• Title/Summary/Keyword: 금속화

Search Result 2,189, Processing Time 0.034 seconds

DC 마그네트론 스퍼터법에 의해 증착한 금속박막의 실시간 면저항 변화 특성연구

  • Gwon, Na-Hyeon;Kim, Hoe-Bong;Park, Gi-Jeong;Hwang, Bin;Jo, Yeong-Rae
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.158-158
    • /
    • 2010
  • 최근 전자산업의 발전은 형상 면에서 경박 단소화로 급속하게 진행되고 있으며, 전자소자 내부에서의 배선재료로 사용되고 있는 알루미늄(Al) 박막의 두께 역시 얇아지고 있다. 극박막 범위에서 박막의 두께 증가에 따라 전기가 잘 흐르기 시작하는 박막의 최소두께로 정의 되는 유착두께를 실시간으로 측정하는 방법을 구현하고 임의의 금속박막과 기판의 조합에 있어서 각각의 재료에 대한 유착두께를 제공함으로써 향후 미세전자소자의 제작 시 배선 재료의 선택에 대한 기초자료를 축적할 수 있다. 또한 박막의 미세구조 변화 관점에서 연구함으로써 여러 가지 금속박막에 대한 유착두께를 줄일 수 있는 방법을 도출할 수 있다. 본 연구에서는 유리 기판 위에 사진 식각 공정으로 패턴을 형성하고 패턴이 형성된 유리 기판은 스퍼터에 연결된 4 point probe에 구리 도선으로 연결한 후 DC 마그네트론 스퍼터법으로 Al, Cr, ITO, Sn을 증착하면서 실시간으로 시간에 따른 면저항을 측정하며 이 때 스퍼터 내부 진공도는 $4.6{\times}10^{-5}$까지 낮춰준 후 각각의 금속에 맞는 진공도를 설정하였다. 20.0 sccm의 Ar가스를 넣고 100 W파워로 플라즈마를 형성시켜 금속을 증착하면서 4-point probe를 이용하여 실시간으로 면저항을 측정했다. 1초 단위로 면저항을 측정한 결과 평균적으로 Al은 71초, Cr은 151초, ITO는 61초, Sn은 20초에 저항이 급격히 감소함을 알 수 있었다. 또한 저항이 급격히 감소한 시점의 박막 두께를 알기 위해Surface profiler로 박막두께를 측정한 결과 1초당 Al은 $4\;{\AA}$, Cr은 $1.7\;{\AA}$, ITO는 $2.7\;{\AA}$, Sn은 $6.7\;{\AA}$ 이었다. 실험적으로 R은 면저항, T는 증착 시간이라 할 때 Y축을 $R{\times}T^3$으로 하고 X축을 T로 설정하고 그래프로 나타내면 Y축 값이 최소값을 갖는 시점이 유착두께임을 확인하였다. 본 연구는 실시간 면저항 측정을 통한 금속박막의 전기전도 특성과 미세구조에 대한 기초자료를 제공함으로써 신기술 발전에 공헌할 것이다.

