생성된 oxide는 계면 트랩으로 작용하므로, 계면 특성을 저하시키는 원인으로 작용함을 알 수 있었다. Nitride 절연막을 증착시킨 샘플은 TOF-SIMS 분석을 통해, 계면에서의 성분 분석을 하였고, 그 결과, $240^{\circ}C$에서 증착된 샘플에서 In-N, Sb-N, Si-N 결합의 감소를 확인하였다. 이렇게 분해된 결합들의 dangling 결합이 늘어 계면 트랩으로 작용하므로, 계면 특성을 저하시키는 원인으로 작용함을 알 수 있었다. 최종적으로, 소자특성을 확인 하기 위하여 계면 트랩 밀도가 가장 낮게 측정된 $200^{\circ}C$ 조건에서 $SiO_2$ 절연막을 증착하여 InSb 적외선 소자를 제작하였다. 전류-전압(I-V) 분석 결과 -0.1 V에서 16 nA의 누설 전류 값을 보였으며, $2.6{\times}10^3{\Omega}cm^2$의 RoA(zero bias resistance area)를 얻을 수 있었다. 절연막 증착조건의 최적화를 통하여, InSb 적외선 소자의 특성이 개선됨을 확인할 수 있었다.

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A Study on Light Condition between Pinus densiflora and Quercus variabilis Natural Mixed Forest Stands by Using the Hemispherical Photo Method (수관사진법을 이용한 소나무-굴참나무 천연림에 있어서의 광 조건 연구)

  • Chung Dong-Jun;Kim Young-Chai
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.1 no.2
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    • pp.127-134
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    • 1999
  • This study was performed to obtain the basic data to present rational silvicultural tending plan. It makes these widely distributed pine-oak mixed stand and each of pure stand in middle province on object of this study and do comparative analysis of light condition about stand parameter and natural regeneration according to each slope(north, west and south) conditions of location in central part of South Korea. Sample plots for pine-oak mixed stand and pine and oak pure stand were established on each of southern, northern and western slopes based upon site and growth conditions of the slope. Sample plot was a circle of 0.05ha with a diameter of 25.24 m. A sample plot has between 30 and 40 tree in it. Total 23 sample plots were established; 9 pure pine stands, 8 pine-oak mixed stands. and 6 pure oak stands across lower, middle, upper parts of slopes. Relative light intensity within a stand was' measured by crown- photo(fish-eye lens; 180$^{\circ}$) system through fish-eye lens and by comparing each plot with the denuded through PAR-sensor. The crown closure ratio of pure pine stand (75%) shows much lower than that of mixed stand (90.9%) and pure oak stand (93%). The relative light intensity within a stand showed an opposite result. The crown closure of mixed stands tended to become gradually low as the slope moves from the north to the south, but the relative light Intensity within the stand tended to rise. By analyzing the relationship between the relative light intensity within a stand and stand parameter, light intensity within a stand tended to decrease as the diameter and N/ha increase. Number of oak seedlings and light intensity within a stand is in a straight-line regression relation. In particular, the number of oak seedlings was the highest in mixed stands on the southern slope. But no single pine seedling was found. The unfavorable conditions of l0cm thick litter layer and low relative light intensity in a stand (ranging between 4% and 8%) is considered to prevent pine seeds from germinating.

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Quality Control of Agro-meteorological Data Measured at Suwon Weather Station of Korea Meteorological Administration (기상청 수원기상대 농업기상 관측요소의 품질관리)

  • Oh, Gyu-Lim;Lee, Seung-Jae;Choi, Byoung-Choel;Kim, Joon;Kim, Kyu-Rang;Choi, Sung-Won;Lee, Byong-Lyol
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.17 no.1
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    • pp.25-34
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    • 2015
  • In this research, we applied a procedure of quality control (QC) to the agro-meteorological data measured at the Suwon weather station of Korea Meteorological Administration (KMA). The QC was conducted through six steps based on the KMA Real-time Quality control system for Meteorological Observation Data (RQMOD) and four steps based on the International Soil Moisture Network (ISMN) QC modules. In addition, we set up our own empirical method to remove erroneous data which could not be filtered by the RQMOD and ISMN methods. After all these QC procedures, a well-refined agro-meteorological dataset was complied at both air and soil temperatures. Our research suggests that soil moisture requires more detailed and reliable grounds to remove doubtful data, especially in winter with its abnormal variations. The raw data and the data after QC are now available at the NCAM website (http://ncam.kr/page/req/agri_weather.php).

