• Title/Summary/Keyword: 고주파 유도로

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A Measurements on the Characteristics of Electron Energy Distribution Function of Radio-Frequency Inductively Couples Plasma (고주파 유도결합 플라즈마의 전자에너지 분포함수 계측에 관한 연구)

  • 하장호;전용우;최상태;박원주;이광식
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.13 no.4
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    • pp.82-86
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    • 1999
  • Electron Energy Distribution Function(EEDF) were treasured In Radio-Frequency Inductively Coupled Plasma(RFlCP) using a probe rrethocl Measurerrents were conducted in argon discharge for pressure from 10[mTorr] to 4O[mTorr] and input rf power from 100[W] to 600[W] and flow rate from 3[sccm] to 12[sccm]. Spatial distribution of electron energy distribution function were measured for discharge with same aspoct ratio (R/L=2). Electron energy distribution function strongly depended on both pressure and power. Electron energy distribution function increased with increasing flow rate. Radial distribution of the electron energy distribution function were peaked in the plasma center. Normal distribution of the electron energy distribution function were peaked in the center between quartz plate and substrate. From the results, we can find out the generation mechanism of Radio Frequency Inductively Coupled Plasma. And these results contribute the application of a simple Inductively Coupled Plasma(ICP).a(ICP).

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Improvement of Weldlines of an Injection Molded Part with the Aid of High-Frequency Induction Heating (고주파 유도가열을 적용한 사출성형품의 웰드라인 개선)

  • Seo, Young-Soo;Son, Dong-Hwi;Park, Keun
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.10a
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    • pp.437-440
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    • 2009
  • High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact manner. Thanks to its capability of rapid heating and cooling of mold surface, it has been recently applied to the injection molding. The present study applies the high-frequency induction heating for elimination of weldlines in an injection-molded plastic part. To eliminate weldlines, the mold temperature of the corresponding weld locations should be maintained higher than the glass transition temperature of the resin material. Through experiments, the maximum temperature of $143^{\circ}C$ is obtained on the mold surface around the elliptic coil, while the temperature of the mold plate is lower than $60^{\circ}C$. An injection molding experiment is then performed with the aid of induction heating, and the effect of induction heating conditions on the surface appearance of the weldline is investigated.

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