• Journal of the Korean Society of Costume
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• v.47
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• pp.89-100
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• 1999

This study was carried to a textile conservation process included washing effect fiber analysis such as fiber identification fabric density and thickness color fading and of extracted soils. the following results were obtained. 1. AS a result of investigating to fabric surfaces by S.E.M all of cleaning methods wet cleaning-solvent cleaning in charge system were effective to remove soils from fabrics. 2. The buried fabrics were made of silk few of them were cotton ramie and hemp. 3. According to fabric density and thickness used fabrics were almost medium weight fabrics. 4. Low values of L, a, b indicated that the colors of these fabrics were faded to yellow and brown. 5. The soil components were hydrocarbon-alkane group alkyl alcohol and ketone group.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2008.10a
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• pp.575-578
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• 2008

본 연구는 LCD 용 비정질 실리콘 박막 트랜지스터의 제조공정중 가장 중요한 식각 공정에서 각 박막의 특성에 맞는 습식 및 건식식각공정을 개발하여 소자의 특성을 안정시키고자 한다. 본 연구의 수소화 된 비정질 실리콘 박막 트랜지스터는 Inverted Staggered 형태로 게이트 전극이 하부에 있다. 실험 방법은 게이트전극, 절연층, 전도층, 에치스토퍼 및 포토레지스터 층을 연속 증착한다. 스토퍼층을 게이트 전극의 패턴으로 남기고, 그 위에 $n^+$a-Si:H 층 및 NPR(Negative Photo Resister)을 형성시킨다. 상부 게이트 전극과 반대의 패턴으로 NPR층을 패터닝하여 그것을 마스크로 상부 $n^+$a-Si:H 층을 식각하고, 남아있는 NPR층을 제거한다. 그 위에 Cr층을 증착한 후 패터닝하여 소오스-드레인 전극을 위한 Cr층을 형성시켜 박막 트랜지스터를 제조한다. 여기서 각 박막의 패터닝은 식각 공정으로 각 단위 박막의 특성에 맞는 건식 및 습식식각 공정이 필요하다. 제조한 박막 트랜지스터에서 가장 흔히 발생되는 문제는 주로 식각 공정시 over 및 under etching 이며, 정확한 식각을 위하여 각 박막에 맞는 식각공정을 개발하여 소자의 최적 특성을 제공하고자한다. 이와 같이 공정에 보다 엄격한 기준의 건식 및 습식식각 공정 그리고 세척 등의 처리공정을 정밀하게 실시하여 소자의 특성을 확실히 개선 할 수 있었다.

• Journal of the Korean Society of Costume
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• v.65 no.7
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• pp.47-59
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• 2015

This paper studies the conservation treatment of Lady Shim's costume, which was excavated in Jecheon Province in 2012. There were the significant problems, which were encountered in the treatment of the costume ; First the Jeogoris were transformed during the excavation, Second fibers were seriously deteriorated, Third most of the fabrics such as Chusa were readily deformed. To overcome these problems and to secure stability in the conservation treatment, we decided to alternate between two different washing methods ; dry cleaning by n-hexane and wet cleaning by water. The costume shape was recovered by steaming and by swelling with Hanji(Korean traditional paper). The combined cleaning method proved to be relatively efficient and stable. In addition, the shape of Chusa was well preserved by dry cleaning.(using n-hexane also solved the problem of bad smell after washing with organic solvents.) The effects of the conservation treatment on the excavated costumes could be seen in the change of Lab color difference. Washing made the distribution of Lab color difference narrower, which may suggest that the impurities on the fiber was removed by washing. In addition, the value of L was greater than a-value and b-value after the treatment. This result indicates that the change of value represents the change of color difference by cleaning.

