• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.304-312
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• 2011

In this study, MOSFET type micro hydrogen gas sensors with platinum catalytic metal gates were designed, fabricated, and their electrical characteristics were analyzed. The devised MOSFET Hydrogen Sensors, called MHS-1 and -2, were designed with a platinum gate for hydrogen gas adsorption, and an additional sensing part for higher gas sensitivity and with a micro heater for operation temperature control. In the electrical characterization of the fabricated Pt-gate MOSFET (MHS-1), the saturated drain current was 3.07 mA at 3.0 V of gate voltage, which value in calculation was most similar to measurement data. The amount of threshold voltage shift and saturated drain current increase to variation of hydrogen gas concentration were calculated and the hydrogen gas sensing properties were anticipated and analyzed.

• Korean Journal of Crystallography
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• v.8 no.1
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• pp.38-47
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• 1997

A new weighing sensor for the automatic diameter control system of the crystal growth is developed in this study. This weighing sensor measures the frequency of the vibrating element which is lineally changing with respect to weight. The signal and the power of this system are transmitted without any physical contact, so that this sensor offers high accuracy and resolution. This system consists of a string, a sinusoidal wave generator, an automatic amplification adjusting circuit, signal transformers and a PCB. 4 kinds of programs are developed for checking DAC, weight calibration and controlling growth process. The measurements of the standard deviation and the resolution show $\pm0.10g$(measured at every second) and $5{\times}10^{-5}$, respectively, This weighing sensor is effective under high pres-sure of 200 atm, high temperature and vacuum condition. The weighing system can control the temperature in the accuracy of $\pm0.025^{\circ}C$ with the 'signal divider'. The optical quality single crystals of $(YGd)_3Sc_2Ga_3O_{12},\;Er-Y_3Sc_2Al_3O_{12},\;and\;Bi_{12}GeO_{20}$ have been grown by Czo-chralski method using this auto-diameter control system.

• Journal of Sensor Science and Technology
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• v.7 no.2
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• pp.111-116
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• 1998

The simple solid electrolyte carbon dioxide sensor with heaters were fabricated by using Li ionic conductor. Two Au electrodes were used for the reference and sensing electrode respectively. Two types of gas sensors, type ( I ) and type (II), were fabricated. Type ( I ) sensor was fabricated by the method of melting and crystallizing alkali metal carbonate at the temperature of $420{\sim}500^{\circ}C$. The sensing membrane of type (II) sensor was formed by the printing method on sensing electrode after metal carbonate was mixed with binder. The response characteristics of sensors fabricated for the carbon dioxide were investigated for a range of $CO_{2}$ concentration from 950 ppm to 9,950 ppm at operating temperature $420^{\circ}C$. Type ( I ) sensor and type (II) sensor showed the sensitivity of 62 mV/decade and 65 mV/decade respectively. The emf/decade of type (II) sensor tested at $420^{\circ}C$ almost followed the theoretical value of Nernst's equation and showed stable response characteristics with the fast response time of $15{\sim}20$ sec. Also type (II) sensor showed excellent stability and reproduction properties for 60 days.

• Applied Chemistry for Engineering
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• v.33 no.2
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• pp.126-132
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• 2022

Alkaline fuel cells using liquid fuels such as hydrazine and ammonia are gaining great attention as a clean and renewable energy solution possibly owing to advantages such as excellent energy density, simple structure, compact size in fuel container, and ease of storage and transportation. However, common shortcomings including cathode flooding, fuel crossover, side yield reactions, and fuel security and toxicity are still challenging issues. Real time monitoring of fuel concentrations integrated into a fuel cell device can help improving fuel cell performance via predicting any loss of fuels used at a cathode for efficient energy production. There have been extensive research efforts made on developing real-time sensing platforms for hydrazine and ammonia. Among these, recent advancements in electrochemical sensors offering high sensitivity and selectivity, easy fabrication, and fast monitoring capability for analysis of hydrazine and ammonia concentrations will be introduced. In particular, research trend on the integration of metallic and metal oxide nanoparticles and also their hybrids with carbon-based nanomaterials into electrochemical sensing platforms for improvement in sensitivity and selectivity will be highlighted.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.1
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• pp.105-109
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• 2015