CT Scan Findings of Rabbit Brain Infection Model and Changes in Hounsfield Unit of Arterial Blood after Injecting Contrast Medium (토끼 뇌감염 모델의 CT 소견과 조영제 주입 후 동맥혈의 Hounsfield Unit의 변화)

  • Ha, Bon-Chul;Kwak, Byung-Kook;Jung, Ji-Sung
    • The Journal of the Korea Contents Association
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    • v.12 no.9
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    • pp.270-279
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    • 2012
  • This paper explores CT findings of a rabbit brain infection model injected with Escherichia coli and investigates the changes in Hounsfield unit (HU) of arterial blood over time. The brain infection model was produced by injecting E. coli $1{\times}10^7$ CFU/ml, 0.1 ml through the burr hole in the calvarium; 2~3 mm in depth from the dura mater, and contrast-enhanced CT, dynamic CT and arterial blood CT images were gained. It was found that various brain infections such as brain abscess, ventriculitis and meningitis. The CT image of brain abscess showed a typical pattern which the peripheral area was strongly contrast-enhanced while the center was weakly contrast-enhanced. The CT image of ventriculitis showed a strong contrast-enhancement along the lateral ventricle wall, and the CT image of meningitis showed a strong contrast-enhancement in the area between the telencephalon and the diencephalon. In dynamic CT images, the HU value of the infection core before injecting contrast medium was $31.01{\pm}3.55$. By 10 minutes after the injection, the value increased gradually to $40.36{\pm}3.76$. The HU value in the areas of the marginal rim where was hyper-enhanced showed $47.23{\pm}3.12$ before contrast injection, and it increased to $63.59{\pm}3.31$ about 45 seconds after the injection. In addition, the HU value of the normal brain tissue opposite to the E. coli. injected brain was $39.01{\pm}3.24$ before the injection, but after the contrast injection, the value increased to $49.01{\pm}4.29$ in about 30 seconds, and then it showed a gradual decline. In the arterial blood CT, the HU value before the contrast injection was $87.78{\pm}6.88$, and it increased dramatically between 10 to 30 seconds until it reached a maximum value of $749.13{\pm}98.48$. Then it fell sharply to $467.85{\pm}62.98$ between 30 seconds to 45 seconds and reached a plateau by 60 seconds. Later, the value showed a steady decrease and indicated $188.28{\pm}25.03$ at 20 minutes. Through this experiment, it was demonstrated that the brain infection model can be produced by injecting E. coli., and the characteristic of the infection model can be well observed with contrast-enhanced CT scan. The dynamic CT scan showed that the center of the infection was gradually contrast-enhanced, whereases the peripheral area was rapidly contrast-enhanced and then slowly decreased. As for arterial blood, it increased significantly between 10 seconds to 30 seconds after the contrast medium injection and decreased gradually after reaching a plateau.

