• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.5
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• pp.2113-2120
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• 2013

In this study, an efficient machine vision based inspection system is developed for the in-line measurement of phosphor resin dispensing shapes on LED chip package. Since the phosphor resin (target material) has semitransparent characteristics, illuminated light beam is reflected from the bottom of the chip as well as from the surface. Since such phenomenon can deteriorate inspection reliability, a white LED and a 635nm laser slit beams are experimentally tested to decide suitable illumination optics. Also, specular and diffuse reflection methods are tested to decide suitable optical triangulation. As a result, it can be known that the combination of a white slit beam source and specular reflection method show the best inspection results. The Catmull-Rom spline interpolation is applied to the obtained data to form smoother surface. From the results, it can be conclude that the developed system can be sucessfully applied to the in-line inspection of LED chip packaging process.

• Korean Journal of Construction Engineering and Management
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• v.12 no.1
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• pp.73-84
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• 2011

This study represents construction progress management model based on quality inspection process in addition to cost-schedule integration. Quality inspection process cycle, resource estimate as progress measurement parameter, hierarchical structure of schedule, and inspection lots linking quality inspection to resource estimate are addressed as four main information areas. The authors established several process models to give a structure and correlations among information elements on each of these areas. Applying the process models proposed, an information system was implemented and utilized for nuclear power plant construction. It reveals that the system achieves accurate and objective progress information in near real time with significantly reduced time and effort as well as administrative efficiencies from making quality inspection process online.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.4
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• pp.390-395
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• 2004

The iSTMS is a web-based integrated information system supporting Pre-Service and In-Service Inspection(PSI/ISI) processes for the nuclear power plants of KHNP(Korea Hydro & Nuclear Power Co. Ltd.). The system provides a full spectrum coverage of the inspection processes from the planning stage to the final report of examination in accordance with applicable codes, standards, and regulatory requirements. The major functions of the system includes the inspection planning, examination, reporting, project control and status reporting, resource management as well as objects search and navigation. The system also provides two dimensional or three dimensional visualization interface to identify the location and geometry of components and weld areas subject to examination in collaboration with database applications. The iSIMS is implemented with commercial software packages such as database management system, 2-D and 3-D visualization tool, etc., which provide open, updated and verified foundations. This paper describes the key functions and the technologies for the implementation of the iSIMS.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.1
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• pp.18-26
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• 2016

The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2009.11a
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• pp.173-174
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• 2009

"방사성폐기물 고화체의 물성시험"에 사용되는 시편을 실험실적으로 제조한 소규모 모의 고화체 시편과 고화공정에서 직접 채취한 소규모 시편, 200L 드럼으로부터 코아시편을 채취 가공하여 만든 시편과 같이 3종류가 있다. 고화공정에서 발생되는 고화체는 일반적으로 200 L 드럼에 주입되며, 고화체의 균일성 정도는 고화공정의 특성, 폐기물/고화매질 혼합비, 200 L 고화체 드럼의 냉각방식에 따라 다르다. 따라서, 실험실에서 제조한 시편과 공정에서 채취한 소규모 시편을 실제 고화공정을 대표할 수 없으며 또한 실제 발생된 고화체의 조성과도 동일하다고 볼 수 없다. 따라서 200 L 실드럼에서부터 코아시편을 채취하여 만든 시편이 고화공정과도 고화체를 대표할 수 있는 시편으로 볼 수 있다. 기 발생고화체(시멘트와 파리핀 고화체 및 잡고체 폐기물)의 영구처분을 위하여 과기부 고시 05-18호 "폐기물 인도기준" 규정과 한국방사성폐기물관리공단의 중 저준위 방사성폐기물 인수기주(안)의 준수 여부를 평가하기 위하여 각 원전의 대표 드럼에 대하여 특성평가시험인 압축강도, 침출, 침수, 열 순환, 내방사성 영향시험을 수행하기위해 실 드럼으로부터 원통형 코아시편을 채취하여 이를 시험검사에 필요한 시험시편으로 가공한 후 표준 특성시험법을 이용하여 물성들을 평가하며 특성평가시험을 위한 시편으로는 L/D=2, L/D=1인 두 종류의 시편을 가공하였으며 압축, 침수, 열순환 및 방사선조사시편은 L/D=2 시편을 제조하였고 침출시험시편은 L/D=1인 시편을 채취하였다.

