• Proceedings of the Korean Radioactive Waste Society Conference
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• 2015.10a
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• pp.25-26
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• 2015

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2016.05a
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• pp.51-52
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• 2016

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2015.10a
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• pp.75-76
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• 2015

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2011.10a
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• pp.91-92
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• 2011

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2011.10a
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• pp.173-174
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• 2011

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2012.05a
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• pp.59-60
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• 2012

• Journal of the Microelectronics and Packaging Society
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• v.8 no.3
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• pp.31-36
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• 2001

Dielectric material which is suitably designed for the application of the high-temperature electrostatic chucks(HTESCS) has been developed. Electrical resistivities and dielectric constants of the dielectric layer satisfy the demands for the proper operation of HTESC, and coefficient of thermal expansion(CTE) of the dielectric material matches well that of the bottom insulator so that it secures stable structure. In order to minimize particle contaminations, borosilicate glass(BSG) is selected as a bonding layer between dielectric layer and bottom insulator, and silver is used as a electrode. BSG is solidly bonded between upper dielectric and bottom insulator, and no diffusions or reactions are observed among silver electrode, dielectric, and glass layers. The chucking characteristics of the fabricated HTESC are found to be superior to those of the commercialized one.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.1
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• pp.49-52
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• 2002

This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. Glass coating on the stainless steel substrate was 125 $\mu\textrm{m}$ thick. The adhesion of glass coating was found to be excellent such that it was able to withstand temperature cycling to over $300^{\circ}C$ without cracking and delamination. The electrostatic clamping pressure generally followed the theoretical voltage-squared curve except at elevated temperatures and high applied voltages. The deviations at elevated temperatures and high applied voltages are due to increased leakage current as the electrical resistivity of glass coating drops.

• Horticultural Science & Technology
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• v.33 no.6
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• pp.860-868
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• 2015

The effect of Si supplied during plant cultivation on tolerance to high temperature stress in Euphorbia pulcherrima Willd. 'Ichiban' was investigated. Rooted cuttings were transplanted into 10-cm pots and a complete nutrient solution, containing 0 or $50mg{\cdot}L^{-1}$ Si as either $K_2SiO_3$, $Na_2SiO_3$, or $CaSiO_3$, was supplied through subirrigation or weekly foliar applications. After two months of cultivation, plants were placed in an environment-controlled chamber and subjected to $35{\pm}1^{\circ}C$ (high temperature) conditions for 18 days. Enhanced specific activities of enzymatic antioxidants (APX) and suppressed specific activities of non-enzymatic antioxidants (ELP) were observed in the high temperature-stressed plants with Si application. The Fv/Fm (maximum quantum yield of photosystem II), photosynthetic rate, and Si contents in the shoot increased in the treatments of $K_2SiO_3$ and $Na_2SiO_3$ supplied through subirrigation. The Si-treated plants had more tolerance of high temperature stress than the control plants. Of the Si sources and application methods tested, $K_2SiO_3$ and $Na_2SiO_3$ supplied through subirrigation were found to be the most effective in enhancing tolerance to high temperature stress.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.8 no.1
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• pp.33-39
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• 2010

The electrolytic reduction of a spent oxide fuel involves a liberation of the oxygen in a molten LiCl electrolyte, which results in a chemically aggressive environment that is too corrosive for typical structural materials. Accordingly, it is essential to choose the optimum material for the processing equipment that handles the high molten salt. In this study, hot corrosion studies were performed on bare as well as coated superalloy specimens after exposure to lithium molten salt at $675^{\circ}C$ for 216 h under an oxidizing atmosphere. The IN713LC superalloy specimens were sprayed with an aluminized NiCrAlY bond coat and then with an $Y_2O_3$ top coat. The bare superalloy reveals an obvious weight loss due to spalling of the scale by the rapid scale growth and thermal stress. The chemical and thermal stability of the top coat has been found to be beneficial for increasing to the corrosion resistance of the structural materials for handling high temperature lithium molten salts.