This paper presents the results of an experimental analysis of the high-power laser (HPL)-induced damage to a complementary metal-oxide semiconductor (CMOS) image sensor. Although the laser-induced damages to metallic materials have been sufficiently investigated, the damages to electric-optic imaging systems, which are very sensitive to HPLs, have not been studied in detail. In this study, we experimentally analyzed the HPL-induced damages to a CMOS image sensor. A near-infrared continuous-wave (CW) fiber laser was used as the laser source. The influences of the irradiance and irradiation time on the permanent damages to a CMOS image sensor, such as the color error and breakdown, were investigated. The experimental results showed that the color error occurred first, and then the breakdown occurred with an increase in the irradiance and irradiation time. In particular, these damages were more affected by the irradiance than the irradiation time.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.11 no.2
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• pp.225-229
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• 2011

In this study, capacitive type pressure sensors based on low temperature co-fired ceramics (LTCC) technology for environmental monitoring were demonstrated. The LTCC is one of promising technology than is based one since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.) for sensor application. Especially, it has good mechanical and chemical properties for robust environmental application. The 3D LTCC diaphragm with thickness of 400 ${\mu}m$ were fabricated by laminating 4 green sheets using commercial powder (NEG, MLS 22C). To evaluate the sensing properties of the different cavity areas, two types of diaphragm which had different cavity areas with 25, 49 $mm^2$ respectively, were fabricated. To realize capacitive type pressure sensor, the Au top electrode was fabricated using thermal evaporator and the bottome electrode was compressed using aluminium foil. The sensing properties of the fabricated sensors showed linear characteristic under different pressure (0~30 psi) using pressure measurement system.

• Journal of Sensor Science and Technology
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• v.7 no.5
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• pp.319-326
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• 1998

Anodic half-reaction in the $Na^+$ ionic sensors using $Na_2CO_3$ and $MCO_3$ ($M=Cs_2,K_2,Li_2,Ca$) as a sensitive membrane is derived in continuous flow system to explain $CO_2$ sensing characteristics. For various gas-sensitive membranes, a well known overall reaction, $MCO_3\;=\;MO\;+\;CO_2$, cannot be applied for the EMF behaviors of these kinds of sensors. So, the anodic reaction is found to involve $Na_2CO_3$ and $M^{++}$-containing oxide phases by employing the ion exchange reaction at the interface of solid electrolyte and the sensitive membrane to maintain ionic balance in the whole cell. Based on the electrode reaction derived in flow system, differences of cell potentials between continuous and discontinuous flow systems were also discussed. These EMF differences were considerably caused by the partial pressures of oxygen and $CO_2$ as well as irreversible chemical reactions between electrode materials and $CO_2$ atmosphere.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.106-106
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• 2017

