• Title/Summary/Keyword: 교정표준기

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Development of a national medium vacuum standard by static expansion method (정적법을 이용한 중진공 국가표준기 개발)

  • Hong S. S.;Lim I. T.;Shin Y. H.;Chung K. H.
    • Journal of the Korean Vacuum Society
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    • v.14 no.2
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    • pp.59-68
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    • 2005
  • We developed a national medium vacuum standard by static expansion method. A 133 Pa capacitance diaphragm gauge was calibrated and analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The results showed that the expanded uncertainty of $2.628\times10^{-3}$ Pa at $95\%$ confidence level and coverage factor of k=2.

2 kNm Deadweight Torque Standard Machine in KRISS (한국표준과학연구원의 실하중 토크 표준기)

  • 김민석;박연규;김종호;강대임
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.656-659
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    • 2004
  • As the demand for traceable calibrations of torque measuring devices has considerably increased both in the production sector and in research institutes, suitable standard machines had to be developed at the Korea Research Institute of Standards and Science. Owing to its special design, the small uncertainty of measurement required for the realization of the static torque can be reached (relative uncertainty of measurement < 5$\times$10$^{-5}$ in the measurement range between 500 and 2000 Nm, and < 1$\times$10$^{-4}$ in the measurement range from 10 to 500 Nm). The relative discrepancy between our torque calibration results of 2 kNm and PTB s (Physikalisch Technische Bundesanstalt, Germany) results was less than 2$\times$10$^{-5}$ , which confirming our uncertainty estimation.

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Calibration of Discharge Coefficient of Sonic Nozzle Using CVFM (정적형 유량계를 이용한 소닉노즐 유출계수 교정 방법에 관한 연구)

  • Shin, J.H.;Kang, S.B.;Park, K.A.;Lim, J.Y.;Cheung, W.S.
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.243-248
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    • 2010
  • Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.

Development of a simple laboratory-made radioactive source to check the integrity of a gamma spectrometry system with HPGe detector (HPGe 검출기를 사용한 감마분광분석계의 점검선원 개발)

  • Lee, Mo Sung
    • Journal of Radiation Protection and Research
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    • v.38 no.2
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    • pp.119-123
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    • 2013
  • A simple laboratory-made radioactive source to check the integrity of a gamma spectrometry system with HPGe detector was developed. The check source consists of radium-riched soil which was ground in size of less than 0.154mm and contained in air tight cylinderical vial, and provides photons with 12 distinct energies. The spectra of the check source were measured once a month during one year, analyzed the charactreictics of their peaks. When the gamma spectrometry system was in normal state, the areas and FWHMs of the gamma rays with more than 3% gamma emission rate in radium and its decay products was constant within standard deviation 2% and 3%, respectively, except 77 keV peak. And it was found that this check source can play a sufficient role to check the integrity of a gamma spectrometry system using 10 peaks in the range of 77 to 2202 keV.

Calibration and Uncertainty Measurement of Differential Mobility Analyzer Using 100 nm NIST SRM 1963 (100 nm NIST 표준입자를 이용한 미분형 전기 이동도 분석기의 교정 및 불확실도 측정)

  • Lee, Snag-Jin;Ahn, Jin-Hong;Ahn, Kang-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.12
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    • pp.1766-1771
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    • 2003
  • House made differential mobility analyzer(DMA) is calibrated with NIST SRM 1691(300 nm PSL). Then the particle size and uncertainty for differential mobility analyzer(DMA) using the NIST SRM 1963(100 nm PSL). In result, calibration of prototype DMA is measured using 300 nm NIST SRM 1691, then sheath air flow was corrected 126.67 ㎤/s. Corrected sheath air flow is used in uncertainty measurement of prototype DMA. Uncertainty analysis is performed using NIST SRM 1963(100 nm PSL). The experimental result shows that NIST SRM 1963 is measured as 102.17 nm with a type A uncertainty of 0.33 nm.

A study on the system automation of medium-vacuum standard (중진공 표준기 자동화에 관한 연구)

  • 홍승수;임인태;신용현;정광화
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.207-213
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    • 2003
  • We have developed the hardware and software for automation of the national medium vacuum standard. The automation is necessary to control and monitor the complex system consists of several vacuum chambers, pumping systems, vacuum gauges, thermometers, and valves. By using the automation program, we have measured volume ratios of the system and performed calibration of a capacitance diaphragm gauge in order to evaluate the system.

What Is Nano-Force Metrology? (나노 힘이란 무엇인가?)

  • 김민석;최인묵;박연규;김종호;강대임
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.9
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    • pp.12-19
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    • 2004
  • 수십 MN(10/sup 6/ N) 이상의 하중을 다루는 건설산업 및 중공업으로부터 수십 kN- 수 MN의 힘을 사용하는 재료시험기, 프레스, 및 공장 자동화설비 그리고 수십 N-수 kN 용량의 상업용 저울까지 힘 측정은 산업의 근간이 되는 기술이며 우리 실생활에 폭 넓게 이용되고 있다. 제품을 생산하고 대형 구조물을 건설하는 공장이나 건축현장에서 힘을 정확히 측정한다는 것은 공정을 일정하게 유지 관리하고 있다는 표시이므로 제품의 품질관리나 건축물의 안전관리의 척도가 된다. (중략)

Practical Output Dosimetry with Undefined $N_{dw}{^{Co-60}}$ of Cylindrical Ionization Chamber for High Energy Photon Beams of Linear Accelerator ($N_{dw}{^{Co-60}}$이 정의되지 않은 원통형 이온전리함을 이용한 고에너지 광자선의 임상적 출력선량 결정)

  • Oh, Young-Kee;Choi, Tae-Jin;Song, Ju-Young
    • Progress in Medical Physics
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    • v.23 no.2
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    • pp.114-122
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    • 2012
  • For the determination of absorbed dose to water from a linear accelerator photon beams, it needs a exposure calibration factor $N_x$ or air kerma calibration factor $N_k$ of air ionization chamber. We used the exposure calibration factor $N_x$ to find the absorbed dose calibration factors of water in a reference source through the TG-21 and TRS-277 protocol. TG-21 used for determine the absorbed dose in accuracy, but it required complex calculations including the chamber dependent factors. The authors obtained the absorbed dose calibration factor $N_{dw}{^{Co-60}}$ for reduce the complex calculations with unknown $N_{dw}$ only with $N_x$ or $N_k$ calibration factor in a TM31010 (S/N 1055, 1057) ionization chambers. The results showed the uncertainty of calculated $N_{dw}$ of IC-15 which was known the $N_x$ and $N_{dw}$ is within -0.6% in TG-21, but 1.0% in TRS-277. and TM31010 was compared the $N_{dw}$ of SSDL to that of PSDL as shown the 0.4%, -2.8% uncertainty, respectively. The authors experimented with good agreement the calculated $N_{dw}$ is reliable for cross check the discrepancy of the calibration factor with unknown that of TM31010 and IC-15 chamber.

Absolute Measurement of the Quantum Efficiency of Photodetectors Using Correlated Photon Pairs (광자쌍을 이용한 광검출기의 양자효율 절대측정)

  • 안경진
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.452-456
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    • 1993
  • The quantum efficiencies of photomultiplier tubes were measured by counting the coincidence photon pairs generated in the process of spontaneous parametric down-conversion. They were measured within 3% accuracy over the range of wavelength from 560 to 850 nm without any standard light source or detector. The values for 633 nm correspond to those obtained with a calibrated laser power meter within the measurement error.

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