• Title/Summary/Keyword: 광열변위법

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A Theoretical Study on the Photothermal Displacement Method for Wave Shape of Pump Beam (가열빔의 파형에 따른 광열변위법에 대한 이론적 연구)

  • 전필수
    • Journal of Energy Engineering
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    • v.9 no.2
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    • pp.138-145
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    • 2000
  • 고체재료의 열확산계수나 열전도계수와 같은 열물성을 비접촉식 방법으로 측정하기 위하여 광열변위법에 대한 이론적인 해석을 수행하였다. 가열빔의 파형을 코사인파, 삼각파 그리고 사각파로 가정하여 2차원 열전도 방정식과 열탄성 방정식의 엄밀해를 구하였고, 이를 가열빔으로부터 직접 구한 실제파의 결과와 비교하였다. 코사인파의 결과가 다른 파형에 비하여 실제파와 가장 유사한 것으로 보아 비교적 해석이 복잡한 실제파를 코사인파로 가정하여도 무방하다.

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Evaluation of mechanical backside damage by minority carrier recombination lifetime and photo-acoustic displacement method in silicon wafer (실리콘 웨이퍼에서 광열 변위법과 소수 반송자 재결합 수명 측정에 의한 기계적 후면 손상 평가)

  • 최치영;조상희
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.1
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    • pp.117-123
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    • 1998
  • We investigated the effect of mechanical backside damage in Czochralski grown silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductivity decay method, photo-acoustic displacement method, X-ray section topography, and wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the photo-acoustic displacement values increased proportionally, and it was at Grade 1: Grade 2:Grade 3 = 1:19.6:41 that the normalized relative quantization ratio of excess photo-acoustic displacement in damaged wafer was calculated, which are normalized to the excess PAD from sample Grade 1.

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A Theoretical Study for the Thermal Diffusivity Measurement of Semi-Infinite Solid Using Photothermal Displacement Method (광열변위법을 이용한 반무한 고체의 열확산계수 결정에 대한 이론적 연구)

  • Jeon, Pil-Soo;Lee, Kwang-Jai;Yoo, Jai-Suk;Park, Young-Moo;Lee, Jong-Hwa
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.12
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    • pp.1747-1755
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    • 2002
  • A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in semi-infinite solid materials. The influence of the parameters, such as radius and modulation frequency of the heating beam and the thermal diffusivity, was studied. Usually, thermal diffusivity was determined by the deformation angle and phase angle as the relative position between the heating and probe beams. In this study, we proposed the simple analysis method based on the real part of deformation gradient as the relative position between two beams. It is independent in the parameters such as power of heating beam, absorption coefficient, reflectivity, Poisson's ratio, and thermal expansion coefficient.

A Theoretical Study for the Thermal Diffusivity Measurement of Solid Material using Photothermal Displacement Method (광열변위법을 이용한 재료의 열확산계수 측정에 대한 이론적 연구)

  • Jeon, Pil-Soo;Lee, Eun-Ho;Lee, Kwang-Jai;Yoo, Jai-Suk;Kim, Ki-Hyun
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.132-137
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    • 2000
  • A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in solid materials. The influence of parameters - radius and modulation frequency of pump beam and thickness of material - on the phase lag was studied. The phase decreases up to a certain position, then starts to increase and does have an asymptotic value. The position, where phase has the minimum value, is a function of thermal diffusion length thickness of sample, and radius of pump beam. A new method based on minimum phase lag is described to determine the thermal diffusivity of solid material.

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Measurement of Thermal Diffusivity Using Minimum Phase Based on the Photothermal Displacement (광열변위의 최소위상을 이용한 열확산계열수 측정)

  • Lee, Eun-Ho;Lee, Gwang-Jae;Jeon, Pil-Su;Yu, Jae-Seok;Kim, Gi-Hyeon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.3
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    • pp.296-304
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    • 2001
  • A new method of measuring the thermal diffusivity of solid material at room temperature using photothermal displacement is proposed. The influence of the parameters, such as radius and modulation frequency of the pump beam and the sample thickness, was studied. From the minimum position of phase of measured deflection with respect to the pump beam, the thermal diffusivity of the materials can be obtained. The position where phase has the minimum value is determined using multiparameter least-square regression fitting. The experimental values for different samples obtained by applying the new method are in good agreement with the literature values.

Measurement of Thermal Diffusivity Using Deformation Angle Based on the Photothermal Displacement Method (광열변위법의 변형각을 이용한 열확산계수 측정)

  • Jeon, Pil-Su;Lee, Gwang-Jae;Yu, Jae-Seok;Park, Yeong-Mu;Lee, Jong-Hwa
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.2
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    • pp.302-309
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    • 2002
  • A new method of measuring the thermal diffusivity of solid material at room temperature using photothermal displacement is proposed. The influence of the parameters, such as radius and modulation frequency of the pump beam and the sample thickness, was studied. In previous works, thermal diffusivity was determined by the deformation angle and phase angle as the relative position between the heating and probe beams. In this study, however, we proposed the new analysis method based on the real part of deformation angle as the relative position between two beams. From the zero-crossing position of real part of deformation angle with respect to the pump beam, the thermal diffusivity of the materials can be obtained. The experimental values for different samples obtained by applying the new method are in good agreement with the literature values.