  • PDF

국내 광업현황과 당면과제

  • 기태석
    • Proceedings of the KSEEG Conference
    • /
    • 2002.10a
    • /
    • pp.31-52
    • /
    • 2002
  • 국내광업은 ‘90년대 이후 석탄산업합리화조치와 국제금속광물시장 가격안정화로 그 동안 광업을 주도한 석탄산업과 금속광업은 급격히 위축되는 한편, 산업원료의 수요증가 추세에 힘입어 비금속광물 개발은 비교적 활발한 상태이다. 이와 같이 국내 광업의 주긴 영역이 석탄광과 금속광에서 비금속광 중심으로 개편되고 있으나, 현재 가행중인 비금속광은 고품위광체 확보 미흡, 고부가가치 기술낙후 등으로 고가의 주요 산업원료는 주로 수입에 의존하고 있는 실정이다. 따라서 국내광업으로서는 비금속광 중심의 단순한 원광식 생산$\cdot$판매체계를 고부가 산업으로 전환시키기 위한 전략적인 방안이 필요한 시기이다. 본 발표문은 이러한 국내광업의 향후 발전방향을 모색하기 위하여 국내 광업이 국가 경제에서 차지하는 영역을 중심으로 $\boxDr$광업동향$\boxUl$ $\boxDr$광업의 국내$\cdot$외 환경분석$\boxUl$ $\boxDr$광업의 경제활동 현황$\boxUl$ $\boxDr$광업의 경제적 위치와 역할$\boxUl$로 분류하여 자료분석을 실시하였으며, 분석한 자료를 토대로 국내광업의 중요성과 당면과제를 도출하고 이에 따른 광업의 새로운 역할을 제시하고자 하였다. 국내광업은 각종 지표에서 나타난 바와 같이 여러 가지 구조적인 문제점으로 인해 개발에 어려움을 겪고 있지만 각종 산업원료의 중간재 공급원으로서의 전통적인 역할을 충실히 담당하고 있는 것으로 분석되었다. 그러나 과학기술의 급격한 발달, 소비패턴의 변화, 생활환경과 삶의 질을 중시하는 새로운 가치관의 확산 등으로 광업의 역할도 새로운 변화의 전기를 맞이하고 있음을 볼 수 있다. 국내광업이 21C 급변하는 산업환경에 적응하여 생존하기 위해서는 각종 첨단산업에서 요구하는 소량 다품종의 원료광물을 적기에 공급 할 수 있는 전문화된 기술력을 하루속히 확보해야 하며, 이를 위해 고품위의 원료광물 확보를 위한 탐사 및 개발을 적극 추진하고 가공기술의 선진화를 위해 선진국과의 기술제휴 등 자원산업 글로벌화 정책이 절실히 요구되고 있음을 알 수 있다 또한 삶의 질을 향상시키려는 현대인의 가치관에 부합하기 위해서는 각종 소비제품의 원료를 제공하는 광업의 본래 목적 이외에도 자연환경 훼손을 최소화하며 개발 할 수 밖에 없는 구조적인 어려움에 직면할 수 밖에 없다. 이처럼 국내광업이 안고 있는 여러 가지 난제들을 극복하기 위해서는 업계와 정부가 합심하여 국내광업 육성의 중요성을 재인식하고 새로운 마음가짐으로 관련 정책을 수립 일관성있게 추진해 나가야 할 것으로 보인다.

  • PDF

Mechanical alloying behavior of PbTe thermoelectric materials (PbTe 열전재료의 기계적 합금화 거동)

  • O, Tae-Seong;Choe, Jae-Sik;Hyeon, Do-Bin
    • Korean Journal of Materials Research
    • /
    • v.5 no.2
    • /
    • pp.223-231
    • /
    • 1995
  • Mechanical alloying behavior of the PbTe intermetallic compound, which is used for thermoelectric generation, has been investigated with milling time and ball-to-powder weight ratio. Formation of PbTe alloy was completed by mechanical alloying of the as-mixed Pb and Te powders for 2 minutes at ball-to-powder weight ratio of 2 : 1. In situ measurement of the abrupt temperature rise during the ball milling process indicated that the PbTe intermetallic compound was formed by a self-sustained reaction rather than diffusional reactions. Lattice constant of PbTe alloy fabricated by mechanical alloying, 0. 6462nm, was not varied with milling time and ball-to-powder weight ratio. This value of the lattice parameter is in excellent agreement with 0.6459nm, which was reported for PbTe powders processed by melting and grinding.

  • PDF

CO Tolerance Improvement of MEA Using Metal Thin Film by Sputtering Method in PEM Fuel Cell (스퍼터링 공정으로 제조된 금속박막을 이용한 고분자전해질 연료전지 막-전극접합체의 일산화탄소에 대한 내구성 연구)

  • Cho, Yong-Hun;Yoo, Sung-Jong;Cho, Yoon-Hwan;Park, Hyun-Seo;Sung, Yung-Eun
    • Journal of the Korean Electrochemical Society
    • /
    • v.10 no.4
    • /
    • pp.279-282
    • /
    • 2007
  • When reformer for fuel cell is used, CO in hydrogen gas leads to a seriously decreased membrane electrode assembly (MEA) performance by catalyst poisoning. The effect of CO on performance of modified MEA by sputtering method is studied in this paper. The experimental results show that sputtered Pt and Ru thin film improve a single cell performance of MEA and sputtered metal thin film has a CO tolerance. The air injection process on anode show improved CO tolerance test result. Moreover, Pt, Ru and PtRu thin film by sputtering had influence on the CO tolerance with air injection process.

