• 대한기계학회논문집A
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• 제28권12호
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• pp.1871-1876
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• 2004

We demonstrate a novel fabrication technology for the microneedle array that can be used in the medical test field, which is transdermal drug delivery and blood analyte sampling. Previous researchers have used silicon-processed micromachining, a reactive ion etching, and molding techniques for the fabrication of microneedle array. However, these fabrication techniques have somewhat limitations apply to the microneedle array fabrication according to its application. Inclined LIGA process is suggested to overcome these problems. This process provides easier, sharper and longer out-of-plane microneedle array structure than conventional silicon-processed fabrication method did. Additionally, because of the advantage of the LIGA process based on mold fabrication for mass production, the polymer, PMMA(PolyMethylMethAcrylate), based microneedle array is useful as the mold base of nickel electroplating process; on the other hand, silicon-processed microneedle array is used in itself. In this research, we fabricate different types of out-of-plane microneedle array, which have different shape of tip, base and hole structure, using the inclined LIGA process. The fabricated microneedles have proper mechanical strength, height and sharpness to puncture human hand epidermis or dermis with less pain and without needle tip break during penetrating the skin.

• 한국정밀공학회지
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• 제17권8호
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• pp.172-179
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• 2000

In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ${\mu}m$ length mirror-like three side-facets inclined to the base at 45$^{\circ}$ and knife edges. Two regular triangles of 45$^{\circ}$ and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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• pp.581-582
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• 2000

본 논문에서는 적외선과 같이 주파수가 Tera Hz 영역인 극초고주파에서 사용할 수 있는 Horn형 안테나의 제조를 위한 독창적인 방법을 제시하고 실험적인 검증을 하였다. 파장이 $10{\mu}m$ 부근인 전자기파에 대응될 수 있는 안테나의 구조에 대한 시뮬레이션을 하였으며 이를 기준으로 안테나 어레이를 제조하기 위한 기초실험을 하였다. 기존에 사용되던 LIGA-like 공정과는 대조적으로 Columnar illumination 방법을 사용하였으며 $300{\mu}m$ 두께의 SU-8에 대하여 수직벽을 제조할 수 있었고 기판 위치에 일정한 각도를 줌으로서 경사면을 갖는 구조를 제조하였으며 기판을 회전시킴으로서 원뿔형의 Horn형 안테나 어레이를 제조할 수 있는 방안을 제시하였다.