• Tribology and Lubricants
• /
• 제25권5호
• /
• pp.292-297
• /
• 2009

Air foil thrust bearings are the critical components available on high-efficiency turbomachinery which need an ability to endure the large axial force. Air foil bearings are self-acting hydrodynamic bearings that use ambient air as their lubricant. Since the air is squeezed by the edge of compliance-surface of bearing, hydrodynamic force is generated. In this study, we measured the air film thickness and obtained the minimum film thickness experimentally. To increase the maximum load capacity, compliance of sub-structure was controlled. From numerical analyses, it is seen that, if the air film thickness is distributed more uniformly by variable compliance, the thrust bearings can take more axial load.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집C
• /
• pp.316-321
• /
• 2001

The optical storage device has recently experienced significant improvement, especially for the aspects of high capacity and fast transfer rate. However, it is necessary to study a new shape of air bearing surface for the rotary type actuator because the optical storage device has the lower access time than that of HDD (Hard Disk Drives). In this study, we proposed the air bearing shape by using SA (Simulated Annealing) algorithm which is very effective to achieve the global optimum instead of many local optimums. The objective of optimization is to minimize the deviation in flying height from a target value 100nm. In addition, the pitch and roll angle should be maintained within the operation limits.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1555-1558
• /
• 2005

In this study, we measured cylindricity and Runout of the air bearing spindle, and tested PCB(printed circuit boards) drilling with 0.4mm micro drill at 90,000rpm and 110,000rpm in order to obtain drilling hole error. Results are as follows; The air bearing spindle's Runout was not so high within $10\mu{m}$ from 20,000rpm to 80,000rpm but it grew after 80,000rpm. Drilling hole size error was 9% at 80,000rpm and 12% at 110,000rpm because of spindle's Run out. Drilled hole shape falsified more 110,000rpm than 90,000rpm.

• 대한기계학회논문집A
• /
• 제25권9호
• /
• pp.1391-1399
• /
• 2001

The AE measurement is one of the most convenient methods for detecting contacts between the slider and the disk. The AE method has been widely used in the investigation of the tribology of sliding interfaces due to its convenience. We examined the relationship between the AE signal and the flying height of a slider. We investigated the influence of the disk linear velocity on the AE rms signal by using the AE measurement system. The experiment also gives the relationship between the take-off velocity and the disk surface conditions. To investigate the behavior of the slider further, the variances of the AE signals are analyzed. The experimental results indicate that the increase in the magnitude of the AE rms signal does not necessarily mean the slider/disk contacts.

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
• /
• pp.145-149
• /
• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 추계학술대회 논문집
• /
• pp.97-101
• /
• 2000

The AE measurement is one of the most convenient methods for detecting contacts between slider disk. The AE method has been widely used in the investigation of the tribology of sliding interfaces due to the convenience of using AE sensor. In this study, we examined the relationship between the AE signal and the flying height of a slider. We tried to know the influence of the disk velocity on the AE rms signal by using the AE measurement system. The experiment also gives the relationship between the take-off velocity and the disk surface state. To investigate the behavior of the slider further, the variances of the AE signal are analyzed. The results about a subambient pressure slider indicate that the increase in the magnitude of AE rms signal does not necessarily mean the slider/disk contacts.

• 한국정밀공학회지
• /
• 제24권8호통권197호
• /
• pp.89-96
• /
• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• 한국소음진동공학회논문집
• /
• 제14권11호
• /
• pp.1059-1065
• /
• 2004

In this paper, the dynamic characteristic analysis of carriage structure supported by air bearings were performed. Toward this end, the characteristics of air bearing were numerically analyzed to estimate the stiffness of the air bearing and the clearance between air bearing and guide surface. The modal analysis of the carriage structure was performed by using finite element method, and the experimental modal analysis was also performed to validate the finite element model, where rigid body modes were compared to validate the stiffness of the air bearings. From the results, the air spring stiffness can be estimated within the range of acceptable accuracy under any pressure and clearance condition.

• 대한기계학회논문집A
• /
• 제20권8호
• /
• pp.2501-2507
• /
• 1996

In this paper actively controlled air bearing is investigated to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled air beairng is composed of an air bearing, a gap sensor, a controller, and a piezo actuator. By controlling the position of air bearing with piezo actuator, the position of floating object is controlled. In this study the proportional-Integral-Derivative controller is employed. Active air bearing is investigated numerically and experimentally. There is good agreement between the simulation and the experimental results. It is shown that the stiffness and damping characteristics and positioning experimental results. It is shown that the stiffness and damping characteristics and positioning accuracy of air bearing can be improved by means of adopting actively controlled air bearing.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2009년도 추계학술대회 논문집
• /
• pp.73-74
• /
• 2009