Fabrication of an Optical Fiber Amplifier Using Long-period Fiber Gratings Formed by Periodically Arrayed Metal Wire (금속선의 주기적 배열로 유도된 장주기 격자를 이용한 이득 평탄화된 광섬유 증폭기 제작)

  • Sohn, Kyung-Rak;Hwang, Woong;Shim, June-Hwan
    • Journal of Navigation and Port Research
    • /
    • v.31 no.10
    • /
    • pp.833-837
    • /
    • 2007
  • In this study, we have fabricated a gain flattened erbium-doped optical fiber amplifier. Gain flattening filters were realized by the strain-induced long period fiber gratings, which are made of periodically arrayed metal wires. Using the filter of $550{\mu}m$ period, spontaneous emission amplified at C-band wavelength by a 980nm pumping laser was flattened within 1dB of gain ripple. The performance of the simultaneous multi channel amplification was measured using a fabry-perot laser diode. Amplification ratio was above 20dB. This amplifier can be applied to the long distance transmission system based on a wavelength division multiplexing for boosting an attenuated signal.

A Study on the joining of $Al_2$$O_3$ to STS304 with using Cu-Ti Insert metal (Cu-Ti삽입금속을 이용한 $Al_2$$O_3$-STS304접합체 계면조직에 관한 연구)

  • Kim, Byeong-Mu;Sin, Sun-Beom;Gang, Jeong-Yun;Lee, Sang-Rae
    • Korean Journal of Materials Research
    • /
    • v.3 no.1
    • /
    • pp.33-42
    • /
    • 1993
  • Abstract The increasing application of $Al_2$,$O_3$ and related ceramics as engineering materials is because of their attractive properties of fine ceramics. One solution to the wide variety of ceramic to metal combination lies in the effective joining. Active metal brazing of $Al_2$,$O_3$, to STS304 was investigated using Cu -Ti alloys. Titanium additive is chosen since it is good oxide former~. Brazing is performed under vacuum($10^{-3}$-$10^{-4}$ torr), a temperature between 1100 and 120$0^{\circ}C$ and time of 0.5-1.5hr. The microstructure of the brazed joints of $Al_2$,$O_3$ to STS304 with Cu-Ti insert metals were examined by using optical microscope and SEM and reaction products were analyzed by using EDX, WDX and XRD. Also interfacial reactions occuring during the brazing of $Al_2$,$O_3$/Cu-Ti/STS304 system are discussed. Experimental results showed formation of Titanium oxide T$i_2$$O_3$ which is attributable to the joining $Al_2$,$O_3$ to STS304 with Cu-Ti insert metal.

  • PDF

Production of Carbon Monoxide and Carbon Dioxide Gases in the Combustion Tests (연소 시험에서 발생하는 일산화탄소와 이산화탄소의 발생)

  • Chung, Yeong-Jin
    • Fire Science and Engineering
    • /
    • v.29 no.5
    • /
    • pp.7-13
    • /
    • 2015
  • This study was performed to test the production of combustion toxic gases by Pinus rigida specimens treated with various types of methylpiperazinomethyl-bis-phosphonic acid $M^{n+}$ ($PIPEABPM^{n+}$) and methylpiperazinomethyl-bis-phosphonic acid (PIPEABP). Three coats of 15 wt% $PIPEABPM^{n+}$ and PIPEABP solutions were applied to plates of Pinus rigida at room temperature. After drying the treated specimens, the production of combustion toxic gases was examined using a cone calorimeter (ISO 5660-1). The specimens treated with $PIPEABPM^{n+}$ showed lower carbon monoxide production ($CO_{2\;peak}$; 0.0136~0.0178% at 532~678 s) than the PIPEABP plates, except for the specimen treated with $PIPEABPFe^{3+}$. In addition, the peak carbon dioxide production ($CO_{2\;peak}$) was lower (0.03648~0.3648% at 373~433 s) than that of the PIPEABP-treated plate. Notably, oxygen production was much higher than 15%, which can be fatal to humans. Therefore, the resulting risk could be eliminated. The results indicate that the combustion toxicities were partially decreased due to treatment of the virgin plate with $PIPEABPM^{n+}$.

