• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.482-482
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• 2013

반도체 소자의 미세화와 더불어 세정공정의 중요성이 차지하는 비중이 점점 커지고, 이에 따라 세정 기술 개발에 대한 요구가 증대되고 있다. 기존 세정 기술은 화학약품 위주의 습식 세정 방식으로 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 어려움이 있다. 따라서 건식세정 방식이 활발하게 도입되고 있으며 대표적인 것이 에어로졸 세정이다. 에어로졸 세정은 기체상의 작동기체를 이용하여 에어로졸을 형성하고 표면 오염물질과 직접 물리적 충돌을 함으로써 세정한다. 하지만 이 또한 생성되는 에어로졸 내 발생 입자로 인해 패턴 손상이 발생하며 이러한 문제점을 극복하기 위하여 본 연구에서는 가스클러스터 장치를 이용한 세정 특성 평가에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기까지 성장하게 된다. 에어로졸 세정과 다르게 클러스터가 성장할 환경과 시간을 형성하지 않음으로써 작은 클러스터를 형성하게 되며 이로 인해 패턴 손상을 최소화 하고 상대적으로 높은 효율로 오염입자를 제거하게 된다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 평가하기 위하여 이러한 변수에 따라서 오염 입자의 종류, 크기에 따른 PRE (particle removal efficiency)를 평가하고 다양한 선폭의 패턴을 이용하여 손상 실험을 수행하였다. 제거 효율에 사용된 입자는 $CeO_2$와 $SiO_2$이며, 각각 30, 50, 100, 300 nm 크기를 정량적으로 오염시킨 쿠폰 웨이퍼를 제조하여 세정 효율을 평가하였다. 정량적 오염에는 SMPS (scanning mobility particle sizer)를 이용한 크기 분류와 정전기적 입자 부착 시스템이 사용되었다. 또한 패턴 붕괴 평가에는 35~180 nm 선폭을 가지는 Poly-Si 패턴을 이용하였다. 실험 결과 클러스터 형성 조건에 따라 상대적으로 낮은 패턴 붕괴에서 95% 이상의 높은 오염입자 제거효율을 전반적으로 보이는 것을 확인할 수 있었다. 따라서 이론적 계산에 기반하여 세정에 요구되는 클러스터 크기를 가정하고, 이를 통하여 세정에 적용할 경우 높은 기존 세정 방법의 단점을 보완하면서 높은 세정 효율을 가지는 대체 세정 방안으로 이용할 수 있음을 확인하였다.

• The Journal of the Acoustical Society of Korea
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• v.20 no.1
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• pp.50-55
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• 2001

This paper presents a korean isolated words recognition algorithm which used new endpoint detection method, auditory model, 2D-DCT and new distance measure. Advantages of the proposed algorithm are simple hardware construction and fast recognition time than conventional algorithms. For comparison with conventional algorithm, we used DTW method. At result, we got similar recognition rate for speaker dependent korean isolated words and better it for speaker independent korean isolated words. And recognition time of proposed algorithm was 200 times faster than DTW algorithm. Proposed algorithm had a good result in noise environments too.

• Economic and Environmental Geology
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• v.35 no.2
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• pp.137-147
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• 2002

Natural geological and environmental processes reflect to element abundances in geological materials on the surface. This study aims to elucidate a possibility of geostatistical application to differentiate geochemical anomalies affected by anthropogenic and geogenic factors. A regional geochemical map was produced using 'inverse distance weight interpolation' method for analytical results of stream sediments «150 11m) which were collected from 2,290 first- to second-order streams over the whole Gyeonggi Province. The Jurassic granitic batholith in the southeastern province was selected as a target for the geostatistical examination. Factor analysis was conducted using 22 elements for stream sediments from 445 drainage basins over the granitic body. Co, Cr, Sc, MgO, Fe$_{2}$O$_{3}$, V, and Ni were grouped with high correlation coefficients and the depletion of the components may reflect the whole-rock chemistry of the granite. Regression analysis was done using Co, Cr, and Sc as dependent variables and other six components as independent variables, and the results were drawn as maps. The maps acquired generally show quite similar distribution patterns with those of concentrations of each variable. The similarity in the spatial patterns between the two maps indicates that the application of regression statistics can be valid for the interpretation of regional geochemical data. However, some components show local discrepancies which may be influenced by secondary factors regardless of the basement lithology. The regression analysis may be effective in extracting local geochemical anomalies which may reflect rather anthropogenic pollutions than geogenic influences.

