• Proceedings of the KAIS Fall Conference
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• 2005.05a
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• pp.132-135
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• 2005

본 연구에서는 반도체 제조 공정에 이용되는 가스의 흐름을 감지하고 제어하는 장치를 제안하였다 압력센서를 MFC(Mass Flow Controller)에 의해 제어되는 다음 단의 파이널밸브(Final Valve)와 챔버사이의 가스관에 부착시켜, 이 압력센서의 신호와 공압밸브의 동작 신호를 디지털 회로를 이용하여 실시간으로 제어하도록 하였다. 이로써 반도체 제조 공정 중에 발생할 수 있는 2차 소성물로 인한 가스의 흐름 제어와 관련된 시스템 고장을 LED를 통해 실시간으로 확인 가능하다. 또한 가스누출고장발생 시 반도체 제조 공정의 프로세스를 중단시켜 장비의 손상 및 안전사고를 예방하는 기능도 있다. 본 연구에서 개발된 모듈을 이용함으로써 가스밸브의 오동작에 의한 반도체/디스플레이 제조장비의 신뢰성 향상을 기할 수 있다.

• 한국전산유체공학회:학술대회논문집
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• 2011.05a
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• pp.605-607
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• 2011

A Study on the flow-structure characteristics of a 3/2 way pneumatic valve is essential for optimizing the performance of ship engines. It is important for the valve to have desirable safety factor am reduced weight from the safety and economic point of view. In this study, we capture flow-structure characteristics of 3/2 way pneumatic valve. This is optimized based on the proper design criteria. The air at a pressure of 30 bar is the working fluid which is made to fill in the tack in short time. This time is defined as the filling time. The flow and structure analysis is performed for three cases under maximum stress and safety factor. In optimum design, considering the flow-structure characteristics, we model twenty seven cases by using DOE(design of experiments) method Here, analysis for each cases is performed and then metamodels are created We obtain optimized parameters and then analysis is repeated to compare with the initial model. Finally, the feasibility of the optimum design is verified.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.2
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• pp.81-90
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• 2013

A study on the flow-structure characteristics of marine 3/2WAY pneumatic valve is essential for optimizing the performance of ship engines. It is important that the valve has desirable safety factor and reduced weight from safety and economic point of view. In this paper, flow-structure characteristics of pneumatic valve is obtained by being optimized based on the proper design criteria. The air with the pressure of 30 bar is the working fluid which is made to fill in the tack in short time. This time is defined as the filling time. On optimum design by considering the flow-structure characteristics, the approach is based on (1) the mathematical formulation of design decisions using the compromise decision-making method, and (2) the approximation technique of response surfaces. The methodology is demonstrated as the multi-objective optimization tool to improve the performance of marine 3/2WAY pneumatic valve.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.2
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• pp.128-134
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• 2013

A 2-way solenoid valve regulates to maintain the pressure of ullage volume of propellant tanks when the command is given by control system for the liquid-propellant feeding system of space launch vehicle. The simulation model of solenoid valve for pressurization is designed with AMESim to verify the designs and evaluate the dynamic characteristics and pneumatic behaviors of valve. To improve the accuracy of the model, numerical flow analysis by using FLUNET code. The simulation results of their operating durations of valve by AMESim analysis are matched up with the results of experiments and validate valve model. Using the model, we analyze performance of valve; opening/closing pressure, operating time on various design factors of basic valve and control valve; geometrical size of valve seat, ratio of basic valve and sealing area.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.812-818
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• 2009

A MOV(Main Oxidizer shutoff Valve) controls the flow rate of liquid oxygen into the rocket combustor by opening and shutting operations piloted by a pneumatic force. In order to improve the effective design for sealing parts of poppet and piston assemblies, the poppet assembly has been designed to be just contacted with the piston assembly. However, to avoid a gap at the poppet/piston contact surface and to evaluate the MOV operating performance, an analyze on the force balance during the closing motion have been performed. For the accuracy of the analysis, the friction forces and the hydraulic forces have been respectively obtained by experiments and CFD analysis. Through the analysis, some important design parameters such as the spring constant, poppet friction and orifice size in the force balance have been introduced and the required operation performance of the MOV has been proved feasible.

• 대한공업교육학회지
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• v.31 no.1
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• pp.211-225
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• 2006

Gabion can be used for the purpose of preventing overflow of river and side loss of road. However the manufacturing process of the gabion is manually controlled especially to the joining process at the terminal part of gabion with small diameter wire. In this paper automatic feeding guide system was designed and fabricated to make automation. The fabricated system was tested in the factory level. Pneumatic system was considered as the main idea of the feeding system. 3/2-way and 5/2-way manual control valve, eight double-acting cylinders were used. The system took 46.48 seconds during a cycle. Additional environmental noise and vibration were not detected when the machine operated at the working area. Based on the theoretical simulation and actual test the fabricated system was well controlled. The system was applied to the patent in 2006.

• Journal of the Korean Institute of Gas
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• v.12 no.3
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• pp.64-67
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• 2008

The valve applied air pressure type of high pressure packing is developed to prolong the lifetime and to enhance the airtight. The effective valve developed enables to get remove the remaining pressure through the part of valve in handle so that a separate valve to drain is no need. The character of valve developed in this experiment is high packing of valve through special form and having drain hole in stem that enables a drainage regardless the status of vale is closed or opened.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.488-491
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• 1997

In this paper, a ncw control 'ialvc which can misc air-iraksge pneumatically and compensate pressure drop for an alrho~ st system uas proposed A new control valve called "Pneuniatic C70ntro1 Valve (PCV)" functions as a control valve to compcns;ltc prcssure in thc casc of air-leakage. by using the pure pneummatic control ofpilot pressure. Based on the sirnulation of the proposed PCY, thc experimental system was fabricaied su as to illustrate the efficient pcrformance of the proposed PCV with anti-leakage. Such good perfo~manccs of PCV in the air-hoist system are shown by the simulation. In addition, the simulation bascd design approach presented in this paper can be applied to any hydraulic or pneumatic-hydraulic system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.836-839
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• 2003

A pneumatic servo valve which is widely applied in industrial field. And It is consist of force motor, spool ＆ sleeve and servo controller. In this study. we developed the force motor which is consume to low power for a pneumatic servo valve. We could reduce the number of turn of the solenoid by using ferromagnetic permanent magnet and took different direction of each other using one coil instead of two coil. we modeled a system consisting of various electro-mechanical subsystems. The appropriateness of the model was verified by simulation. The simulation model resolved the motion of spool, the winding current and the magnetic force. Also, we calculated the displacement and velocity of the spool, flux contour line, b vector. flux density. flux linkage, back EMF etc.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.8
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• pp.86-93
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• 2003

The development of a fast, accurate, and inexpensive position-controlled pneumatic actuator that may be applied to a variety of practical positioning applications with various external loads is described in this paper. A novel modified pulse width modulation (MPWM) valve pulsing algorithm allows on/off solenoid valves to be used in place of costly servo valves. A comparison between the system response of standard PWM technique and that of the novel modified PWM technique shows that the control performance is significantly increased. A state feedback controller with position, velocity and acceleration feedback is successfully implemented as the continuous controller. Switching algorithm of control parameter using learning vector quantization neural network (LVQNN) is newly proposed, which estimates the external loads of the pneumatic actuator. The effectiveness of the proposed control algorithms are demonstrated through experiments with various loads.