Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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High-Power Continuous-Wave Laser-Induced Damage to Complementary Metal-Oxide Semiconductor Image Sensor

고출력 CW 레이저에 의한 CMOS 영상 센서의 손상 분석

  • Kim, Jin-Gyum (Dept. of Mechanical Convergence Engineering, Engineering, Hanyang Univ.) ;
  • Choi, Sungho (Dept. of Mechanical Convergence Engineering, Engineering, Hanyang Univ.) ;
  • Yoon, Sunghee (Dept. of Mechanical Convergence Engineering, Engineering, Hanyang Univ.) ;
  • Jhang, Kyung-Young (School of Mechanical Engineering, Hanyang Univ.) ;
  • Shin, Wan-Soon (Agency for Defense Development)
  • 김진겸 (한양대학교 대학원 융합기계공학과) ;
  • 최성호 (한양대학교 대학원 융합기계공학과) ;
  • 윤성희 (한양대학교 대학원 융합기계공학과) ;
  • 장경영 (한양대학교 기계공학부) ;
  • 신완순 (국방과학연구소)
  • Received : 2014.02.25
  • Accepted : 2014.10.22
  • Published : 2015.01.01
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Abstract

This paper presents the results of an experimental analysis of the high-power laser (HPL)-induced damage to a complementary metal-oxide semiconductor (CMOS) image sensor. Although the laser-induced damages to metallic materials have been sufficiently investigated, the damages to electric-optic imaging systems, which are very sensitive to HPLs, have not been studied in detail. In this study, we experimentally analyzed the HPL-induced damages to a CMOS image sensor. A near-infrared continuous-wave (CW) fiber laser was used as the laser source. The influences of the irradiance and irradiation time on the permanent damages to a CMOS image sensor, such as the color error and breakdown, were investigated. The experimental results showed that the color error occurred first, and then the breakdown occurred with an increase in the irradiance and irradiation time. In particular, these damages were more affected by the irradiance than the irradiation time.

고출력 레이저에 의한 영상 센서의 손상 분석 연구를 수행하였다. 고출력 레이저에 의한 금속의 손상에 관한 연구는 많이 이루어져 있지만, 상대적으로 고출력 레이저에 취약한 영상 시스템의 손상 연구는 미비한 상태이다. 본 논문에서는 CMOS 영상 센서에 고출력 레이저가 조사 되었을 때, 영상 센서가 받는 손상에 대해 실험적으로 분석하였다. 고출력 레이저 소스로는 근적외선대역의 연속발진 광섬유 레이저를 사용하였으며, 레이저 세기와 조사시간에 따른 CMOS 영상 센서의 영구적 손상 및 영상 품질을 분석하였다. 그 결과 조사시간과 레이저세기가 증가함에 따라 먼저 색상 손상이 나타나고 이후 작동불능 상태가 되었으며, 이러한 손상은 조사시간보다 레이저 세기에 더 큰 영향을 받는 것으로 나타났다.

Keywords

References

  1. Tang, L., Wang, J., Li, J. and Hao, Q., 2012, "Study on Damage Effect and Threshold of High Energy 1.06 ${\mu}m$-Wavelength Long-Pulse Laser to Photo Detector," Electromagnetic Launch Technology (EML), 2012 16th International Symposium on, pp. 1-5.
  2. Cook, J. R. and Albertine, J. R., 1997, "The Navy's High Energy Laser Weapon System," Free-Electron Laser Challenges (SPIE Proceedings), Vol. 2988, pp. 264-271.
  3. Zhou, J., Guo, J. and Fu, Y., 2005, "Analysis of the Disturbance of Remote Aerial Detector," High-Power Lasers and Applications III (SPIE Proceedings), Vol. 5627, pp. 278-285.
  4. Lee, S. S., 2009, "Review on Current Status and Development Direction for HELW," Korea Association of Defense Industry Studies, Vol. 16, No. 1, pp. 186-222.
  5. Park, S., 2010, "Principles of CCD/CMOS Image Sensor," Dooyangsa, Seoul, pp. 11-161.
  6. Choi, S., Kim, C., Jhang, K.-Y. and Shin, W.-S., 2012, "Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam," Trans. Korean Soc. Mech. Eng. A, Vol. 36, No. 10, pp. 1241-1248. https://doi.org/10.3795/KSME-A.2012.36.10.1241
  7. Xu, L., Cai, H., Li, C., Tan, Y., Jin, G. and Zhang, X., 2013, "Degradation of Responsivity for Photodiodes Under Intense Laser Irradiation," Optik, Vol. 124, pp. 225-228. https://doi.org/10.1016/j.ijleo.2011.11.055
  8. Zhang, C., Blarre, L., Walser, R. M. and Becker, M. F., 1993, "Mechanisms for Laser-Induced Functional Damage to Silicon Charge-Coupled Imaging Sensors," Applied Optics, Vol. 32, No. 27, pp. 5201-5210. https://doi.org/10.1364/AO.32.005201
  9. Li, G., Shen, H.-b., Li, L., Zhang, C., Mao, S.-j. and Wang, Y.-b., 2013, "Laser-Induced Damages to Charge Coupled Device Detector Using a High-Repetition-Rate and High-Peak-Power Laser," Optics & Laser Technology, Vol. 47, pp. 221-227. https://doi.org/10.1016/j.optlastec.2012.07.030