The Strategies for Forming Governance System to Raise Industrial Competitiveness of Metal and Machinery Industrial Clusters in South-East Region, Korea (동남권 기계.금속산업클러스터의 광역적 지원체계 구축전략)

  • Kwon, O--Hyeok
    • Journal of the Economic Geographical Society of Korea
    • /
    • v.9 no.3
    • /
    • pp.297-317
    • /
    • 2006
  • This article is aimed to find a more successful way to build a metropolitan-wide governance for enhancing industrial cluster in South-East region, Korea. We begin a research with reviewing a current study of regional cluster and its governance. New industrial system and agglomeration changed regional growth theory and urban system. In traditional system, a central city dominated economy of the metropolitan area. However, with development of new transportation and communication technology, a central city lost their superiority to suburban cities. In other words, growing competition between central and suburban cities changed traditional concentration and diffusion theory of urbanization which dominated urban geography for last decades. Next, current situation of development of industrial cluster in South-East region is examined to suggest policy for more competitiveness. South-East region has grown as the most prominent cluster of mechanical engineering and metal industry in Korea since the late 1970s. In the form of agglomeration and network of a specific and its related industry, South-East region has formed a linear industrial belt along with the inter-regional South Coast Highway and contain about ten industrial cities. Accompanying with this growing South-East region, a problem has risen from geographic mismatch between metropolitan-wide industrial cluster and its administrative boundary. Since industrial cluster has no specific administrative boundary, adequate government support for developing industrial cluster has not been provided. Responding to the problem, academics and policy makers maintain need in establishing a metropolitan-wide governance for supporting a cluster. At the end, this paper provides some implication to planners and policy makers.

  • PDF

The Effect of Oxygen and Chlorine Dioxide during Pulp Bleaching - The Effect of Hydroxyl Radical and Metal Ion - (펄프 표백시 산소와 이산화염소의 영향 - 수산기 라디칼의 생성과 금속이온의 영향-)

  • Yoon, Byung-Ho;Jo, Byoung-Muk;Lee, Myoung-Ku
    • Journal of Forest and Environmental Science
    • /
    • v.13 no.1
    • /
    • pp.153-165
    • /
    • 1997
  • Hydroxyl radicals were detected and their qualitative yields were estimated by using chemiluminescence method and $\gamma$-irradiation technique in oxygen or chlorine dioxide radicals bleaching conditions. The correlation of hydroxyl radical formation and lignin model(Apocynol) or carbohydrate model($\alpha$-D-glucopyranose and methyl-$\beta$-D-glucopyranoside) degradation was studied in the presence of metal ion or without metal ion. The results showed that the presence of metal ions efficiently affected the formation of hydroxyl radicals in oxygen bleaching process, in the order of $Cu^{2+}$ > $Mn^{2+}$ > $Mg^{2+}$ > $Fe^{2+}$, and these metal gave also rise to the degradation of carbohydrate. But it was found that the addition of $100{\mu}m\;Mg^{2+}$ gave an efficient protection against carbohydrate degradation and suppressed the hydroxyl radical formation under oxygen bleaching conditions. And the presence of $Cu^{2+}$ had a detrimental effect on the stability of carbohydrates, whereas the addition of $3{\mu}m\;Mn^{2+}$ surprisingly had a small protective effect on methyl--$\beta$-D-glucopyranoside. In the $ClO_2$ radical bleaching conditions the hydroxyl radical expected to generate from water or substrates was not detected in the presence of metals.

  • PDF

Removal of Impurities by Magnetic Separation from Waste Fluidized Cracking Catalyst for Its Reuse (폐FCC 촉매의 재활용 과정에서 자력 선별법에 의한 불순물 제거 연구)

  • Ban Bong-Chan;Lee Jin-Suk;Kim Dong-Su
    • Resources Recycling
    • /
    • v.12 no.1
    • /
    • pp.55-64
    • /
    • 2003
  • Presently, the reuse of waste FCC catalysts, which generated from the refining process of crack oil, after the removal of con-taminated metallic impurities have not been attempted domestically yet because the separation technology f3r the impurities from waste catalysts has not been established. As a basic study far the reusable portion from the waste FCC catalysts and treatment of metallic impurities are assured, there will be invoked an significant contribution not only in the recycling of abandoned wastes up to date but also in the treatment efficiency of wastes and extraction of economical benefits from them. The magnetic separation of impurities such as Fe, Ni, and V, from waste FCC catalyst has been attempted with or without its pre-oxidation at high temperature for the purpose of its reuse. The results showed that the separability of impurities by magnetic force was high far non-preoxidized catalysts compared with preoxidized ones, and employment of screen-type matrix showed a higher separation efficiency than ball-type matrix. The separability increased with the strength of magnetic field, and the method of ball matrix has separation efficiency of maximum 51.10%. The amount of metallic impurities was in the decreasing order of V, Ni, and Fe depending upon ICP analysis.