• Title/Summary/Keyword: 균일 온도

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Plasma Uniformity Numerical Modeling of Geometrical Structure for 450 mm Wafer Process System (450 mm 웨이퍼 공정용 System의 기하학적 구조에 따른 플라즈마 균일도 모델링 분석)

  • Yang, Won-Kyun;Joo, Jung-Hoon
    • Journal of the Korean Vacuum Society
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    • v.19 no.3
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    • pp.190-198
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    • 2010
  • Asymmetric model for plasma uniformity by Ar and $CF_4$ was modeled by the antenna structure, the diameter of chamber, and the distance between source and substrate for the development of plasma equipment for 450 mm wafer. The aspect ratio of chamber was divided by diameter, distance from substrate, and pumping port area. And we found the condition with the optimized plasma uniformity by changing the antenna structure. The drift diffusion and quasi-neutrality for simplification were used, and the ion energy function was activated for the surface recombination and etching reaction. The uniformity of plasma density on substrate surface was improved by being far of the distance between substrate wall and chamber wall, and substrate and plasma source. And when the antenna of only 2 turns was used, the plasma uniformity can improve from 20~30% to 4.7%.

Forced Convection Modelling of a Solar Central Receiver using Nonisothermal Cylinders in Crossflow (비등온 실린더 모델을 이용한 태양로의 강제 대류에 의한 열 손실 분석)

  • Chun, Won-Gee;Jeon, Myung-Seok;Jeon, Hong-Seok;Auh, P. Chung-Moo;Boehn, Robert F.
    • Solar Energy
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    • v.10 no.3
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    • pp.13-18
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    • 1990
  • When nonuniform thermal boundary conditions are imposed on the surface of a circular cylinder in crossflow, the heat transfer characteristics can be quite different compared to what is found for isothermal or constant heat flux boundary conditions. In the present analysis, two kinds of nonuniform boundary conditions along the circumference of the cylinder are considered in a uniform stream of air: step changes and linear profiles. Step changes in temperature can arise on the surface of an external, cylindrical, solar central receiver. As the working fluid(water) flows through the vertical tubes that ring the circumference of Solar One(a solar central receiver in Barstow, California), the solar flux on the receiver heats the water from a liquid to a superheated state. In this process, portions of the receiver panels, and thus portions of the circumference of the cylinder, function as a preheater, boiler, or superheater. Hence the surface temperature can vary significantly around the cylinder. Common engineering practice has been to use an average wall temperature with an isothermal cylinder heat transfer coefficient when estimating the convective loss in these kinds of situations.

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High-Level Expression of A Bacillus subtilis Mannanase Gene in Escherichia coli. (대장균에서 Bacillus subtilis의 Mannanase 유전자 과잉발현)

  • 권민아;손지영;윤기홍
    • Microbiology and Biotechnology Letters
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    • v.32 no.3
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    • pp.212-217
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    • 2004
  • The gene coding for mannanase from Bacillus subtilis WL-7, a number of glycosyl hydrolase family 26, was hyperexpressed in Escherichia coli. Two recombinant plasmids, pE7MAN and pENS7, were constructed by introducing the complete mannanase gene and the mature mannanase gene lacking N-terminal signal peptide region into a expression vector pET24a(+), respectively. The level of mannanase produced by E. coli BL21 (DE3) carrying pENS7, which included the mature mannanase gene, was considerably higher than that by E. coli BL21 (DE3)/pE7MAN. Almost mannanase produced by the recombinant E. coli carrying pENS7 at growth temperature of $37^{\circ}C$ existed as inactive enzyme of insoluble form. Growth at temperature below $31^{\circ}C$ increased the soluble fraction of mannanase having catalytic activity in the recombinant E. coli cells. The highest productivity of active mannanase was observed in cell-free extract of the recombinant E. coli grown at growth temperature ranging from $25^{\circ}C$ to $28^{\circ}C$, while mannanase activity per soluble protein of the cell-free extract was highest in the cells grown at $^31{\circ}C$.

