• Title/Summary/Keyword: 광전자분광법

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XPD Analysis on the Cleaved GaAs(110) Surface (절개된 GaAs(110) 면의 XPD 분석)

  • Lee, Deok-Hyeong;Jeong, Jae-Gwan;O, Se-Jeong
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.171-180
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    • 1993
  • X-ray photoelectron diffraction (XPD) is used to characterize the crystallographically cleaved GaAs(110) surface. By using polar and azimuthal scans of the usual angle-resolved x-ray photoelectron spectroscopy, we get the reconstruction geometry of the clean GaAs(110) surface from the intensity ratio of Ga 3d core-level peaks. The reconstruction parameters are determined by fitting the diffraction pattern with the single scattering cluster (SSC) model, and the results show similar tendencies to those obtained by other techniques.

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Soft X-ray Synchrotron-Radiation Spectroscopy Study of Half-metallic Mn3Ga Heusler Alloy (반쪽 금속 호이슬러 화합물 Mn3Ga의 연 X선 방사광 분광 연구)

  • Seong, Seungho;Lee, Eunsook;Kim, Hyun Woo;Kim, D.H.;Kang, J.S.;Venkatesan, M.;Coey, J.M.D.
    • Journal of the Korean Magnetics Society
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    • v.26 no.6
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    • pp.185-189
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    • 2016
  • By employing photoemission spectroscopy (PES) and soft X-ray absorption spectroscopy (XAS), the electronic structure of the candidate half-metallic antiferromagnet of $Mn_3Ga$ Heusler compound has been investigated. We have studied two ball-milled $Mn_3Ga$ powder samples, one after annealing and the other without annealing, respectively. Based on the Mn 2p XAS study, we have found that Mn ions are nearly divalent in $Mn_3Ga$ and that the Mn ions having the locally octahedral symmetry and those having the locally tetrahedral symmetry are both present in $Mn_3Ga$. We have found relatively good agreement between the measured valence-band PES spectrum of $Mn_3Ga$ and the calculated density of states, which is in agreement with the half-metallic electronic structure of $Mn_3Ga$.

$C_2F_6$/$CHF_3$ 반응성이온 건식식각 공정시 실리콘 표면에 생성된 잔류막과 표면구조의 연구

  • Yun, Seon-Jin;Jang, Sang-Hwan;Gwon, O-Jun
    • ETRI Journal
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    • v.11 no.1
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    • pp.89-96
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    • 1989
  • $C_2F_6$/$CHF_6$ 플라즈마를 이용한 실리콘 산화막의 반응성이온 식각공정시 실리콘 표면에 형성되는 고분자 잔류막과 근표면 손상영역을 X-선 광전자분광법(x-ray photoelectron spectroscopy)과 러더포드 후방산란법(Rutherford backscattering)을 이용하여 연구하였다. 표면 잔류막은 CF, $CF_2$, $CF_3$, $C-CF_x$, 그리고 C-C/C-H 등의 결합을 가진 불화탄소 고분자로 구성되어 있으며, 또한 C 1s와 Si 2p X-선 광선자 스펙트럼으로부터 C-Si 결합이 존재함을 확인하였다. 반응성이온 식각을 거친 실리콘 표면 구조의 연구결과, 불소와 탄소로 구성된 고분자막($<20 \AA$)이 극표면에 존재하며, 식각 후 공기중에 노출됨에 따라 고분자 잔류층으로 산소가 통과하여 기판을 산화시킴으로써 실리콘 산화막( $~10\AA$)이 그 아래에 형성되었음을 알았다. 그리고 실리콘산화막 아래에 탄소-산소 결합영역이 관찰되었다. 플라즈마 가스의 조성에서 $CHF_3$의 량이 증가함에 따라 고분자 잔류막의 두께가 증가하였으며, 본 연구의 실험조건에서 2분간 overetching한 시편의 경우에도 실리콘 표면 영역의 손상정도가 매우 적음을 발견하였다.

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Oxygen Chemisorption of ZrC(111) Surface by High-Resoltion Electron Energy Loss and Ultraviolet Photoelectron Spectroscopy (고분해능 전자에너지손실 및 자외선광전자분광법을 이용한 ZrC(111)면의 산소흡착 연구)

  • Hwang, Yeon;Park, Soon-Ja;Aizawa, Takashi;Hayami, Wataru;Otani, Shigeki;Ishizawa, Yoshio
    • Korean Journal of Materials Research
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    • v.1 no.4
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    • pp.184-190
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    • 1991
  • Oxygen chemisorption on single crystal ZrC(111) surface was studied by high-resolution electron energy loss and ultraviolet photoelectron spectroscopy. At a low amount of oxygen exposure, adsorbed oxygen atoms construct $(\sqrt{3}{\times}\sqrt{3})R30^{\circ}$ structure. On the other hand, oxygen adsorption changes into $1{\times}1$ structure as the amount of oxygen exposure increases. The adsorbed oxygen atoms show smaller vertical distance from the Zr topmost layer in the $1{\times}1$ structure than in the $(\sqrt{3}{\times}\sqrt{3})R30^{\circ}$ structure and approach to the bridge site rather than 3-fold hollow site. The two different oxygen adsorption behavior comes from the two different surface stales of the clean ZrC(111) surface.