• Proceedings of the KSR Conference
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• 2009.05a
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• pp.1525-1529
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• 2009

Washed ballast is used on paved track to earn the high quality track performance. But, the water washing system caused the several environment problems such as the noise, dust and water pollution. Even if the washing is performed, it is difficult to earn the high quality because of the low efficiency of the water washing system. So, we developed the dry cleaning type machine to solve these problems. This machine excludes using the water completely. Especially, it is possible to organize on the conventional ballast cleaning train set.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.7
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• pp.1393-1398
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• 2009

Conventionally, etching is first considered for microelectronics fabrication process and is specially important in process of a-Si:H thin film transistor for LCD. In this paper, we stabilize properties of device by development of wet and dry etching process. The a-Si:H TFTs of this paper is inverted staggered type. The gate electrode is lower part. The gate electrode is formed by patterning with length of 8 ${\mu}$m${\sim}$16 ${\mu}$m and width of 80${\sim}$200 ${\mu}$m after depositing with gate electrode (Cr) 1500 ${\AA}$under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photo resistor on gate electrode in sequence, respectively. The thickness of these thin films is formed with a-SiN:H (2000 ${\mu}$m), a-Si:H(2000 ${\mu}$m) and n+a-Si:H (500 ${\mu}$m), We have deposited n-a-Si:H, NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the n+a-Si:H layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. In the fabricated TFT, the most frequent problems are over and under etching in etching process. We were able to improve properties of device by strict criterion on wet, dry etching and cleaning process.

• Journal of Conservation Science
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• v.16 s.16
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• pp.39-51
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• 2004

The standing Buddha named Taehwa 4 yew in the Jincheon were sculptured with rock cliff of the dark grey shale. Front of the Buddha statue shows $N40^{\circ}W$ strike with nearly vertical dip toward the back side. Rock blocks of the Buddha statue well developed with bedding and laminations whereas rock surface distributed into the various irregular discontinuities. Sculptured lines of the Buddha were uncertain because of degradation and exfoliations on the rock surface. The surface near the Buddha statue is highly contaminated with lichen and mosses, and accelerate physical and biological weathering owing to the roots of weed and bush along the fracture systems. For the conservational treatment, we treated with primary wet cleaning by air gun and secondary cleaning treatment using distilled water. Separated rock surface and fractured parts fasten and/or fill up the boundaries of the rock blocks using epoxy resin for conservation of rock properties. Some brittle surface was treatment with water repellent consolidant of ethyl silicates, and heterogeneous surface carried out color matching by acrylic pigments. Upper part of the Buddha statue dig out small ditch for rain water drainage, and near surface of the Buddha statue treat removal works for lichen, weeds and bush. The duration capacity of the Buddha constituting rocks are degraded by various weathering factors, therefore we suggest that this Buddha statue have need to do long term monitoring and synthetic conservation researches.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2005.10a
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• pp.97-106
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• 2005

현재 우리나라에서만 연간 약 26만들이 발생되고 있는 농업용 폐비닐은 재생원료로 재활용되어지면 국내외에서 그 용도가 매우 많으나 멀칭용으로 사용되었던 폐비닐은 그 오염도가 워낙 심하여 쉽게 재활용할 수 없는 처지이다. 즉 공급과 수요는 많으나 재생기술의 한계가 병목으로 작용하고 있는 현실이다. 따라서 간단하고 경제적인 방법으로 재활용할 수 있는 습식 및 건식 재생기술의 개발이 계속되어 요구되어 왔다. 강제 세척, 회전분리, 열풍 건조 및 압착성형을 이용한 새로운 간이습식공정을 통하여 멀칭용 농업용 폐비닐을 순도 95% 이상의 탄화 및 열화가 적은 압착 펠렛을 경제적으로 제조할 수 있었다. 이들의 재생 수지는 인장강도 $168.6{\pm}3.9kgf/cm^2$, 파단신을 315.8%, 인장탄성을 $2,551.8{\pm}50.1kgf/cm^2$, 굴곡강도와 굴곡탄성을 $166.7{\pm}7.4kgf/cm^2,\;5,716.2{\pm}242.2kgf/cm^2$ 그리고 충격강도는 $49.2kgf\;cm/cm$을 각각 보여 연질수지로써 기능하기 위한 충분한 성능을 보유하고 있음을 알 수 있었다. 또한 이들의 응용분야 확대를 위하여 fly ash 및 탄산칼슘을 배합하여 이들의 물성변화를 살폈다.

