• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.5-9
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• 2006

공초점 주사 현미경(Confocal Scanning Microscope, CSM)은 Bio-cell 및 특정 형태를 가지는 object의 고분해능 3차원 영상복원이 가능하여 3차원 측정장비로 주로 사용된다. 특히 LCD 패널 및 반도체 웨이퍼의 불량 검사 장비로의 활용이 가능하여 3차원 영상으로부터 불량 여부와 원인을 알아낼 수 있다. 하지만 생산 공정에서 불량 검사를 하기 위해서는 고속, 고품질의 성능이 요구된다. 따라서 이 논문에서는 공초점 주사 현미경을 이용하여 고분해능으로 고속, 고품질의 3차원 영상복원을 할 때 어떠한 조건이 요구되는지 알아보고 시뮬레이션 하도록 하겠다.

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.201-207
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• 1999

The fiber-optical confocal scanning interference microscope with a simple configuration was constructed with a 4-port fiber-optic coupler, and the new method based on the phase shifting method was proposed for surface profiling by the system. In the method, the height of a specimen was determined from the phase of confocal beam. It was verified experimentally that the method was applicable to even the confocal interference microscope with a long-wavelength source and a low NA objective, and that the scanning time could be drastically reduced compared with the conventional method. Finally, it was found that our method is less sensitive to the variation of surface reflectivity than the conventional method.

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.58-59
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• 2004

• Korean Journal of Optics and Photonics
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• v.15 no.6
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• pp.583-590
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• 2004

The autofocus is one of the important processes in the automated vision inspection or measurements using optical microscopes, because it influences the measuring accuracy. In this paper, we used the confocal microscope configuration based on not a pinhole but a single-mode optical fiber. A single mode fiber has the functions of source and detector by applying the reciprocal scheme. As a result, we acquired a simple system configuration and easy alignment of the optical axis. Also, we embodied a fast autofocus system by acquiring the focus error signal through a source modulation technique. The source modulation technique can effectively reduce physical disturbances compared with objective lens modulation, and it is easily applicable to general optical microscopes. The focus error signal was measured with respect to the modulation amplitude, reflectance of the specimen and inclination angle of the measuring surface. The performance of the proposed autofocus system was verified through autofocusing flat mirror surface. In addition, we confirmed that source modulation rarely degrades the depth resolution by the comparison between the FWHMs of axial response curves.

• Korean Journal of Optics and Photonics
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• v.12 no.5
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• pp.356-361
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• 2001

The effect of side-lobe on axial image is investigated. We show, using computer simulation and experimentally, that an optimized axial response can be achieved by minimized side-lobe according to the Herschel condition and that the appearance of sidelobes is decreased by balancing phase error.

• The Optical Journal
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• v.8 no.2 s.42
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• pp.71-77
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• 1996

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.577-580
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• 2005

Surface quality of a micro-processed sample with laser has been investigated by using of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140\times120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to measure correctly hight and width of ITO and scribing depth and width of a wafer with a resolution less than 300 . However, the scan speed is slow and it is difficult to distinguish a surface composed of different nm kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from surface is different from each material.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.52-59
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• 2006

Surface qualities of a micro-processed sample with a pulse laser have been investigated by making use of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to correctly measure the hight and width of ITO, and scribing depth and width of a wafer with a resolution less than 300nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from the surface is different for each material.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.2
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• pp.169-176
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• 2001

In modern industry, the accuracy and the sulfate-finish requirements for machined parts have been becoming ever more stringent. In addition, the measurement and understanding of surface topography is rapidly attracting the attention of the physicist and chemist as well as the engineer. Optical measuring method is used in vibration measurement, crack and defect detection with the advent of opto-mechatronics, and it is expected to play an important role in surface topography. In this study, the principle of confocal microscope is described, and the advanced 3-D surface measuring system that has better performance than the traditional confocal microscope is developed. Suitable fixtures arc developed and integrated with the computer system for generating 3-D surface and form data. Software for data acquisition and analysis of various parameters in surface geometrical features has been developed.

• Transactions of the Society of Information Storage Systems
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• v.11 no.2
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• pp.22-25
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• 2015

In this paper, we demonstrate solid-immersion lens based confocal microscopy using super-continuum generation effect. Using super-continuum generation effect, we could diversify the excitation wavelength of confocal microscopy. Further, high refractive index of solid-immersion lens would increase the resolution of confocal microscopy. As a result, by applying the super-continuum generation effect and solid-immersion lens to confocal microscopy, some problems of confocal fluorescent microscopy, the excitation wavelength and the resolution, could be overcome. To verify it, we made home-built solid-immersion lens based confocal microscopy using super-continuum generation effect, and evaluate the performance of the system.