Study on Measuring the Value of Recreational Forests Using Contingent Valuation Method (조건부가치측정법을 이용한 자연휴양림 휴양가치 측정)

  • Kang, Kee-Rae
    • Journal of the Korean Institute of Landscape Architecture
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    • v.37 no.5
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    • pp.42-52
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    • 2009
  • Recreational forests are catching on as places for personal development through recreation, association with people, education about nature, mind relaxation and spiritual peace. However, the value and significance of recreational forests with various functions are easily overlooked. Whoever pays fees for admission to facilities are able to enjoy fresh air, a comfortable environment, and space for rest. It should be taken into consideration whether the fee which customers pay is appropriate for the value of nature they are enjoying. This study is involved in giving the right recognition to the value of recreation and environment by estimating economically the value of the environment in which visitors stay, and presenting the appropriate price. The most efficient way to achieve this goal is through an economic approach, which suggests following established research skills and yielding suitable and accurate amounts of money. The environmental value of a recreational forests is estimated through contingent valuation method(CVM), which is chosen among several methods to estimate public facilities because the value of recreational forests has strong characteristics as public facilities which are not traded in the market. The annual recreation value per person of surveyed recreational forests is Willingness To Pay(WTP) with a mean between about 16,000 won and 25,400 won. The recreation value of one recreational forest surveyed is annually between approximately 1.7 billions won and 2.7 billions won. The annual recreation value of 85 national and public recreational forests is presumed to be between about 140 billions won and 230 billions won. The presumed amount of money is the environment in which visitors can enjoy whenever they invest some money and time. Indeed, it is more than that; it provides visitors with a greater sense of satisfaction and the recognition of the preciousness of nature and the environment.

Deacidification Effect of Campbell Early Must via Carbonic Maceration : Effect of Enzyme Activity Associated with Malic-Acid Metabolism (Carbonic Maceration처리에 의한 Campbell Early 발효액의 감산 효과: 사과산 대사 관련 효소활성의 영향)

  • Chang, Eun-Ha;Jeong, Seok-Tae;Jeong, Sung-Min;Roh, Jeong-Ho;Park, Kyo-Sun;Park, Seo-Jun;Choi, Jong-Uck
    • Food Science and Preservation
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    • v.18 no.5
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    • pp.795-802
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    • 2011
  • To determine the deacidification factor during carbonic maceration (CM), different temperature conditions were studied. The pH was higher in CM-$35^{\circ}C$ and CM-$25^{\circ}C$ and was lower in CM-$45^{\circ}C$. The total acid was inversely related to the pH. The malic-acid level decreased much more in CM-$35^{\circ}C$ than in CM-$45^{\circ}C$ while the lactic-acid level increased much more in CM-$35^{\circ}C$. The activity of the NADP-malic enzyme, which catalyzes the oxidative decarboxylation of L-malate into pyruvate, $CO_2$, and NADPH, was higher in CM-$25^{\circ}C$ and CM-$35^{\circ}C$ while CM-$45^{\circ}C$ showed no NADP-malic enzyme activity. The malic-dehydrogenase (MDH) activity was higher in CM-$25^{\circ}C$ and CM-$35^{\circ}C$ while CM-$45^{\circ}C$ showed no MDH activity. The oxalacetate decarboxylase activity was similar to the NADP-malic-enzyme and MDH activities. Pyruvate decarboxylase activity was shown in all the CM treatments. The L-lactic dehydrogenase (LDH) activity was not explored in the fermentation of pyruvate to lactate via LDH in the grapes during CM. In this study, it was confirmed that carbonic maceration reduced the malic acid during fermentation and was affected by the temperature. Moreover, it was assumed that the deacidification during the carbonic maceration of the grapes was probably correlated with the degradation enzyme activity of malic acid.

BONDING OF RESIN INLAY TO GLASS-IONOMER BASE WITH VARIOUS TREATMENTS ON INLAY SURFACE (내표면 처리에 따른 레진 인레이와 글래스아이오노머 베이스간의 접착)

