• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.368-373
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• 1998

As device dimensions approach submicrometer size in ULSI, the demand for interlayer dielectric materials with very low dielectric constant is increased to solve problems of RC delay caused by increase in parasitic resistance and capacitance in multilevel interconnectins. Fluorinated amorphous carbon in one of the promising materials in ULSI for the interlayer dielectric films with low dielectric constant. However, poor thermal stability and adhesion with Si substrates have inhibited its use. Recently, amorphous hydrogenated carbon (a-C:H) film as a buffer layer between the Si substrate and a-C:F has been introduced because it improves the adhesion with Si substrate. In this study, therfore, a-C:F/a-C:H films were deposited on p-type Si(100) by ECRCVD from $C_2F_6, CH_4$and $H_2$gas source and investigated the effect of forward power and composition on the thickness, chemical bonding state, dielectric constant, surface morphology and roughness of a-C:F films as an interlayer dielectric for ULSI. SEM, FT-IR, XPS, C-V meter and AFM were used for determination of each properties. The dielectric constant in the a-C:F/a-C:H films were found to decrease with increasing fluorine content. However, the dielectric constant increased after furnace annealing in $N_2$atomosphere at $400^{\circ}C$ for 1hour due to decreasing of flurorine content. However, the dielectric constant increased after furnace annealing in $N_2$atmosphere at $400^{\circ}C$ for 1hour due to decreasing of fluorine concentration.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.18 no.8
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• pp.887-894
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• 2007

In this paper, design and fabrication of the LPF with controllable four transmission zeros using electric coupling and added open stub is presented. Pass-band of the LPF is GSM band, and two transmission zeros are generated by the electric coupling at the WiBro and S-DMB band, And the other two transmission zeros are generated by the open stub at the upper frequencies. Harmonic frequency of the stop-band is suppressed by the realization of the filter using quasi-lumped element with small parasitic values. $C_M$, which is the electric coupling element of the equivalent circuit, is realized by the distance control between the open stubs of the filter structure. The fabricated LPF used teflon substrate with relative permittivity of 2.6. And it has a size of $38{\times}20{\times}0.79 mm^3$, which is including a feed line. The measured 3 dB cut-off frequency is 1.55 GHz, and locations of the transmission zeros are 2.20, 2.43, 4.11 and 6.84 GHz, respectively.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.42 no.4
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• pp.864-870
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• 2017

This paper describes a Dual Buck Converter with mode control using variable Frequency to Voltage for portable devices requiring wide load current. The inherent problems of PLL compensation and efficiency degradation in light load current that the conventional hysteretic buck converter has faced have been resolved by using the proposed Dual buck converter which include improved PFM Mode not to require compensation. The proposed mode controller can also improve the difficulty of detecting the load change of the mode controller, which is the main circuit of the conventional dual mode buck converter, and the slow mode switching speed. the proposed mode controller has mode switching time of at least 1.5us. The proposed DC-DC buck converter was implemented by using $0.18{\mu}m$ CMOS process and die size was $1.38mm{\times}1.37mm$. The post simulation results with inductor and capacitor including parasitic elements showed that the proposed circuit received the input of 2.7~3.3V and generated output of 1.2V with the output ripple voltage had the PFM mode of 65mV and 16mV at the fixed switching frequency of 2MHz in hysteretic mode under load currents of 1~500mA. The maximum efficiency of the proposed dual-mode buck converter is 95% at 80mA and is more than 85% efficient under load currents of 1~500mA.