• Journal of Conservation Science
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• v.29 no.1
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• pp.1-14
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• 2013

The Hongjimun Ogansumun (Five-arched floodgates) is composed mainly of biotite granite, pink feldspar granite and granodiorite that are very similar with granitic rocks around the Seoul. Main damage in the floodgates was gray, yellow and predominantly white discoloration on the surface of stone blocks. All floodgates showed more discoloration in the wall than ceiling, and there were growing stalactite on the ceiling. Scientific analyses determined that the white discoloring substrates were mainly calcite. Therefore, conservation treatment was carried out to remove the substrates by using dry cleaning, high pressure cleaning and chemicals. The floodgates have been restored to good state, but it is still significantly necessary to install drainage on the top of the gates.

• Korean Chemical Engineering Research
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• v.43 no.1
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• pp.76-79
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• 2005

Dry etching of NiFe, NiFeCo, and Ta for magnetic random access memory (MRAM) by inductively coupled plasmas (ICPs) of $Cl_2/Ar$ has been carried out. NiFe and NiFeCo showed maximum etch rates at a particular ICP source power, but the etch rate of Ta increased with the ICP source power. The etch rates of the magnetic thin films increased with the RF chuck power, but decreased with the operating pressure and the $Cl_2$ concentration. To avoid a corrosion problem by chlorine, the etched samples were rinsed with de-ionized water for 5 minutes after etching. The etch profile showed a clean and smooth surface at 50% $Cl_2$ concentration.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.469-469
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• 2011

고효율 염료감응형 태양전지(DSSC, Dye-Sensitized Solar Cell)의 구현을 위해서 유용한 방법중 하나는 정렬된 기공 (pore)을 $TiO_2$막 내에 형성시키는 것이다. 메조포러스 (mesoporous) $TiO_2$막은 dip coating이나 spin coating과 같은 방법으로 주로 증착되고 있으며, P123이나 F127과 같은 amphiphilic triblock copolymer를 메조포러스 구조를 만들기 위한 뼈대로 사용하고 있다. 또한, 이렇게 생성된 구조에서 amphiphilic triblock copolymer는 열처리 공정을 통하여 쉽게 제거될 수 있다. 고효율 태양전지를 구현하는 또 다른 방법으로는 패턴 된 기판을 사용하는 것이다. 패턴 된 기판은 빛의 반사를 억제하여 흡수율을 높이는 역할을 한다. 그러나 패턴 된 기판 위에서 메조포러스 $TiO_2$막의 형성에 관한 연구는 부족한 실정이다. 본 연구에서는 spin coating 방법으로 패턴 된 Si (111) 기판 위에 메조포러스 $TiO_2$를 성장하고 그 미세구조를 분석하였다. 패턴 된 기판은 nanosphere lithography(NSL) 법으로 mask를 증착한 후 건식 식각 (dry etching) 공정을 통해서 제작되었으며, 마스크와 불순물 등 은 초음파 세척 등으로 제거되었다. 메조포러스 $TiO_2$막은 1-propanol, P123, titanium isopropoxide와 HCl을 섞어 만든 용액으로 1 cm${\times}$1 cm 기판 위에 3000 rpm과 4000 rpm으로 각각 증착하였으며, 5일 동안 4도에서 에이징한 후 350도에서 3시간 열처리하였다. 이렇게 형성한 메조포러스 막의 형상과 미세구조적 특성이 주사전자현미경(SEM, scanning electron microscope), X-선 회절(XRD, X-ray diffraction) 등을 이용하여 연구되었다. 특히, 증착 조건에 따른 메조포러스 $TiO_2$박막의 형성 기구에 관한 고찰이 진행되었다. 나아가, $TiO_2$박막과 패턴 사이에 형성되는 계면 구조에 관한 연구를 투과전자현미경을 이용하여 진행하였다.