• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.368-370
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• 2013

투명 전극은 전기전도도를 갖는 동시에 가시광선을 투과하는 소재를 말하며, 구체적으로는 빛의 파장이 400~700 nm 영역대의 가시광선을 80% 이상 투과하며 전기전도도가 비저항으로 $10^{-3}{\Omega}cm$이하이거나 면저항이 $10^3{\Omega}$/${\Box}$소재를 의미한다. 투명 전극은 전기전도도에 따라 사용되는 용도가 다양하다. LCD, PDP, OLED 와 같은 평판디스플레이 및 3D 디스플레이의 투명전극으로 사용되는 핵심재료일 뿐만 아니라 터치스크린, 투명필름, 대전방지막, 열반사막, EMI 방지막, 태양전지 분야에 광범위하게 이용되고 있다. 일반적으로, 투명전극 박막에 가장 많이 사용되고 있는 소재는 ITO (indium tin oxide)이나, 주성분인 In의 사용량 증가로 상용 ITO 타겟 가격이 급등하고 있음으며, 고가의 ITO 타겟을 대체하기 위한 저가의 투명전극 소재 개발이 절대적으로 요구되며, 신규 소재 개발을 통한 기술력 우위 선점이 필수적으로 요구되는 상황이다. 본 연구에서는 기존에 디스플레이 분야에서 널리 활용되는 고가의 ITO를 대체하기 위한 다성분 금속산화물 투명전극 스퍼터링 타겟 제조기술을 개발하기 위한 연구로서, Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재를 조성설계, 고밀도 균질 타겟 제조 및 투명전극 박막을 형성하는 연구를 실시하였다. 고체산화물 산화인듐(In2O3)분말, 산화갈륨(Ga2O3) 분말그리고 산화아연(ZnO)분말과 Metal을 몰비로 칭량한 후 분말을 폴리에틸렌제 포트에 넣고 에탄올을 충분히 채운 후 지르코니아(ZrO2) 볼(ball)을 이용하여 24 h 동안 볼 밀링(ball milling) 방법으로 혼합한 뒤, $120^{\circ}C$의 플레이트위에서 마그네틱 바로 stirring하면서 건조하였다. 이 분말을 건조기에서 완전히 건조한 후 알루미나 유발을 이용해서 pulverizing한 후 sieving기를 이용하여 분말의 조립화를 하였다. 이 분말을 금형에 넣고 300 kg/$cm^2$의 압력으로 press하여 성형한 뒤 대기중에서 소결하였다 소결을 위한 승온 온도는 $10^{\circ}C$/min이었고 소결은 $1,450^{\circ}C$에서 6 h 동안 하였다. IGZO target의 조성 비율은 1:1:12 (mol%)를 사용하였으며, 첨가한 Metal은 Boron (B), Germanium (Ge), Barium (Ba)을 사용하여 타겟을 제작하였다. M-IGZO 박막은RF magnetron Sputter를 이용하여 증착하였으며, 앞선 실험에서 제작한 타겟을 사용하여 M-IGZO박막을 투명전극으로 사용하기 위한 각각의 특성을 파악하였다. 모든 박막은 상온에서 증착을 하였으며, 증착된 박막두께를 측정하기 위해 ${\alpha}$-step IQ를 사용하였고, 광학적 특성을 분석하기 위해 UV-Visible spectrophotometer 로 투과율을 측정하였다. 그리고 전기적 특성을 측정하기 위해 Hall effect measurement 및 4-probe를 사용하였으며, 결정성 분석을 위하여 XRD를 이용하여 분석하였다. 표1은 M-IGZO타겟을 사용하여 증착시간에 따른 면저항 특성을 나타내었다. Ge, B, Ba이 첨가된 IGZO 박막은 증착시간이 증가할수록 면저항이 낮아짐을 알 수 있었다. 또한, Ge이 첨가된 IGZO 박막이 다른 금속이 첨가된 IGZO 박막의 면저항보다 현저히 낮음을 알 수 있었다. Fig. 1(a), (b), (c)는 각 타겟을 동일한 조건으로 증착을 하여 광학적특성을 나타내는 그래프이다. GZO 박막의 광학적 특성을 보면 가시광 영역에서 평균 투과율은 모두 80% 이상으로 우수한 광투과 특성을 보여 투명전자소자로 사용가능하다. 특히, 자외선 영역을 모두 차단하는 UV cut 능력이 우수함을 알 수 있었다. 따라서, 금속이 첨가된 IGZO 박막을 태양전지용 투명전극으로 사용할 경우, 자외선에 의하여 수명이 단축되는 현상을 줄여줄 수 있음을 기대할 수 있으며 내구성 향상에 크게 기여할 것으로 보인다. Fig. 2는 Ge=0, 0.5, 5%인 IGZO 투명전극을 총 40회 반복하여 증착을 실시한 후 각각의 면저항을 측정한 결과이다. 실험결과에 따르면 Ge가 0%, 5%인 IGZO 투명전극은 증착을 거듭할수록 면저항이 증가하는 결과를 나타내었으며, 0.5%인 IGZO 투명전극은 점차 안정화되어가는 결과를 나타내었다. 따라서 안정화 되었을 때 평균 면저항은 26ohm/sq.로 나타났으며, 광투과율은 Fig. 3과 같이 가시광영역에서 평균 80%이상의 결과를 보였으며, 550 nm에서는 86.36%의 우수한 특성을 나타내었다. 본 연구에서는 Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재 target을 제작하여 RF magnetron sputter로 박막을 형성한 후 특성을 비교하였다. M-IGZO target 중 Ge (0.5%)을 첨가한 IGZO 타겟을 사용한 투명전극이 가장 우수한 특성을 보였으며, 제작된 M-target의 In 비율이 30% 정도로 기존의 ITO (90%) 대비하여 투명전극 제작 단가를 절감할 수 있다.