가스센서는 사내 및 산업 환경에서의 유독성 또는 폭발성 가스 검출, 환경 모니터링, 질병 진단 등 매우 다양한 응용분야에서 큰 관심을 가지고 있다. 반도체 금속산화물(SMOs) 기반의 센서 분야에서는 이들의 감도 및 선택성을 향상시키기 위해 많은 노력을 기울이고 있다. 이는 센서의 선택성을 부여하게 되면 다양한 가스들이 존재하는 환경에서도 검출자가 원하는 가스만의 응답을 얻을 수 있기 때문이다. 본 연구에서는 MOF(Metal-Organic Framwork) 기반 멤브레인으로 ZIF-8(Zeolitic Imidazolate Frameworks 구조들 중 하나) 멤브레인 쉘 층을 이용하여 ZnO 나노선에 형성하였다. ZnO 나노선은 VLS공정 (Vapor-Liquid-Solid)을 이용하여 패턴된 전극을 갖는 $SiO_2$-grown Si 웨이퍼 상에 성장되었고, 성장된 ZnO 나노선은 2-methyl imidazole과 methanol이 포함된 고용체에 넣고 폐쇄된 압력용기 속에서 가열시켜 얻게 된다. 이렇게 얻어진 ZIF-8@ZnO 나노선의 ZIF-8 멤브레인은 분자 체 구조(molecular sieving structure)를 갖게 되며, 이들의 pore 크기는 약 $3.4{\AA}$을 갖는다. 따라서 이보다 더 큰 동적 직경을(kinetic diameter) 갖는 가스 종은 이 멤브레인을 통과할 수 없음을 나타내므로 제작된 시편은 $H_2$(kinetic diameter : $2.89{\AA}$), $C_7H_8$(kinetic diameter : $5.92{\AA}$), 그리고 $C_6H_6$(kinetic diameter : $5.27{\AA}$) 가스들을 각각 사용함으로써 ZIF-8@ZnO 나노선의 센서 특성을 조사했으며, 보다 정확한 비교를 위해 순수한 ZnO 나노선 역시 동일한 조건에서 측정되었다. 결과를 통해, 수소 가스를 제외한 다른 가스들에 대해서는 반응을 하지 않고, 오직 수소 가스에 대해서만 반응을 나타냈으며, 순수 ZnO 나노선의 수소 감응도보다 낮은 감응도를 나타내었다. 이는 멤브레인 쉘 층을 형성함으로써 ZnO 나노선의 표면적이 감소해 가스 분자와의 접촉점을 감소시키기 때문이라고 판단된다. 이와 같은 MOF 멤브레인의 캡슐화 전략은 가스센서뿐 아니라 바이오 센서 및 광촉매 등과 같은 이온 선택성을 필요로 하는 다양한 응용분야에 적용될 수 있을 것으로 기대된다.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1637-1638
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• 2006

HVAC 시스템은 쾌적하고 깨끗한 운전환경을 만들어 줌으로써 운전자에게 향상된 안락성과 안전성을 제공한다. 이때 센서는 시시각각으로 변화하는 차실 내외의 환경변화에 대한 정보를 검출하여 HVAC 제어 유니트에 제공한다. 현재 HVAC 시스템에 사용되고 있는 후막 가스센서는 소자 크기와 소비전력이 크고, 제작공정이 까다로워 생산성이 낮은 단점이 있다. 이와 같은 문제점을 해결하기 위해서 최근에는 초소형화, 저소비전력, 대량생산에 의한 저가격화가 가능한 MEMS 가스센서의 연구개발이 활발히 진행되고 있다. 본 연구에서는 MEMS 구조체를 이용한 마이크로 가스센서를 설계 및 제작하였고, 감도특성을 고찰하였다. 가스 감지막은 금속산화물 페이스트를 스크린 프린팅 하는 종래의 방법 대신 MEMS 구조체에 적용 가능한 sol-gel 프로세스에 의해 형성하였다. 또 가스 감지전극과 micro-heater를 동일 평면상에 제작, 공정을 간소화하여 저가화를 시도하였다. MEMS 구조체 위에 제작된 Pt 박막 micro-heater의 인가전압에 따른 발열특성을 조사한 결과, 발열온도가 인가전압에 비례하는 이상적인 선형성을 나타내었으며, $300^{\circ}C$의 동작 온도에 도달하기 위해 65mW 이하의 저전력 동작이 가능하였다. 가스 센서의 감도특성 확인 실험은 CO 가스 10ppm, NO 가스 0.3ppm을 기준으로 수행되었으며, CO 및 NO에 대해 Rs(sensitivity, 가스반응저항/초기저항) 값은 각각 0.753 과 2.416로 우수한 성능을 나타내었다.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.400-406
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• 1999

Piezoresistive flow sensors with four different types of microbeam structures were fabricated using (100), n/$n^+$/n three-layer silicon wafer and their characteristics were investigated. Piezoresistors were formed through boron diffusion and its values were about $1\;k{\Omega}$. Three-dimensional silicon microbeams were constructed by porous silicon micromachining and curled microbeams were fabricated by the difference in the thermal expansion coefficient between silicon and metal. The output response of the fabricated sensor was evaluated through half- bridge. The output voltage increased with increasing length of microbeam at the same flow velocity, while the detectable measurement range extended with decreasing length of microbeam. The output voltage of the fabricated sensors were increased with quotient of 3.2 of the flow rate since the stress of the beam versus the gas flow showed non-linear characteristics.