• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.201-201
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• 2004

200여 년 전 탄생한 기계는 전기 에너지를 동력으로 사용하게 되면서 근 발전의 전기를 이루었다. 2차 세계대전이 종료된 후 발명된 NC는 정밀가공 기술의 발전을 가져왔으며 마이프로세서 기술을 채용한 CNC는 가공기술 측면에서는 초정밀 초고속을 가능하게 하고, 운영기술 측면에서는 지능화 연구를 가능하게 하고, 관리기술 측면에서는 FMS, CIM과 같은 유연성 있는 가공 시스템의 구축을 가능하게 했다.(중략)

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.10
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• pp.17-23
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• 2003

In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. The materials (96% Al2O3) and shape (I-type) of the core were determined by a Maxwell three-dimensional field simulator to maximize the performance of the inductors. The copper (Cu) wire with 40${\mu}{\textrm}{m}$ diameter was used as the coils. High frequency characteristics of the inductance (L), quality-factor (Q), and capacitance (C) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 11 to 39 nH and quality factors of 28 to 50 over the frequency ranges of 250MHz to 1 GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ that is one of the best chip inductor company in the world. The simulated data predicted the high-frequency data of the L, Q, and C of the inductors developed well.l.

• Journal of the KSME
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• v.52 no.8
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• pp.46-50
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• 2012

BioMEMS(Micro Electro Mechanical System）기술은 MEMS 기술을 바이오 분야에 적용함으로써 극소량의 체액(피 타액 등)으로 각종 진단 검사를 신속하게 처리할 수 있어, 기존 중대형 의료기기의 소형화, 고기능화 및 저렴화가 가능하게 하는 기술이다. 최근 유전자 정보가 규명되면서, 정보통신기술과 접목이 더욱 가속화되고 있고, 인간의 유전자 정보를 활용한 새로운 의약품 개발과 유전자 진단기기나 의료 시술이 눈부시게 발달하고 있다. 이 글에서는 바이오칩에서 큰 주목을 받고 있는 분야인 랩 온 어 칩, 특히 감염질환인 인플루엔자 등의 진단을 위한 연구 동향을 살펴본다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.6
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• pp.959-964
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• 2001

An experimental investigation on the near-field electromagnetic loss of thin copper layers has been presented using microfabricated microwave transceivers for applications to multi-chip microsystems. Copper layers in the thickness range of 0.2$\mu$m∼200$\mu$m have been electroplated on the Pyrex glass substrates. Microwave transceivers have been fabricated using the 3.5mm$\times$3.5mm nickel microloop antennas, electroformed on the silicon substrates. Electromagnetic radiation loss of the copper layers placed between the microloop transceivers has been measured as 10dB∼40dB for the wave frequency range of 100MHz∼1GHz. The 0.2$\mu$m-thick copper layer provides a shield loss of 20dB at the frequencies higher than 300MHz, whereas showing a predominant decreases of shield loss to 10dB at lower frequencies. No substantial increase of the shield effectiveness has been found for the copper shield layers thicker that 2 $\mu$m.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.11
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• pp.501-507
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• 2003

In this study, microscale, high-performance, solenoid-type RF chip inductors were investigated. The size of the RF chip inductors fabricated in this work was 1.0${\times}$0.5${\times}$0.5㎣. 96% $Al_2$ $O_3$and I-type were used as the material and shape of the core, respectively. The copper (Cu) wire with 6 turns was employed as the coils. The diameter (40${\mu}{\textrm}{m}$) and position (middle) of the coil and the length (0.35mm) of solenoid were determined by a high-frequency structure simulator (HFSS) to maximize the performance of the inductors. High frequency characteristics of the inductance (L) and quality-factor (Q) of developed inductors were measured using an RF Impedance/Material Analyzer (HP4291B with HP16193A test fixture). The inductors developed have inductances of 10.8nH and quality factors of 25.2 to 50 over the frequency ranges of 250MHz to l GHz, and show results comparable to those measured for the inductors prepared by CoilCraf $t^{Tm}$ . The simulated data predicted the high-frequency data of the L and Q of the inductors developed well.l.