• Economic and Environmental Geology
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• v.36 no.2
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• pp.75-87
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• 2003

The Haman-Gunbuk mineralized area is located within the Cretaceous Gyeongsang Basin along the southeastern part of the Korean peninsula. Major ore minerals, magnetite, scheelite, molybdenite and chalcopyrite, together with base-metal sulfides and minor sulfosalts, occur in fissure-filling tourmaline, quartz and carbonates veins contained within Cretaceous sedimentary and volcanic rocks anu/or granodiorite (118{\pm}$3.0 Ma). The ore and gangue mineral paragenesis can be divided into three distinct stages: Stage 1, tourmaline+quartz+Fe-Cu ore mineralization; Stage II, quartz+sulfides+sulfosalts+carbonates; Stage 111, barren calcite. Earliest fluids are recorded in stage I and early por-tions of stage II veins as hypersaline (35~70 equiv. wt.% NaCl+KCl) and vapor-rich inclusions which homogenize from ~30$0^{\circ}C$ to $\geq$50$0^{\circ}C$. The high-salinity fluids are complex chloride brines with significant concentrations of sodium, potassium, iron, copper, and sulfur, though sulfide minerals are not associated with the early mineral assemblage produced by this fluid. Later solutions circulated through newly formed fractures and reopened veins, and are recorded as lower-salinity(less than ~20 equiv. wt.% NaCl) fluid inclusions which homogenize primarily from ~200 to 40$0^{\circ}C$. The oxygen and hydrogen isotopic compositions of fluid in the Haman-Gunbuk hydrothermal system represents a progressive shift from magmatic-hydrothermal dominance during early mineralization stage toward meteoric-hydrothermal dominance during late mineralization stage. The earliest hydrothermal fiuids to circu-late within the granodiorite stock localiring the ore body at Haman-Gunbuk could have exsolved from the crystal-lizing magma and unmixed into hypersaline liquid and $H_2O$-NaCl vapor. As these magmatic fluids moved throughfractures, tourmaline and early Fe, W, Mo, Cu ore mineralization occurred without concomitant deposition of othersulfides and sulfosalts. Later solutions of dominantly meteoric origin progressively formed hypogene copper and base-metal sulfides, and sulfosalt mineralization.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.4 no.3
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• pp.255-263
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• 2006