• Journal of the Korean Institute of Landscape Architecture
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• v.44 no.3
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• pp.1-12
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• 2016

This study aimed to interpret the fundamental cause of road-kill occurrences and analyzed spatial characteristics of the road-kill locations from Route 44 in Seorak National Park, Korea. Logistic regression analysis was utilized for backward elimination on variables. Seorak National Park Service has constructed GIS-data of 81 road-kill occurrences from 2008 to 2013 and these data were assigned as dependent variables in this study. Considered as independent variables from previous studies and field surveys, vegetation age-class, distance to streams, coverage of fences and retaining walls, and distance to building sites were assigned as road-kill impact factors. The coverage of fences and retaining walls(-1.0135) was shown as the most influential factor whereas vegetation age-class(0.0001) was the least influential among all of the significant factor estimates. Accordingly, the rate of road-kill occurrence can increase as the distance to building sites and stream becomes closer and vegetation age-class becomes higher. The predictive accuracy of road-kill occurrence was shown to be 72.2% as a result of analysis, assuming as partial causes of road-kill occurrences reflecting spatial characteristics. This study can be regarded as beneficial to provide objective basis for spatial decision making including road-kill occurrence mitigation policies and plans in the future.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.32 no.5
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• pp.469-479
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• 2014

N-RTK(Network based RTK) methods are able to improve the accuracy of GNSS positioning results through modelling of the distance-dependent error sources(i.e. primarily the ionospheric and tropospheric delays and orbit errors). In this study, the comparison of the TTFF(Time-To-Fix-First ambiguity), accuracy and discrepancies in horizontal/vertical components of N-RTK methods(VRS and FKP) with the static GNSS at 20 Unified Control Stations covering Incheon metropolitan city area during solar storms(Solar cycle 24 period) were performed. The results showed that the best method, compared with the statics GNSS survey, is the VRS, followed by the FKP, but vertical components of both VRS and FKP were approximately two times bigger than horizontal components. The reason for this is considered as the ionospheric scintillation because of irregularities in electron density, and the tropospheric scintillation because of fluctuations on the refractive index take the place. When the TTFF at each station for each technique used, VRS gave shorter initialization time than FKP. The possible reasons for this result might be the inherent differences in principles, errors in characteristics of different correction networks, interpolating errors of FKP parameters according to the non-linear variation of the dispersive and non-dispersive errors at rover when considering both domestic mobile communication infra and the standardized high-compact data format for N-RTK. Also, those test results revealed degradation of positing accuracy, long initialization time, and sudden re-initialization, but more failures to resolve ambiguity during space weather events caused by Sunspot activity and solar flares.

• Land and Housing Review
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• v.13 no.4
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• pp.73-89
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• 2022

With the spread of COVID-19, the role of parks has been emphasized. Under the quarantine guidelines, including social distancing, people are visiting parks as a safe place. In line with these changes, parks need to be studied as pandemic adaptation measures according to their physical and location characteristics. This study aims to explore the potential of linear parks with accessibility and pass way functions based on the characteristics of surrounding land uses. The case study area was selected from Yeonnam-dong to Yeomni-dong of the Gyeongui Line Forest Park, and the area was divided into 4 sections based on the administrative boundary and surrounding land uses. Multiple regression models were adopted in each section using the total number of de facto population as a dependent variable and factors affecting external activities including COVID-19 as independent variables. The results show that first, the more diverse the interaction between commercial facilities and linear parks, the greater the impact of the pandemic. Second, where various commercial facilities are concentrated people respond more sensitively to short-term weather changes than seasonal ones. This study indicates that there are differences in the use of linear parks according to the surrounding land uses. In addition, it suggests that the linear park has potential as a means to overcome the Pandemic crisis of the city and to increase equity in access to green areas.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.6
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• pp.62-71
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• 2013

The passive emitter location method using TDOA and FDOA measurements has higher accuracy comparing to the single TDOA or FDOA based method. Moreover, it is able to estimate the velocity vector of a moving platform. Recently, several non-iterative methods were suggested using the nuisance parameter but the common reference sensor is needed for each pair of sensors. They show also relatively low performance in the case of a long range between the sensor groups and the emitter. To solve this, we derive the estimation method of the position and velocity of a moving platform based on the Gauss-Newton method. In addition, to analyze the estimation performance of the position and velocity, respectively, we decompose the CRLB matrix into each subspace. Simulation results show the estimation performance of the derived method and the CEP planes according to the given geometry of the sensors.

