• Title/Summary/Keyword: 급속 열처리 공정

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Characterization of Ga-doped ZnO thin films prepared by RF magnetron sputtering method (RF 마그네트론 스퍼터링법으로 합성된 Ga-doped ZnO 박막의 특성평가)

  • Yun, Young-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.2
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    • pp.73-77
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    • 2021
  • Ga-doped ZnO thin films by RF magnetron sputtering process were synthesized according to the deposition conditions of O2 and Ar atmosphere gases, and rapid heat treatment (RTA) was performed at 600℃ in an N2 atmosphere. The thickness of the deposited ZnO : Ga thin film was measured, the crystal phase was investigated by XRD pattern analysis, and the microstructure of the thin film was observed by FE-SEM and AFM images. The intensity of the (002) plane of the X-ray diffraction pattern showed a significant difference depending on the deposition conditions of the thin films formed by O2 and Ar atmosphere gas types. In the case of a single thin f ilm doped with Ga under O2 conditions, a strong diffraction peak was observed. Under O2 and Ar conditions, in the case of a multilayer thin film with Ga doping, only a peak on the (002) plane with a somewhat weak intensity was shown. In the FE-SEM image, it was observed that the grain size of the surface of the thin film slightly increased as the thickness increased. In the case of a multilayer thin film with Ga doping under O2 and Ar atmosphere conditions, the specific resistance was 6.4 × 10-4 Ω·cm. In the case of a single thin film with Ga doping under O2 atmosphere conditions, the resistance of the thin film decreased. The resistance decreased as the thickness of the Ga-doped ZnO thin film increased to 2 ㎛, showing relatively a low specific resistance of 1.0 × 10-3 Ω·cm.

Antimicrobial Activities of Natural Medicinal Herbs on the Food Spoilage or Foodborne Disease Microorganisms (식품부패 및 병원성미생물에 대한 천연약용식물 추출물의 항균효과)

  • Oh, Deog-Hwan;Ham, Seung-Shi;Park, Boo-Kil;Ahn, Cheol;Yu, Jin-Young
    • Korean Journal of Food Science and Technology
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    • v.30 no.4
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    • pp.957-963
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    • 1998
  • Several medicinal herbs, which are nontoxic and have been used widely in traditional folk medicine, were extracted and antimicrobial activity of the extracts was investigated against various foodborne pathogens or food poisioning microorganisms. The ethanol extract of Sansa, Hwangryun, Cheukbaek, and Seokchangpo showed strong antimicrobial activities against Gram postive and Gram negative bacteria, whereas those of Sakunja, Sukjihwang and Baekji had little antimicrobial activities on microorganisms tested. Among medicinal herb extracts, ethanol extract of Coptis chinensis Franch (hwangryun) showed the strongest antimicrobial activity. Antimicrobial activity of ethanol extract of Coptis chinensis Franch was not destroyed by heating at $100^{\circ}C$ for 60 min and at $121^{\circ}C$ for 30 min, which is very stable over heat. The pH effect on minimal inhibitory concentrations (MIC) of the extract of Coptis chinensis Franch indicated that MIC was reduced with increasing the pH value of the medium. The inhibitory effect of partially purified substance from the ethanol extract of Coptis chinensis Franch on the growth of Listeria monocytogenes and Staphylococcus aureus was investigated. Growth of those strains occurred at the concentration of $100{\;}{\mu}g/mL$ and were inhibited at $500{\;}{\mu}g/mL$, whereas those strains was completely inactivated in the presence of $1000{\;}{\mu}g/mL$.

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