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25-686 K 온도범위에서의 InSb 유전율 함수와 전이점의 온도의존성 연구

  • Hwang, Sun-Yong;Kim, Tae-Jung;Yun, Jae-Jin;Choe, Jun-Ho;Kim, Jun-Yeong;Kim, Yeong-Dong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.405-405
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    • 2012
  • InSb는 높은 전자이동도와 낮은 밴드갭을 가지고 있어 저전력 고효율의 고주파소자 및 비선형 광소자에 적합한 물질이다. 특히 InSb 기반 소자들은 전자-포논효과의 영향을 덜 받는 저온에서 고감도 소자로도 사용되고 있는데, 소자의 최적합 설계와 제작시의 실시간 성장제어를 위해서는 넓은 온도범위에서의 InSb의 광물성이 필요하다. 분광타원편광분석법(ellipsometry)은 물질의 광특성인 유전율 함수를 정확하게 측정 할 수 있은 기술로써, InSb 에 대한 유전율 함수는 많은 연구를 통해 잘 알려져 있다. 그러나, 온도변화에 대한 연구로는 100-700 K, 1.2-5.6 eV의 제한된 온도와 분광영역에서만 이루어졌다. 본 연구에서는 보다 확장된 온도범위(25-686 K), 광역 에너지 범위 (0.74-6.5 eV)에서 분광타원편광분석 연구를 수행하였다. 그 결과 저온에서의 전자-포논 효과의 감소로 인한 청색천이와 보다 명확한 전자전이점들의 값을 얻었다. 특히, 100 K 까지의 이전 연구에서는 구분할 수 없었던 $E_2'$ 전이점을 본 연구의 25 K 의 유전율 함수에서 명확히 구분할 수 있었고, 고에너지 영역의 $E_1'+{\Delta}_1+{\Delta}_1'$ 전이점의 온도의존성을 처음으로 연구하였다. 본 연구의 결과는 InSb 를 기반으로 한 광전자 소자의 개발 및 적용분야와 밴드갭 엔지니어링 분야에 많은 도움이 될 것으로 예상한다.

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Study of electronic structures of insulating rare-earth compounds by x-ray photoelectron spectroscopy (광전자분광법을 이용한 희토류 부도체 화합물들의 전자구조 연구)

  • 조은진;오세정
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.315-326
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    • 1996
  • The electronic structures of 3d and 4d core-levels of rare-earth atoms in the insulating rare-earth (Sm, Eu, Gd, and Tb) compounds were studied with x-ray photoelectron spectroscopy(XPS). It is shown that the intrinsic satellite structure due to the hybridization disappears for chemically stable-earth trivalent heavy rare-earth insulating compounds as the hybridization between f electrons of rare-earth atoms and p electrons of anion atoms decreases due to the lanthanide contraction. Eu atoms at the surface of the stable insulating trivalent Eu compounds are found to be divalent. The satellite peak of Eu 3d core-level spectra at about 10eV higher binding energy side relative the main peak comes from the multiplet structures of $\underline{3d}4f^6$ configuration. The satellite structure appearing at about 15 eV higher binding energy side relative to the main peak in all insulating rare-earth compounds is due to an energy loss process of creating a plasmon.

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XPS Studies for O1S Electrons of Ion Exchanged Zeolite X and Y (이온교환된 X형 및 Y형 제올라이트의 O1S 전자에 대한 X선 광전자분광학적 해석)

  • Kim, Myung-chul;Kim, Jong-Taik
    • Applied Chemistry for Engineering
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    • v.3 no.2
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    • pp.240-246
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    • 1992
  • The electronic structure of oxygen atom of cation-exchanged zeolite was investigated by utilizing X-ray photoelectron spectroscopy(XPS). The obtained $O_{1S}$ spectra of $Na^+-$, $Fe^{2+}-$ and $Fe^{3+}-$ exchanged zeolite X and Y were deconvoluted to demonstrate electronic binding energy of framework oxygens. There were 2-3 bands in each spectrum. The characteristics of separated band have been studied in terms of binding energy and relative area of $O_{1S}$ electron with respect to the exchanged cation. Those bands were assigned to the bridged oxygen in framework (band 1), cation bonded oxygen in cationic site (band 2) and oxygen in water coordinated to the cation (band 3) each other. The band 1 occupying the majority area of $O_{1S}$ spectrum was shifted to higher region on binding energy according to the decrease of Al content in zeolite.

