• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.493-493
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• 2013

에싱(Ashing)공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는 고균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 각각 상부와 하부에 설치하여 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 0.7~1 Torr 공정 압력 범위의 질소와 산소 혼합 기체에서 2,500 W 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가된다. 에싱 공정을 위한 플라즈마 균일도를 분석하기 위해 Wafer의 위치에서 부유 탐침법을 적용하여 중심부에서 외곽부로 지름축 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하고, 공정 조건에 따른 에싱율(Asing Rate)을 측정하였다. 동일한공정 조건에서 하나의 방전 코일을 이용한 경우의 플라즈마 균일도 대비 이중 코일 구조를 이용한 경우 플라즈마 균일도가 크게 향상됨을 보였다. 이는 상부의 유도코일이 wafer 위치에서 주로 지름방향 중심부의 플라즈마 밀도에 기여하고, 하부의 유도코일은 주로 외곽의 플라즈마 밀도에 기여해서 나타나는 현상이다. 공정용 장비에서 플라즈마 균일도의 개선으로 공정 수율을 증가 시키는 효과를 기대할 수 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.492-492
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• 2013

반도체 공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는고 균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 상부와 하부에 설치하였으며, 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 상부의 반응 용기는 외곽에 유도 코일을 권선하였고, 하부의 반응 용기는 고밀도의 플라즈마 생성을 위해 강자성체를 이용하여 권선하였으며, 강자성체는 쿼츠관을 둘러 싼 구조로 되어 있다. 0.5-1 Torr 공정 압력 범위의 아르곤 기체에서 전체 2500 W의 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가되는 구조로 설계하였다. 반도체 공정을 위한 플라즈마 균일도를 분석하기 위해 wafer의 위치에서 부유 탐침법을 적용하여 wafer 중심부로부터 반경 방향으로 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하였다. 동일한 공정 조건에서 하부에 강자성체를 사용하여 권선한 이중 구조의 경우 하나의 방전 코일을 이용한 구조 대비 플라즈마 밀도가 증가하였고, 플라즈마 균일도가 크게 향상됨을 보였다. 강자성체를 이용한 하부 코일에 의해 wafer 외곽 부분의 밀도가 높은 분포를 갖는 플라즈마가 형성되고, 상부의 유도코일에 의해 wafer 중심부에 밀도가 높은 플라즈마가 형성되어 wafer의 플라즈마 균일도가 개선된다. 또한, 강자성체를 이용한 하부 코일에 의해 고밀도의 플라즈마가 형성되므로 반도체 공정을 위한 장비에서 플라즈마 균일도의 개선과 밀도의 향상으로 대면적 Dry Strip 공정 (450mm)에 적용 가능하다.

• Korean Chemical Engineering Research
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• v.50 no.2
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• pp.343-347
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• 2012

The decomposition behaviors of gaseous cyanides in non-thermal plasma-catalyst hybrid reactor have been investigated with the variation of discharge power, influent concentration of cyanide, humidity of air carrier and packed materials in the reactor. Destruction of cyanides by plasma only process was very difficult compared to that of trichloroethylene. But the destruction efficiencies of cyanides were dramatically improved through packing alumina or Pt/alumina bead in the plasma discharge region. From the results, it could be assumed that thermal catalytic effect is involved simultaneously with plasma in the reaction of cyanides destruction on the alumina or Pt/alumina packed plasma reactor.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.05a
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• pp.239-242
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• 2009

고휘도 방전(High Intensity Discharge ; HID)램프는 고압기체 또는 증기 중의 방전에 의한 발광을 이용한 램프로서 고압수은램프, 메탈핼라이드램프 및 고압나트륨램프를 총칭한다. 이들 HID램프는 작은 발광관에서 고출력의 광속을 발산시킬 수 있기 때문에 주로 많은 광속을 필요로 하는 장소에 폭넓게 사용되어지고 있다. 특히, 메탈핼라이드램프의 경우 금속 고유의 여기파장을 이용하여 기존 수은방전에서 결핍된 스펙트럼을 보충할 수 있기 때문에 보다 높은 발광효율과 연색성을 향상시킬 수 있어 HID램프 중 가장 이상적인 광원으로 평가받고 있다. 근래에는 기존 발광관 재료로 사용해 오던 석영(Quartz)을 내열성 및 내식성 등이 우수한 alumina ceramic으로 교체한 세라믹 메탈핼라이드(Ceramic Metal Halide ; CMH) 램프가 개발되어 램프의 소형화를 통해 옥내 상업용 조명시설에 급속히 보급이 이루어지고 있다. 본 논문에서는 이러한 CMH램프의 우수한 특성을 살펴보기 위하여 국외 선진제품에 대한 전기적, 광학적 특성을 살펴보았다.