Vol-oxidizer is a device to convert $UO_2$ pellets into $U_3O_8$ powder and to feed a homogeneous powder into a Metal Conversion Reactor in the ACP(Advanced Spent Fuel Conditioning Process). In this paper, we propose a design model of the vol-oxidizer, develop the new vol-oxidizer with a capacity of 20 kg HM/batch in $UO_2$ pellets, and conduct a verification for the device. Design considerations include the internal structure, the capacity, the heating position of the device, and the size. The dimensions of the new vol-oxidizer are decided by the design model. We determine a permeability test of the $U_3O_8$ measuring the temperature distribution, and the volume of $UO_2$ and $U_3O_8$. We manufactured the new vol-oxidizer for a 20 kg HM/batch in $UO_2$ pellets, and then analyzed the characteristics of the $U_3O_8$ powder for the verification. The experimental results show that the permeability of the $U_3O_8$ throughout mesh enhance more than old vol-oxidizer, the oxidation time takes only 8 hours when compared with the 13 hours of the old device, and the average distribution of particle size is $40{\mu}m$. The capacities of new vol-oxidizer for a 20 kg HM/batch in $UO_2$ pellets were agree well with the predictions of design model.

• Journal of the Mineralogical Society of Korea
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• v.20 no.3
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• pp.147-153
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• 2007

Kaolinite [$Al_2Si_2O_5(OH)_4$] was successfully synthesized by a hydrothermal process from amorphous $Al(OH)_3$ and $SiO_2$ at $230^{\circ}C$ under the pressure of $30 kg/cm^2$. The experiments were performed varying temperatures ($180{\sim}280^{\circ}C$), pressure ($10{\sim}60kg/cm^2$), chemistry ($Al_2O_3/SiO_2 = 0.5{\sim}0.38$) and pH ($0.3{\sim}9.5$) of the solution. The autoclaving was carried out in a closed stainless steel vessel. Kaolinite appears from the starting composition of $Al_2O_3/SiO_2= 0.5$ with boehmite and was stable as a single phase with the composition of $Al_2O_3/SiO_2=0.45$. Boehmite was a stable phase below $200^{\circ}C$ for the 240 h period of autoclaving, but kaolinite appeared even in 20 h at $230^{\circ}C$. The single kaolinite phase of a good crystallinity was observed at pH ranging 2 to 6. That indicates that pH is one of the most critical parameters for the successful formation of kaolinite. The optimal molar ratio of $Al_2O_3$ to $SiO_2$ was determined to be 0.45. The XRD pattern of the synthesized kaolinite coincided with that of natural one and its morphology was the cluster type of the kaolinite crystals (diameter = ${\sim}3{\mu}m$), irrespective of starting material, composition and temperature.

• Progress in Medical Physics
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• v.19 no.2
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• pp.89-94
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• 2008

TomoTherapy has a merit to treat cancer with Intensity modulated radiation and combines precise 3-D imaging from computerized tomography (CT scanning) with highly targeted radiation beams and rotating beamlets. In this paper, we comparing the dose distribution between TomoTherapy and linear accelerator based intensity modulated radiotherapy (IMRT) for 10 Head & Neck patients using TomoTherapy which is newly installed and operated at National Cancer Center since Sept. 2006. Furthermore, we estimate how the homogeneity and Normal Tissue Complication Probability (NTCP) are changed by motion of target. Inverse planning was carried out using CadPlan planning system (CadPlan R.6.4.7, Varian Medical System Inc. 3100 Hansen Way, Palo Alto, CA 94304-1129, USA). For each patient, an inverse IMRT plan was also made using TomoTherapy Hi-Art System (Hi-Art2_2_4 2.2.4.15, TomoTherapy Incorporated, 1240 Deming Way, Madson, WI 53717-1954, USA) and using the same targets and optimization goals. All TomoTherapy plans compared favorably with the IMRT plans regarding sparing of the organs at risk and keeping an equivalent target dose homogeneity. Our results suggest that TomoTherapy is able to reduce the normal tissue complication probability (NTCP) further, keeping a similar target dose homogeneity.

