• Title/Summary/Keyword: 광다이오드

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The fabrication of 6H- SiC UV photodiode and the analysis of the photoresponse (6H-SiC UV 광다이오드의 제작 및 수광특성 해석)

  • 박국상;이기암
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.7 no.1
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    • pp.126-136
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    • 1997
  • 6H-SiC UV photodiodes with $p^+$/n/n mesa structure were fabricated. The photocurrents of the photodiodes were measured in the wavelength range of 200~600 nm. The photocurrents were sensitive to ultraviolet radiation of 200~500 nm, and come to the maximum value at 260 nm. The quantum efficiency was calculated by using the diffusion model of minority carriers, and compared with the distribution of the photocurrent measured as a function of wavelength each other. The photocurrents of the 6H-SiC photodiode were explained by the diffusion model of the minority carriers which contained the optical absorption of the depletion region as well as the other layers.

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Fabrication of the Fast Scanning Spectrophotometer Using Si-Photodiode Array (실리콘 광다이오드 어레이를 이용한 초고속 분광분석기 제작)

  • 정만호
    • The Proceedings of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.11 no.4
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    • pp.51-58
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    • 1997
  • I배열형 광다이오드인 EG&G Reticon을 사용하여 측정시간이 약 10[ms]인 광측정용 초고속 분광광도계를 제작하였다. 핵심 부품인 배열형 광다이오드의 물리적 특성인 화소의 균일성, 선형성, 분광감응도를 측정하였다. 화소의 균일성과 선형성은 각각 0.5[%] 이내에서 일치하였으며, 분광감응도는 400[nm]에서 900[nm]까지 표준검출기를 사용하여 구하였다. 제작된 분광광도계는 2[nm]의 대역폭으로 측정이 가능하며 측정불확도는 2[%] 정도였다. 성능평가를 위해 미표준국의 표준기준물인 2009 didymium 필터와 수은 선광원을 측정한 결과 양호한 값을 얻었다.

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Fabrication and Characteristics of a-Si : H Photodiodes for Image Sensor (영상센서를 위한 a-Si : H 광다이오드의 제작 및 특성)

  • Park, Wug-Dong;Kim, Ki-Wan
    • Journal of Sensor Science and Technology
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    • v.2 no.1
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    • pp.29-34
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    • 1993
  • a-Si : H photodiodes for image sensor have been fabricated and characterized. Photosensitivity of a ITO/a-Si : H/Al photodiode without blocking layer was 0.7 under the applied voltage of 5 V and peak spectral sensitivity in visible region was found at 620 nm. Dark current of ITO/a-SiN : H/a-Si : H/p-a-Si : H/Al photodiode was suppressed by hole blocking layer and electron blocking layer at the value of lower than 1.5 pA to the applied voltage of 10 V. Also maximum photosensitivity was about 1 under the applied voltage of 3 V and peak spectral sensitivity was found at 540 nm.

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ZnO NW-based ultraviolet photodiodes fabricated by dielectrophoresis technique (교류 전기장 배열 기법에 의해 제작된 ZnO 나노선 기반의 자외선 광다이오드)

  • Kim, Kwang-Eun;Kang, Jeong-Min;Lee, Myeong-Won;Yoon, Chang-Joon;Jeon, Young-In;Kim, Sang-Sig
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.259-259
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    • 2010
  • 교류 전기장에 의해 배열된 ZnO 나노선 기반의 광다이오드를 제작하고 자외선 광특성을 조사하였다. ZnO 나노선은 dielectrophoresis (DEP) force와 토크 (T)에 의하여 두 전극사이에 배열되며, silicon (Si)나노선과 접합을 하여 p-n 접합을 형성한다. 형성된 p-n 접합은 정류작용을 하는 다이오드 특성을 보이며, 자외선 입사시 전류 점멸비 (on/off ratio) $10^1{\sim}10^2$을 보이는 광다이오드(photodiode)로서 동작한다.

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Improved photoresponsivity of AlGaN UV photodiode using antireflective nanostructure (반사방지 나노 구조체를 이용한 AlGaN UV 광다이오드의 광반응도 향상)

  • Dac, Duc Chu;Choi, June-Heang;Kim, Jeong-Jin;Cha, Ho-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.24 no.10
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    • pp.1306-1311
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    • 2020
  • In this study, we proposed an anti-reflective nano-structure to improve the photoresponsivity of AlGaN UV photodiode that can be used as a receiver in a solar blind UV optical communication system. The anti-reflective nano-structure was fabricated by forming Ni nano-clusters on SiO2 film followed by etching the underneath SiO2 film. A sample with the anti-reflective nano-structure exhibited lower surface reflection along with less dependency on the wavelength in comparison with a sample without the nano-structure. Finally, a UV photodiode was fabricated by applying an anti-reflective structure produced by heat-treating a 2 nm-thick Ni layer. The photodiode fabricated with the proposed nano-structure exhibited noticeable improvement in the photoresponsivity at the wavelength range from 240 nm to 270 nm in comparison with the same photodiode with a SiO2 film without the nano-structure.

Fabrication and Characteristics of Infrared Photodiode Using Insb Wafer with p-i-n Structure (p-i-n 구조의 InSb 웨이퍼를 이용한 적외선 광다이오드의 제조 및 그 특성)

  • Cho, Jun-Young;Kim, Jong-Seok;Son, Seung-Hyun;Lee, Jong-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.8 no.3
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    • pp.239-246
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    • 1999
  • A highly sensitive photovoltaic infrared photodiode was fabricated for detecting infrared light in $3{\sim}5\;{\mu}m$ wavelength range on InSb wafer with p-i-n structure grown by MOCVD. Silicon dioxide($SiO_2$) insulating films for the junction interface and surface of photodiode were prepared using RPCVD because InSb has low melting point and evaporation temperature. After formation of In ohmic contacts by thermal evaporation, the electrical properties of the photodiode were characterized in dark state at 77K. A product of zero-bias resistance and area($R_0A$) showed $1.56{\times}10^6\;{\Omega}{\cdot}cm^2$ that satisfied BLIP(background limited infrared photodetector) condition. When the photodiode was tested under infrared light, the normalized detectivity of about $10^{11}\;cm{\cdot}Hz^{1/2}{\cdot}W^{-1}$ was obtained. we successfully fabricated a unit cell with InSb IR array with good quantum efficiency and high detectivity.

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