• Title/Summary/Keyword: 구조정

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Pumping speed of a sputter ion pump with a honeycomb anode cell structure (벌집형 셀 구조를 가지는 스퍼터 이온펌프의 성능 분석)

  • Ha, T.;Ahn, B.;Lee, D.;Kim, J.;Chung, S.
    • Journal of the Korean Vacuum Society
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    • v.15 no.5
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    • pp.451-457
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    • 2006

  • We measured pumping speed of a sputter ion pump with a honeycomb anode cell structure and compared the result with that of another sputter ion pump with a typical cylindrical anode cell structure. A cell module with a honeycomb structure has no dead space which is about 10 % of the entire horizontal area of the cell module with a cylindrical structure. This dead space makes a little contribution to the ionization of the gas, so the pumping performance of the pump with dead space is expected to be lowered by the amount. From the experimental data we concluded that the honeycomb cell structure is superior to the cylindrical structure by $5{\sim}10%$ in performance.

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