• The Journal of the Petrological Society of Korea
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• v.7 no.2
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• pp.77-97
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• 1998

We analyzed geochemical and radiogenic isotope data to investigate the genesis and source characteristics of the Onjeongri granite in the northern part of the Gyeongsang Basin. Field observation and K-Ar ages confirm late Cretaceous intrusion (ca. 87 Ma) of the Onjeongri granite. The hornblende geobarometery gives less than 2 kbar for the emplacement pressure of the Onjeongri granite. Geochemical and isotopic compositions suggest that the Onjeongri granite was formed in a relatively immature arc system. $SiO_2$ contents show a negative linear relationship with initial $^{87}Sr/^{86}Sr$ ratios, and an apparent positive correlation with $^{207}Pb/^{204}Pb$ ratios, suggesting an incomplete mixing or assimilation. However, the isotopic data known for any exposed rocks of the study area do not fit as an endmember, implying that the contaminant might reside in the lower crust. A review of published isotopic ages, geochemical, and Sr and Nd isotopic data for the Cretaceous to Tertiary granites in the Gyeongsang Basin indicates the followings. 1) Granitic magmatism in the Gyeongsang Basin were episodic. 2) Granitic rocks in the basin were derived from young (< 0.9 Ga) lower crust, and their isotopic signatures reflect heterogeneous source region. Geochemical and isotopic signatures of granitic rocks in the basin are difficult to explain by upper crustal contamination. 3) Granites in the Gyeongsang Basin have closely related to those in the San in Belt of the Inner Zone of Southwest Japan in terms of age, petrography, and isotopic and geochemical composition. 4) Sr-Nd isotopic signatures of the Onjeongri granite are relatively primitive compared with granitic rocks in the other parts of the Gyeongsang Basin and in the Inner Zone of Southwest Japan.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.9
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• pp.636-642
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• 2013

In order to overcome drawbacks (i.e., filtration and recovery) of conventional powder type photocatalysts, nano-ZnO/Laponite/PVA (ZLP) photocatalyzed adsorption balls were developed by using in situ mixing of nanoscale ZnO as a photocatalyst, and Laponite as both adsorbent and supporting media in deionized water, followed by the poly vinyl alcohol polymerization with boric acid. The optimum mixing ratio of nano-ZnO:Laponite:PVA:deionized water was found to be 3:1:1:16 (by weight), and the mesh and film produced by PVA polymerization with boric acid might inhibit both swelling of Laponite and detachment of nanoscale ZnO from ZLP balls. Drying ZLP balls with microwave (600 watt) was found to produce ZLP balls with stable structure in water, and various sizes (55~500 ${\mu}m$) of pore were found to be distributed based on SEM and TEM results. In the initial period of reaction (i. e., 40 min), adsorption through ionic interaction between methylene blue and Laponite was the main removal mechanism. After the saturation of methylene blue to available adsorption sites for Laponite, the photocatalytic degradation of methylene blue occurred. The effective removal of methylene blue was attributed to adsorption and photocatalytic degradation. Based on the results from this study, synthesized ZLP photocatalyzed adsorption balls were expected to remove recalcitrant organic compounds effectively through both adsorption and photocatalytic degradation, and the risks of environmental receptors caused by detachment of nanoscale photocatalysts can be reduced.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.55 no.4
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• pp.312-318
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• 2010

This study was carried out to develop and test a prototype program that recommends the nitrogen topdressing rate using the color digital camera image taken from rice field at panicle initiation stage (PIS). This program comprises four models to estimate shoot N content (PNup) by color digital image analysis, shoot N accumulation from PIS to maturity (PHNup), yield, and protein content of rice. The models were formulated using data set from N rate experiments in 2008. PNup was found to be estimated by non-linear regression model using canopy cover and normalized green values calculated from color digital image analysis as predictor variables. PHNup could be predicted by quadratic regression model from PNup and N fertilization rate at panicle initiation stage with $R^2$ of 0.923. Yield and protein content of rice could also be predicted by quadratic regression models using PNup and PHNup as predictor variables with $R^2$ of 0.859 and 0.804, respectively. The performance of the program integrating the above models to recommend N topdressing rate at PIS was field-tested in 2009. N topdressing rate prescribed for the target protein content of 6.0% by the program were lower by about 30% compared to the fixed rate of 30% that is recommended conventionally as the split application rate of N fertilizer at PIS, while rice yield in the plots top-dressed with the prescribed N rate were not different from those of the plots top-dressed with the fixed N rates of 30% and showed a little lower or similar protein content of rice as well. And coefficients of variation in rice yield and quality parameters were reduced substantially by the prescribed N topdressing. These results indicate that the N rate recommendation using the analysis of color digital camera image is promising to be applied for precise management of N fertilization. However, for the universal and practical application the component models of the program are needed to be improved so as to be applicable to the diverse edaphic and climatic condition.

