Dry Etching of NiFe, NiFeCo, and Ta in Cl2/Ar Inductively Coupled Plasma |
Ra, Hyun-Wook
(Nanomaterials Processing Research Center and School of Chemical Engineering and Technology, Chonbuk National University)
Park, HyungJo (Knowledge on Inc.) Kim, Ki Ju (Nanomaterials Processing Research Center and School of Chemical Engineering and Technology, Chonbuk National University) Kim, Wan-Young (Nanomaterials Processing Research Center and School of Chemical Engineering and Technology, Chonbuk National University) Hahn, Yoon-Bong (Nanomaterials Processing Research Center and School of Chemical Engineering and Technology, Chonbuk National University) |
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