  • Jang, Byung-Sung;Kim, Sung-Kyo
    • Restorative Dentistry and Endodontics
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    • v.25 no.3
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    • pp.399-406
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    • 2000
  • The effect of inlay surface treatment on bonding was investigated when resin inlay was bonded to resin-modified glass-ionomer base with resin cement. For the preparation of glass-ionomer base, resin-modified glass-ionomer cement (Fuji II LC, GC Co., Japan) was filled in class I cavities of 7mm in diameter and 2mm in depth made in plastic molds. Eighty eight resin inlay specimens were made with Charisma$^{(R)}$ (Kulzer, Germany) and then randomly assigned to the four different surface treatment conditions: Group I, $50{\mu}m$ aluminium oxide sandblasting and silane treatment ; Group II, silane treatment alone ; Group III, sandblasting alone, and Group IV (control), no surface treatment. After a dentin bonding agent with primer (One-Step$^{TM}$, Bisco Inc., IL., U.S.A.) was applied to bonding surface of resin inlay and base, resin inlay were cemented to glass-ionomer base with a resin cement (Choice$^{TM}$, Bisco Inc., IL., U.S.A.). Shear bond strengths of each specimens were measured using Instron universal testing machine (4202 Instron, lnstron Co., U.S.A.) and fractured surfaces were examined under the stereoscope. Statistical analysis was done with one-way ANOVA and Dunkan's multiple range test. The results were as follows: 1. Sandblasting and silane treatment provided the greatest bond strength(10.56${\pm}$1.95 MPa), and showed a significantly greater bond strength than sandblasting alone or no treatment (p<0.05). 2. Silane treatment provided a significantly greater bond strength(9.77${\pm}$2.04 MPa) than sandblasting alone or no treatment (p<0.05). However, there was no significant difference in bond strength between sandblasting treatment and silane one (p>0.05). 3. Sandblasting alone provided no significant difference in bond strength from no treatment (p>0.05). 4. Stereoscopic examination of fractured surface showed that sandblasting and silane treatment or silane treatment alone had more cohesive failure mode than adhesive failure mode. 5. In relationship between shear bond strength and failure mode, cohesive failure occurred more frequently as bond strength increased.

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Effect of Stem Bark Extract from Morus alba and Cudrania tricuspidata on the Concentrations of Lipid and Tissue Lipid Peroxidation in the Cholesterol-Fed Rats (뽕나무와 꾸지뽕나무의 수피 수용성 추출물이 콜레스테롤 함유식이 투여 흰쥐의 지질농도 및 과산화지질 농도에 미치는 영향)

  • Cha, Jae-Young;Cho, Young-Su
    • Korean Journal of Food Science and Technology
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    • v.33 no.1
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    • pp.128-134
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    • 2001
  • Male Sprague-Dawley rats received either a cholesterol diet(Control group) or cholesterol diets supplemented with the water-soluble extract of stem bark from Morus alba(M group) or Cudrania tricuspidata(C group) at the level of 1% for 2 weeks. Concentrations of total cholesterol and phospholipid in serum of C group and triglyceride in serum of M group were lower than those of control group. Concentration of cholesterol in liver of M and C groups has a tendency to be lower than that of control group. Antioxidative activities of water-soluble extracts from stem bark of Morus alba and Cudrania tricuspidata on the peroxidation of lipid in tissues of rats were also studied in vivo by measuring the formation of thiobarbituric acid reactive substances (TBARS). Concentration of TBARS in kidney of M and C groups was significantly lower than control group. However, concentration of TBARS in liver and brain of C and M groups was significantly higher than in control group. The result that concentration of nonheme ion was significantly increased in liver of the mulberry supplemented groups comparision to control group, suggested that enhanced concentration of nonheme ion was associated with enhanced peroxidation of lipid in this group. Concentration of TBARS in microsomes of liver and brain in control group induced with $Fe^{2+}$/ascorbate increased by reaction time at $37^{\circ}C$, whereas this observation in liver did not occurred in C and M groups. This study suggested that water-extract from stem bark of Morus alba and Cudrania tricuspidata exert hypotriglycerolemic effect as well as antioxidative effect in kidney and liver microsomes in rats fed a cholesterol diet.

