• 에너지공학
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• 제9권2호
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• pp.138-145
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• 2000

고체재료의 열확산계수나 열전도계수와 같은 열물성을 비접촉식 방법으로 측정하기 위하여 광열변위법에 대한 이론적인 해석을 수행하였다. 가열빔의 파형을 코사인파, 삼각파 그리고 사각파로 가정하여 2차원 열전도 방정식과 열탄성 방정식의 엄밀해를 구하였고, 이를 가열빔으로부터 직접 구한 실제파의 결과와 비교하였다. 코사인파의 결과가 다른 파형에 비하여 실제파와 가장 유사한 것으로 보아 비교적 해석이 복잡한 실제파를 코사인파로 가정하여도 무방하다.

• 한국결정성장학회지
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• 제8권1호
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• pp.117-123
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• 1998

초크랄스키 실리콘 기판의 뒷면에 형성된 기계적 손상이 미치는 효과에 대하여 고찰하였다. 기계적 손상의 정도는 레이저 여기/극초단파 반사 광전도 감쇠법에 의한 소수반송자 재결합 수명, 광열범위, X-선 단면 측정 및 습식산화/선택적 식각 방법으로 평가하였다. 그 결과, 웨이퍼 뒷면에 가해지는 기계적 손상의 세기가 강할수록 소수반송자 재결합 수명은 짧아지고, 광열 변위의 평균값은 비례적으로 증가하였으며, 손상된 웨이퍼에서 Grade 1의 과잉 광열 변위값을 1로 봤을 때 과잉 광열 변위의 정규화한 상대 정량 비는 Grade 1: Grade 2:Grade 3 = 1:19.6:41이다.

• 대한기계학회논문집B
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• 제26권12호
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• pp.1747-1755
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• 2002

A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in semi-infinite solid materials. The influence of the parameters, such as radius and modulation frequency of the heating beam and the thermal diffusivity, was studied. Usually, thermal diffusivity was determined by the deformation angle and phase angle as the relative position between the heating and probe beams. In this study, we proposed the simple analysis method based on the real part of deformation gradient as the relative position between two beams. It is independent in the parameters such as power of heating beam, absorption coefficient, reflectivity, Poisson's ratio, and thermal expansion coefficient.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.132-137
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• 2000

A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in solid materials. The influence of parameters - radius and modulation frequency of pump beam and thickness of material - on the phase lag was studied. The phase decreases up to a certain position, then starts to increase and does have an asymptotic value. The position, where phase has the minimum value, is a function of thermal diffusion length thickness of sample, and radius of pump beam. A new method based on minimum phase lag is described to determine the thermal diffusivity of solid material.

• 대한기계학회논문집B
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• 제25권3호
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• pp.296-304
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• 2001

A new method of measuring the thermal diffusivity of solid material at room temperature using photothermal displacement is proposed. The influence of the parameters, such as radius and modulation frequency of the pump beam and the sample thickness, was studied. From the minimum position of phase of measured deflection with respect to the pump beam, the thermal diffusivity of the materials can be obtained. The position where phase has the minimum value is determined using multiparameter least-square regression fitting. The experimental values for different samples obtained by applying the new method are in good agreement with the literature values.

• 대한기계학회논문집B
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• 제26권2호
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• pp.302-309
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• 2002

A new method of measuring the thermal diffusivity of solid material at room temperature using photothermal displacement is proposed. The influence of the parameters, such as radius and modulation frequency of the pump beam and the sample thickness, was studied. In previous works, thermal diffusivity was determined by the deformation angle and phase angle as the relative position between the heating and probe beams. In this study, however, we proposed the new analysis method based on the real part of deformation angle as the relative position between two beams. From the zero-crossing position of real part of deformation angle with respect to the pump beam, the thermal diffusivity of the materials can be obtained. The experimental values for different samples obtained by applying the new method are in good agreement with the literature values.