• Clean Technology
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• v.13 no.2
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• pp.115-121
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• 2007

In this study, we analyzed experimently the NO and $SO_2$ removal by the dielectric barrier discharge-photocatalysts hybrid process. The glass spheres were used as a dielectric material for dielectric barrier discharge and the $TiO_2$ photocatalysts were coated onto those spheres by the dip-coating method. The $TiO_2$ particles were coated in the sponge-shape, which has the larger surface area. As the voltage applied to the plasma reactor, the pulse frequency of applied voltage, or the residence time increases, the NO and $SO_2$ removal efficiencies increase. The increase in the supplied concentrations of NO and $SO_2$ leads to the higher energy for NO and $SO_2$ removal and the NO and $SO_2$ removal efficiencies decrease. These experimental results can be used as a basis to design the dielectric barrier discharge-photocatalysts hybrid process to remove NO and $SO_2$.

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.115-115
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• 2006

• Applied Chemistry for Engineering
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• v.26 no.4
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• pp.495-504
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• 2015

This work investigated the characteristics of a packed-bed plasma reactor system and the performances of the plasma reactors connected in series or in parallel for the decomposition of ethylene. Before the discharge ignition, the effective capacitance of the ${\gamma}$-alumina packed-bed plasma reactor was larger than that of the reactor without any packing, but after the ignition the effective capacitance was similar to each other, regardless of the packing. The energy of electrons created by plasma depends mainly on the electric field intensity, and was not significantly affected by the gas composition in the range of 0~20% (v/v) oxygen (nitrogen : 80~100% (v/v)). Among the various reactive species generated by plasma, ground-state atomic oxygen and ozone are understood to be primarily involved in oxidation reactions, and as the electric field intensity increases, the amount of ground-state atomic oxygen relatively decreases while that of nitrogen atom increases. Even though there are many parameters affecting the performance of the plasma reactor such as a voltage, discharge power, gas flow rate and residence time, all parameters can be integrated into a single parameter, namely, specific input energy (SIE). It was experimentally confirmed that the performances of the plasma reactors connected in series or in parallel could be treated as a function of SIE alone, which simplifies the scale-up design procedure. Besides, the ethylene decomposition results can be predicted by the calculation using the rate constant expressed as a function of SIE.

• Journal of Advanced Marine Engineering and Technology
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• v.38 no.1
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• pp.48-55
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• 2014

These Xenon flashlamp power supply for Ultra Violet has converter with high voltage conversion ratio. General model is composed of transformer with high voltage conversion ratio and voltage doubler rectifier circuit. Purpose of power supply leads dielectric breakdown of Xenon flashlamp and passes current rapidly. When passing current, it has to limit current to avoid over-heat, damage of electrode and acceleration of gas oxidation which are cause of performance degradation of lamps. Generally, inductors and resistors, which are called as "Ballast," are used to limit currents. Generally, Transformer has high turn ratio to make high voltages. But we can get high voltages using the transformer with low turn ratio which is driven with self resonance. Also, an advantage of self resonance is to make a circuit simply through impedance of transformer in resonance frequency which filters output voltage. As using an unique impedance of transformer, the circuit does not need other impedance elements like the ballast. So the power supply assures high efficiency of the arc discharge.

• Journal of Industrial Technology
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• v.18
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• pp.249-258
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• 1998

In this paper, we investigated the post-combustion removal of nitrogen oxide($NO_x$) and sulfur oxide($SO_x$) which is based on the gas to particle conversion process by the pulsed corona discharge. Under normal pressure, the pulsed corona discharge produces the energetic free electrons which dissociate gas molecules to form the active radicals. These radicals cause the chemical reactions that convert $SO_x$ and $NO_x$ into acid mists and these mists react with $NH_3$ to form solid particles. Those particles can be removed from the gas stream by conventional devices such as electrostatic precipitator or bag filter. The reactor geometry was coaxial with an inner wire discharge electrode and an outer ground electrode wrapped on a glass tube. The simulated flue gas with $SO_x$ and $NO_x$ was used in the experiment. The corona discharge reactor was more efficient in removing $SO_x$ and $NO_x$ by adding $NH_3$ and $H_2O$ in the gas stream. We also measured the removal efficiency of $SO_x$ and $NO_x$ in a cylinder type corona discharge reactor and obtained more than 90 % of removal efficiency in these experimental conditions. The effects of process variables such as the inlet concentrations of $SO_x$, $NH_3$ and $H_2O$, residence time, pulse frequencies and applied voltages were investigated.

• Journal of Astronomy and Space Sciences
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• v.14 no.2
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• pp.297-311
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• 1997

To understand the mass-independent isotopic fractionation effects, thermal decomposition of ozone was performed. Initial oxygen gas was converted to ozone completely. Then, the ozone was decomposed to oxygen at various temperatures ($30~150^{\circ}C$). Isotopic compositions of product oxygen and residual ozone were measured using a stable isotope mass spectrometer. The experimental results were compared with the studies which were performed at the similar conditions. From the raw experimental data, the functions of the instantaneous fractionation factors were calculated by the least square fit. The results clearly showed the temperature dependence. They also showed the pressure dependence and the surface effect. This study may play an important role in the study of ozone decomposition mechanism. It can be applied to explain the mass-independent isotopic pattern found in stratospheric ozone and in meteorites.