• Journal of the Korea Society of Computer and Information
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• v.18 no.3
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• pp.107-118
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• 2013

In this paper, we developed the semiconductor monitoring system for the etching process. Around the world, expert companies are competing fiercely since the semiconductor industry is a leading value-added industry that produces the essential components of electronic products. As a result, many researches have been conducted in order to improve the quality, productivity, and characteristics of semiconductor products. Process monitoring techniques has an important role to give an equivalent quality and productivity to produce semiconductor. In fact, since the etching process to form a semiconductor circuit causes great damage to the semiconductors, it is very necessary to develop a system for monitoring the process. The proposed monitoring system is mainly focused on the dry etching process using plasma and it provides the detailed observation, analysis and feedback to managers. It has the functionality of setting scenarios to match the process control automatically. In addition, it maximizes the efficiency of process automation. The result can be immediately reflected to the system since it performs real-time monitoring. UI (User Interface) provides managers with diagnosis of the current state in the process. The monitoring system has diverse functionalities to control the process according to the scenario written in advance, to stop the process efficiently and finally to increase production efficiency.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 1997.04a
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• pp.223-231
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• 1997

내열성복합재료와 Steel 구조물 사이의 좁고 긴 원통형 공간을 내열성 폴리우레탄 재료로 충전하는 연구를 수행하였다. 충전재료를 결정하기 위하여 3종의 폴리우레탄과 에폭시수지를 선정, 시험하여 내열성, 흐름성, 접착성, 경도측정 등을 통하여 최종 결정하였으며 선정된 폴리우레탄을 충전하기 위하여 Resin Transfer Molding(RTM) 방법을 사용하였다. 충전 공정의 적용여부를 판단하기 위하여 아크릴을 이용한 RTM치구를 설계, 제작하여 시험하였다. 충전된 조립체는 비파괴 검사를 통하여 접착, 기공 등을 검사하였으며 지상연소시험을 통하여 내열성능을 평가하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.190.1-190.1
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• 2016

봉공처리법은 다공성 알루미나를 제조 후에 내마모성의 증가, 침지된 염료의 봉인 등을 필요로 하여 이용하는 후처리 공정 중 하나이다. 상업적으로는 물 봉공처리나 니켈-아세트산 용액을 이용한 봉공처리를 주로 이용하지만 고온을 필요로 하거나 인체에 유독한 용액을 사용, 혹은 추가적인 봉공처리를 해주어야 한다는 단점들을 가지고 있다. 이에 본 연구에서는 독성이 적고 상온에서도 다공성 알루미나와 쉽게 반응할 수 있는 알루미늄 음이온 용액을 봉공처리에 이용하였다. 알루미늄 음이온 용액을 이용한 봉공처리는 알루미늄의 양극 산화를 진행한 이후에 알루미늄 음이온을 포함한 봉공처리제를 제조 후, 침지 처리하는 방식으로 봉공처리하였다. 봉공처리제의 pH 변화, 온도 변화, 침지 시간 등의 변수 요소에 따라서 최적화를 진행하였으며, 이 용액으로 봉공처리가 가능한지 주사 전자 현미경 분석을 통해 평가하였다. 이후 최적화된 조건과 기존에 상업적으로 사용하던 봉공처리법을 거친 후에 경도, 부식전위 검사, 내화학성 검사를 통해 성능의 변화를 확인하였으며 광전자 분광기를 통해 성분과 메카니즘을 예측하였다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.5-9
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• 2006

공초점 주사 현미경(Confocal Scanning Microscope, CSM)은 Bio-cell 및 특정 형태를 가지는 object의 고분해능 3차원 영상복원이 가능하여 3차원 측정장비로 주로 사용된다. 특히 LCD 패널 및 반도체 웨이퍼의 불량 검사 장비로의 활용이 가능하여 3차원 영상으로부터 불량 여부와 원인을 알아낼 수 있다. 하지만 생산 공정에서 불량 검사를 하기 위해서는 고속, 고품질의 성능이 요구된다. 따라서 이 논문에서는 공초점 주사 현미경을 이용하여 고분해능으로 고속, 고품질의 3차원 영상복원을 할 때 어떠한 조건이 요구되는지 알아보고 시뮬레이션 하도록 하겠다.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.2
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• pp.37-47
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• 1996

This paper presents an automatic tele-inspection scheme for the remotely manufacturing process. The remote-manufacturing process is continuously monitored and a crucial process is captured by CCD Camera. The captured image is compressed by neural network and JPEG, and it is sent directly to the assembly plant for incoming inspection. Massive image data require broadband channel to transmit them to remote distance, but sender is able to transmit them to receiver in use common channel by compressing massive image data in the high ratio. After the receiver reconstructs the compressed image to be transmitted, the reconstructed image is also directly used for automatic inspection of the process. The Experimental results show that the proposed inspection mechanism could be effectively implemented for real applications.