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Determination of Mn Oxidation State in Mn-(hydr)oxides using X-ray Photoelectron Spectroscopy(XPS) (X-선 광전자 분광법을 이용한 망간산화물의 망간 산화상태 해석)

  • Song, Kyung-Sun;Bae, Jong-Seong;Lee, Gie-Hyeon
    • Economic and Environmental Geology
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    • v.42 no.5
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    • pp.479-486
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    • 2009
  • In natural environments, manganese (Mn) exists in the valence of +2, +3, and +4 and plays a pivotal role as a strong oxidant or reductant in the geochemical cycles of elements. Especially, Mn forms varying (oxyhydr)oxides. The oxidation state of structural Mn is characteristic to each oxide and is one of the most important factors controlling its geochemical behaviors such as solubility, sorption capacity, and redox potential. Therefore, it is important to elucidate processes governing Mn oxidation state in predicting the fate and transport of many redox sensitive elements in the environment. X-ray photoelectron spectroscopy (XPS) is a very useful method to determine the oxidation state of various elements in solid phases. In this study, the oxidation states of structural Mn in MnO, $Mn_2O_3$, $MnO_2$ were assessed based on the binding energy spectra of $Mn2p_{3/2}$ and Mn3s using XPS and were compared with those reported elsewhere. $Mn2p_{3/2}$ binding energies were determined as 640.9, 641.5, 641.8 eV for MnO, $Mn_2O_3$, $MnO_2$, respectively, which indicates that the binding energy increased with increasing Mn oxidation state. It was also noted that Ar etching may cause changes in electronic structure configuration on surface of the original sample.

Study of the formation of Pd-silicide with x-ray photoelectron spectroscopy (광전자분광법을 이용한 Pd-실리사이드의 형성 연구)

  • 조은진;최일상;이한길;황찬용
    • Journal of the Korean Vacuum Society
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    • v.6 no.2
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    • pp.165-171
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    • 1997
  • If the thickness of Pd deposited is larger than 9$\AA$, its phase is $Pd_3Si$. This phase is followed by pure Pd phase with further deposition of Pd. Also, when the thickness of Pd deposited on top of Si(111) is larger than 1$\AA$, the phase of Pd-silicide formed is found to be Pd2Si. The full width at half maximum of Pd 3d core-levels increases with decreasing of Pd film thickness at low coverages ($\leq0.5\AA$). This is due to the formation of additional phase of Pd silicide, i.e. PdSi, in addition to $Pd_2Si$.

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열 화학기상증착법을 이용한 BCN 나노시트의 합성과 전기적 특성 분석

  • Jeon, Seung-Han;Cha, Myeong-Jun;Song, U-Seok;Kim, Seong-Hwan;Jeon, Cheol-Ho;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.399-399
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    • 2012
  • 최근 그래핀 연구와 더불어 2차원 구조의 나노소재에 대한 관심이 급증하면서 육각형의 질화붕소(hexagonal boron nitride; h-BN) 나노시트(nanosheet)[1]나 붕소 탄화질화물(boron caronitride;BCN) 나노시트[2, 3]와 같은 2차원 구조체에 대한 연구가 활발히 진행되고 있다. 그 중 BCN은 반금속(semimetal)인 흑연(graphite)과 절연체인 h-BN이 결합된 나노시트로 원소의 구성 비율에 따라 전기적 특성을 제어할 수 있다는 장점이 있다. 따라서 다양한 나노소자로의 응용을 위한 연구가 활발히 진행되고 있다. 본 연구에서는 열 화학기상증착법(thermal chemical vapor deposition)을 이용하여 폴리스틸렌(polystyrene)과 보레인 암모니아(borane ammonia)를 사용하여 BCN 나노시트를 합성하였다. 합성된 BCN 나노시트의 구조적 특징과 화학적 조성 및 결합 상태를 주사전자현미경(scanning electron microscopy), 투과전자현미경(transmission electron microscopy), X-선 광전자 분광법(X-ray photoelectron spectroscopy), 라만 분광법(Raman spectroscopy)을 통해 조사하였고, 이온성 용액법 (ionic liquid)[4]을 이용하여 전계효과 특성을 측정하였다.

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