• 한국소음진동공학회논문집
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• 제17권1호
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• pp.72-79
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• 2007

정밀 장비 운전시 지반진동 절연을 목적으로 널리 사용되는 공압제진대는 정밀 장비에서 요구하는 지반진동 규제의 강화에 따라 보다 개선된 절연성능을 요구받는다. 수동형 공압제진대의 경우, 제진대의 설계 변수들을 이용하여 그 성능을 개선하고 있으나, 제진대의 고유진동수 및 그 부근에서의 절연 성능 향상에는 한계가 있다. 이 연구에서는 진폭 의존성 등의 비선형성을 가지는 공압제진대에 대하여 비선형 강인성 능동제어이론인 시간지연 제어 기법을 적용하여 고유진동수 및 그 부근에서의 절연성능을 향상시키고자 한다. 공압제진대에 시간지연 제어기법을 적용하는 과정 및 능동제어 이론 적용에 따른 절연 성능 향상에 대한 모사실험 결과를 기술하고자 하며, 실험을 통하여 그 유효성 보이고자 한다.

• 한국소음진동공학회논문집
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• 제21권9호
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.903-908
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• 2006

As environmental vibration requirements on precision equipment become more stringent. use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the time delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

• 한국소음진동공학회논문집
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• 제16권11호
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• pp.1100-1107
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• 2006

As environmental vibration requirements on precision equipment become more stringent, use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by chamber volume. In this study, transmissibility behavior of the pneumatic isolators depending on frequency and dynamic amplitude are presented. Then, an active control technique, time delay control, which is adequate for a low frequency nonlinear system, is applied. A procedure of applying the time delay control law to a pneumatic isolator is presented and it's effectiveness in the transmissibility performance is shown. Comparison between passive and active pneumatic isolators is made based on simulation.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.837-843
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• 2006

As environmental vibration requirements on precision equipment become more stringent, use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by chamber volume. In this study, transmissibility behavior of the pneumatic isolators depending on frequency and dynamic amplitude are presented. Then, an active control technique, time delay control, which is adequate for a low frequency nonlinear system, is applied. A procedure of applying the time delay control law to a pneumatic isolator is presented and it's effectiveness in the transmissibility performance is shown. Comparison between passive and active pneumatic isolators is made based on simulation.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.97-102
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

• 한국소음진동공학회논문집
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• 제17권6호
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• pp.515-523
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration Isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

• 한국소음진동공학회논문집
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• 제18권4호
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• pp.411-423
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• 2008

Pneumatic vibration isolator has a wide application for ground-vibration isolation of vibration-sensitive equipments. Recent advances In precision machine tools and instruments such as nano-technology or medical devices require a better isolation performance, which can be efficiently done by precise modeling- and design- of the isolation system. This paper will discuss an efficient transmissibility design method for pneumatic vibration isolator by employing the complex stiffness model of dual-chamber pneumatic spring developed in our previous research. Three design parameters of volume ratio between the two pneumatic chambers, the geometry of capillary tube connecting the two pneumatic chambers and finally the stiffness of diaphragm necessarily employed for prevention of air leakage were found to be important factors in transmissibility design. Based on design technique that maximizes damping of dual-chamber pneumatic spring, trade-off among the resonance frequency of transmissibility, peak transmissibility and transmissibility in high frequency range was found, which was not ever stated in previous researches. Furthermore this paper will discuss about negative role of diaphragm in transmissibility design. Then the design method proposed in this paper will be illustrated through experiment at measurements.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 추계학술대회 논문집
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• pp.114-115
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.619-620
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• 2012