• 제목/요약/키워드: 극초정밀 스테이지

검색결과 5건 처리시간 0.015초

극초정밀 다축 스테이지를 이용한 광소자 정렬 특성 향상에 관한 연구 (A Study on the Optical Device Alignment Characteristics Improvement using Multi-Axis Ultra Precision Stage)

  • 정상화;차경래;김광호
    • 한국정밀공학회지
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    • 제22권12호
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    • pp.175-183
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    • 2005
  • In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

PZT 구동 스테이지의 위치 제어 성능 향상을 위한 제어기 설계 (Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage)

  • 박종성;정규원
    • 한국생산제조학회지
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    • 제21권3호
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    • pp.465-472
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    • 2012
  • This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.

극초정밀 다축 스테이지를 이용한 광소자 정렬 자동화에 관한 연구 (A Study on the Optical Element Alignment Automation using Multi-Axis Ultra Precision Stage)

  • 정상화;김광호
    • 한국공작기계학회논문집
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    • 제15권6호
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    • pp.64-70
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    • 2006
  • The optical element was usually used in optical devices and optical transfer devices, but it has been recently used in communication, computer and medical equipment. With the development of very high speed optical-communication, the development of the kernel parts of optical communication has also increased. Presently, the alignment of the optical element is time consuming, and an effective alignment algorithm has not yet to be developed. In this paper, the alignment automation of the optical element is studied. The ultra precision stage is applied to an optical element alignment to improve the accuracy of the alignment. The automation program of the optical element alignment is developed by LabVIEW programming to save the alignment time. The alignment algorithms of the optical element consist of field search and peak search algorithms.

광소자 정렬용 극초정밀 다축 스테이지의 구동 메커니즘에 관한 연구 (A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment)

  • 정상화;김광호;차경래;이경형;송석
    • 한국공작기계학회논문집
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    • 제15권1호
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    • pp.8-16
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    • 2006
  • The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

극초정밀 스테이지의 광소자 정렬에 관한 연구 (A Study on the Optical Alignment of Multi-Axis Ultra Precision Stage)

  • 정상화;차경래;김현욱;최석봉;김광호;박준호
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.203-208
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    • 2005
  • In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, and 1 ch. input vs. 8 ch. output PLC stacks were performed for investigating the alignment characteristics.

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