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Annual biomass production and amount of organic carbon in Abies koreana forest of subalpine zone at Mt. Halla (한라산 아고산대 구상나무림에서 연간 물질생산과 유기탄소량 변화)

  • Jang, Rae-Ha;Cho, Kyu-Tae;You, Young-Han
    • Korean Journal of Environment and Ecology
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    • v.28 no.6
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    • pp.627-633
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    • 2014
  • Annual biomass production and amount of organic carbon in Abies koreana forest at Mt. Halla were conducted as a part of Korea National Long-Term Ecological Research (KNLTER). We measured standing biomass change of litter, soil production and organic carbon amounts of the forest floor and soil layer of A. koreana forest in Mt. Halla from 2009 to 2013 in permanent plots. Standing biomass, which was determined by allometric method, was converted into $CO_2$. The standing biomass in A. koreana forest was 98.88, 106.42, 107.67, 108.31, $91.48ton\;ha^{-1}$ in 2009, 2010, 2011, 2012 and 2013 year, respectively. The amount of annual carbon allocated to above ground was 35.95, 38.69, 38.96, 39.46, $33.2ton\;C\;ha^{-1}$ and below ground biomass was 8.54, 9.2, 9.49, 9.28, $7.97ton\;C\;ha^{-1}$ in 2009, 2010, 2011, 2012 and 2013 year, respectively. Amount of organic carbon returned to the forest via litterfall was 1.09, 1.80, 1.32, 2.46 and $1.20ton\;C\;ha^{-1}$ in 2009, 2010, 2011, 2012 and 2013. Amount of organic carbon in annual litter layer on forest floor was 2.74, 2.43, 2.00 and $1.16ton\;C\;ha^{-1}$ in 2010, 2011, 2012 and 2013 year, respectively. Amount of organic carbon within 20cm soil depth was 55.77, 54.9, 50.69, 44.42 and $41.87ton\;C\;ha^{-1}20cm^{-1}$ in 2009, 2010, 2011, 2012 and 2013 year, respectively. Then standing biomass and organic carbon distribution increased steadily until 2012. But there declined in 2013 because of the typhoon Bolaven. Thus, standing biomass and organic carbon distribution of this subalpine forest were largely affected by natural disturbance factor.

Experimental study on the ground subsidence due to the excavation of a shallow tunnel (경사지반에서 얕은터널의 굴착에 따른 지표침하에 대한 실험적 연구)

  • Park, Chan Hyuk;Lee, Sang Duk
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.19 no.5
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    • pp.761-778
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    • 2017
  • The need of the underground space for the infrastructures in urban area is increasing, and especially the demand for shallow tunnels increased drastically. It is very important that the shallow tunnel in the urban area should fulfill not only its own safety conditions but also the safety condition for the adjacent structures and the surrounding sub-structure. Most of the studies on the behavior of shallow tunnels concentrated only on their behaviors due to the local deformation of the tunnel, such as tunnel crown or tunnel sidewall. However, few studies have been performed for the behavior of the shallow tunnel due to the deformation of the entire tunnel. Therefore, in this study the behavior of the surrounding ground and the stability caused by deformation of the whole tunnel were studied. For that purpose, model tests were performed for the various ground surface slopes and the cover depth of the tunnel. The model tunnel (width 300 mm, height 200 mm) could be simulationally deformed in the vertical and horizontal direction. The model ground was built by using carbon rods of three types (4 mm, 6 mm, 8 mm), in various surface slopes and cover depth of the tunnel. The subsidence of ground surface, the load on the tunnel crown and the sidewall, and the transferred load near tunnel were measured. As results, the ground surface subsided above the tunnel, and its amount decreased as the distance from the tunnel increased. The influence of a tunnel ceased in a certain distance from the tunnel. At the inclined ground surface, the wider subsidence has been occurred. The loads on the crown and the sidewall were clearly visible, but there was no effect of the surface slope at a certain depth. The load transfer on the adjacent ground was larger when the cover depth (on the horizontal surface) was lager. The higher the level (on the inclined surface), the wider and smaller it appeared. On the shallow tunnel under inclined surface, the transfer of the ambient load on the tunnel sidewall (low side) was clearly visible.