이중 주파수를 사용하는 펄스 플라즈마 특성에 관한 연구

  • Choe, Sang-Uk;Seo, Jin-Seok;Kim, Tae-Hyeong;Kim, Gyeong-Nam;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.219.1-219.1
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    • 2014
  • 전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

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A study on the design of air conditioning system in the mushroom cultivation greenhouse (버섯재배사의 공조시스템 설계에 대한 연구)

  • Ryu, Kyung-Jin;Son, Jae-Hwan;Han, Chang-Woo;Nah, Kyu-Dong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.2
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    • pp.743-750
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    • 2017
  • It is important to ensure a uniform temperature distribution in greenhouses for the mushroom cultivation. The air temperature of the mushroom cultivation greenhouse is made uniform by supplying a constant air temperature with the underground air. The mushroom cultivation array in a greenhouse in seven columns and four rows can make smooth air flows between the rows and prevent air differences between the top and bottom. The buoyancy effect in the entering air of 0.5m/s based on following density difference depending on initial internal temperature needs to be considered. The locations of the Fan Coil Unit (FCU) and fan were defined through flow analysis in a greenhouse to distribute the optimal uniform temperature. In this study, the air conditioning system of a greenhouse with a sandwich heat insulting panel shape which is composed of a FCU and fan was designed by flow analysis. A relatively uniform temperature distribution can be formed because the circulation path of air becomes longer in the different locations of the FCU (inlet) and fan (outlet) through the internal temperature and flow analysis. The cultivation and quality uniformity of the mushrooms could be promoted through these environmental improvements.

An Experimental Study on Effect of a Partitioned Electric Heating on Temperature Distribution in a Diesel Particulate Filter (분할형 전기히터 가열이 디젤 차량 배기가스저감장치 필터 내의 온도 분포에 미치는 영향에 관한 실험적 연구)

  • Lee, Choong-Hoon;Park, Sung-Chun
    • Journal of the Korean Society for Railway
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    • v.11 no.2
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    • pp.151-157
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    • 2008
  • The DPF temperature distribution which has a great effect on regenerating the ceramic filter effectively was measured at 30 locations using K-type thermocouples. Five partitioned electric heaters were used for heating the ceramic filter and they are switched ON/OFF in order. Also, the temperature distribution in the ceramic filter was measured with varying the electrical power supply to the heaters and the mass flow rate of the air supply from a blower. The uniform distribution of the air flow velocity at the inlet of the DPF make that of the temperature in the ceramic filter. The difference in heating ability between the partitioned heaters had a great effect on the temperature distribution in the ceramic filter.

Antipathogenic Activity of Bacillus amyloliquefaciens Isolated from Korean Traditional Rice Wine (막걸리로부터 분리된 Bacillus amyloliquefaciens 균주의 항균 활성)

  • Sim, Hyunsu;Kim, Myoung-Dong
    • Microbiology and Biotechnology Letters
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    • v.44 no.1
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    • pp.98-105
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    • 2016
  • The presence of bacterial strains showing antagonistic activity to common pathogens found in a variety of fermented foods in Korea was explored. A bacterium inhibiting the growth of pathogens such as Aspergillus terreus (KCTC6178), A. flavus (KCTC6984), Staphylococcus aureus (KCCM12214), Escherichia coli O157:H7 (KCCM40406), Bacillus cereus (KCTC1012), Cryptococcus neoformans (ATCC208821), Salmonella typhimurium (ATCC19430), and Listeria monocytogenes (KCTC3569) was isolated from Makgeolli, a Korean traditional rice wine. The strain showing high antipathogenic activity was identified as B. amyloliquefaciens based on the nucleotide sequence of the 16S ribosomal RNA gene. Compared with B. amyloliquefaciens KCTC1660, whose genome has been sequenced, the isolate exhibited significantly low activities of starch-degrading enzymes and high resistance to high temperature and low pH.