• Title/Summary/Keyword: 공압 제진 장치

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An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing (반도체 생산에서 진동 제어를 위한 전자기 에어 스프링)

  • Kim, Hyung-Tae;Kim, Cheol-Ho;Lee, Kang-Won;Lee, Gyu-Seop;Son, Sung-Wan
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.20 no.12
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    • pp.1128-1138
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    • 2010
  • One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

Configuration and Design of the Large Multi-Electromagnetic Shaking System (대형 멀티 전자기 가진 시스템의 구성 및 설계)

  • 우성현;김홍배;문상무;김영기;임종민
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.05a
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    • pp.618-622
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    • 2004
  • The vibration test system of SITC(Satellite Integration and Test Center) at KARI(Korea Aerospace Research Institute) has been used successfully for the environmental tests of a majority of korean space programs, such as KOMPSAT, Koreasat KITSAT, STSAT and KSR program since 1996. To meet the recent needs of large size test facility available for the vibrational tests of the huge launch vehicles and tole-communication satellites which will be developed in the near future, KARI undertook to construct the large size multi-electromagnetic shaking system with 3 $\times$ 3m head expander system. The new system will consist of three electromagnetic shakers which has 160 kN thrust force individually, and be able te sustain up to 8 tons test load and 300 kNm overturing moment. And to avoid the tremendous cost and effort to furnish the seismic block with large size and weight, it will adopt a Lin-E-Air type configuration with which the seismic block is less severe than a Solid-Truninon type. In addition, to fulfill the strong requirement of high overturning moment the additional guidance system including a central bearing system on a central support and several pad bearings around the head expander body is now considered. This paper describes the configuration and the design parameters of the multi-shaking system which is under development by KARI's engineers.

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