• Journal of the Korean Institute of Landscape Architecture
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• v.42 no.3
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• pp.1-12
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• 2014

Urban Green space takes charge of the important role for the physical activity and promotion of health to the residents. Therefore, this study is trying to examine the relationship between the various characteristics of green space and green space usage for physical activity and health promotion. A questionnaire survey was conducted to obtain the information about patterns of green space usage and perceived neighborhood environments for the residents living in Changwon-si, Gyeongsangnam-do(n=541). Geographic Information System(GIS) was used to construct spatial data about green space accessibility and physical neighborhood environments. A Multiple Linear Regression model was used to examine the association between the characteristics of green space and physical activity, perceived health status and BMI(Body Mass Index). The study results revealed that the residents' physical activities are positively and directly influenced by the number of available public parks and green spaces in the vicinity(${\leq}200m$). The frequency at which residents witness others exercising nearby or the perceived abundance of low-cost gym facilities also factor as positive influences. The closer to the park, the higher the number of parks and area of green spaces, the more comfortable the walk thereto and the denser the neighboring residential area distribution, the perceived health level was found to be the more positively influenced. Further, it was verified that BMI is correlated with the number of public parks and green spaces within 400 m of the resident's home as well as the safety of walkways, the density of neighboring residential areas, the ratio of road, and the density of crosswalk. The significant multiple regression models between the characteristics of green spaces and physical activities and perceived health level were extracted within the significance level of 10%. This study will contribute to provide better understanding the ways in which green space and neighborhood characteristics are associated with physical activity and health. The result of this research will be available in the landscape architecture plan aimed at improving the use of green space for physical activity and reducing obesity.

• Korean Journal of Environment and Ecology
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• v.34 no.5
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• pp.446-453
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• 2020

This study built a model to predict the daily number of visitors to 18 trails in the Taebaeksan National Park using the auto-counter system data to analyze the factors affecting the daily number of visitors to each trail and classified the trails by visitors' behaviors. Results of the multiple regression models with the daily number of visitors of the 18 trails indicated that the events, such as the National Foundation Day celebration of Snow Festival, affected the number of visitors of all of the 18 trails and were the most critical factor that determined the daily number of visitors to the Taebaeksan National Park. The long-holidays of three days or longer and other national holidays also affected the daily number of visitors to the trails. Precipitation had a negative impact on the number of visitors of trails where the intention of most visitors was for sightseeing or camping instead of hiking, whereas had no significant impacts on the number of visitors of trails where many visitors intended for hiking. It indicated that visitors who intended for hiking went ahead hiking even if the weather was poor. The effects of temperature had a positive effect on the number of visitors who intended for hiking but a negative effect on the number of visitor to the trails near Danggol Plaza where the Snow Festival was held in each winter, suggesting that the impact of the Snow Festival was the deterministic factor for trail management. Results of K-mean clustering showed that the 18 trails of the Taekbaeksan National Park could be classified into three types: those affected by the Snow Festival (type 1), those that have sightseeing points and so were visited mostly by non-hikers (type 2), and those visited mostly by hikers (type 3). Since visitor behaviors and illegal actions differ according to the trail type, this study's results can be used to prepare a trail management plan based on the trail characteristics.

• Korea journal of population studies
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• v.19 no.2
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• pp.175-205
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• 1996

The purpose of this study was to find the distribution of the variables on the quality of life and the determinants of the sexual attitude and behavior of the unmarried female workers. This study was surveyed to the 306 unmarried women who worked in the small and medium scale industries in Kyungin area and analyzed the respondent's knowledge of sex, sexual behavior, health behavior, health status, satisfaction of working condition and recognition of working environment. The result of this study could be summarized as follows: The respondent's age are mostly early of twenties and their education level are high school and more. They recognize that their health condition is not so good but they hardly try to improve health condition. They think that their working condition are mostly unsatisfied and they also believe that they expose themselves to the toxic working environment. Although their knowledge of sex are low they have few chances for the education of sex and family planning. Their attitude of premarital sex are conservertive but the rate of approval of living together before marriage are high and the rate of premarital sex is around 15 percent. The premarital sex behavior are positively related with family size, living condition, knowledge of sex and working period but the sex experiences are negatively related with working period and knowledge of sex. As a result we suggest that the sex education and consultative program are necessary for improving the quality of life of the unmarried working women in small and medium scale industries.