• Economic and Environmental Geology
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• v.36 no.1
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• pp.39-48
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• 2003

The removal of chromate from aqueous solution using finely ground pyrite and biotite was investigated by batch experiments and the kinetics and the mechanism of chromate reduction were discussed. The chromate reduction by pyrite was about hundred times faster than that by biotite and was also faster at pH 3 than at pH 4. When pyrite was used, more than 90% of initial chromate was reduced within four hours at pH 4 and within 40 min. at pH 3. However, more than 400 hours was taken for the reduction of 90% of initial chromate by biotite. The results indicate that the rate of chromate reduction was strongly depending on the amount of Fe(II) in the minerals and on the dissolution rate of Fe(II) from the minerals. The reduction of chromate at pH 4 resulted in the precipitation of (Cr, Fe)(OH))$_3$$_{ (s)}$, which is believed to have limited the concentrations of dissolved Cr(III) and Fe(III) to less than expected values. When biotite was used, amounts of decreased Fe(II) and reduced Cr(Ⅵ) did not show stoichiometric relationship, which implying there was not only chromate reduction by ferrous ions in the acidic solution but also heterogeneous reduction of ferric ions by the structural ferrous iron in biotite. However, the results from a series of the experiments using Pyrite showed that concentrations of the decreased Fe(II) and the reduced Cr(Ⅵ) were close to the stoichiometric ratio of 3:1. It was because the oxidation of pyrite rapidly created ferrous ions even in oxygenated solutions and the chromate reduction by the ferrous ions was significantly faster than ferrous ion oxygenation.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.6 no.1
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• pp.13-26
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• 2001

Six ferromanganese crusts from the Lomilik and Litatfooki seamounts in the Marshall Islands were analyzed for texture, geochemistry and stratigraphy to delineate the paleoceanographic conditions. The crusts can be divided into three layers; 1) outermost massive layer (Layer 1), 2) middle porous Fe-oxides rich layer infllled with biointemal clasts (Layer 2), and 3) innermost massive layer cemented and/or replaced by carbonate fluoapatite (CFA) (Layer 3). The Layer 1 contains higher Mn, Co, Ni, and Mg than other two layers, and the Layer 2 was relatively more enriched in Fe, Al, Ti, Ba, Cu, and Zn. However, the Layer 3 shows higher Ca and P and lower Mn, Fe, Co, and Ni contents than overlying two layers. Based on the Co-chronometry, the crusts are postulated to have begun to grow from 56-31 Ma (early Eocene to Oligocene). The boundaries between layers 1 and 2, and layers 2 and 3 are dated to be 7-3 Ma and 26-14 Ma, respectively. High contents of Ca and P in Layer 3 clearly indicate that the layer had been phosphatized prior to the formation of Layer 2. Considering the well-preserved mjcrostructures in Layer 3, it is unlike that the crusts themselves were recrystallized in suboxic condition. Also, the lower Co concentrations in Layer 3 may imply that the Co supply was not constant during the formation of Layer 3. Layer 2, characterized by the porous texture, grew over Layer 3 during 26-9 Ma. Internal biogenic sediments including foraminifera within the original cavities and the enrichment of organophillic elements such as Ba, Cu, and Zn, suggest that Layer 2 have below high production regions. Also, high content of allumino silicate components may indicate increased terrigeneous input during the formation of Layer 2. The Layer 2. The Layer 1 has been subjected to little diagenetic influence since the Pliocene.