• Title/Summary/Keyword: 감압

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Performance Characteristics of In-Situ Particle Monitors at Sub-Atmospheric Pressure (감압상태에서의 In-Situ Particle Monitor의 성능특성)

  • Bae, Gwi-Nam
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.22 no.11
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    • pp.1564-1570
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    • 1998
  • In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at subatmospheric pressures has been studied. We created uniform upstream conditions of particle concentration and measured the detection efficiency, the lower detection limit, and the size response of the ISPM using uniform sized methylene blue aerosol particles. The effect of particle size, particle velocity, particle concentration, and system pressure on the detection efficiency was examined. Results show that the detection efficiency of the ISPM decreases with decreasing chamber pressure, and with increasing mass flow rate. The lower detection limit of the ISPM, determined at 50 % of the measured maximum detection efficiency, was found to be about $0.15{\sim}0.2{\mu}m$, which is similar to the minimum detectable size of $0.17{\mu}$ given by the manufacturer.

A Study on Crack-Prevention of Pinus Rigida during Drying by Suction Treatment of Polyetylene Grycogen (PEG흡입처리에 의한 Rigida 소나무의 건조균열방지에 관한 연구)

  • Yu, Hyo-Seon;Jeong, Se-Hui
    • Korean Journal of Materials Research
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    • v.7 no.1
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    • pp.15-20
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    • 1997
  • 목재의 건조 균열방지를 위한 진공흡입기술의 새로운 목재처리방법에 대해 연구를 수행하였다. 목재의 건조균열 방지를 위해 사용된 ployetylene grycogen(PEG) 처리재들은 PEG-1540, PEG-2000, PEG-4000, PEG-10000이었으며, 진공펌프의 감압정도는 85kPa과 39kPa 이었다. 시험결과, 진공흡입처리에 의한 PEG액의 흡입은 방사단면에 걸쳐 고르게 이루워졌음을 확인 할 수 있었다. 또한 PEG의 분자량이 증가할수록 단위시간당 PEG의 분자량이 증가할수록 단위시간당 PEG의 흡입량과 처리전.후의 함수률의 차인$\Delta$ M.C 는 PEG-2000을 변곡점으로 하여 감소하였다. 그리고 리기다 소나무의 건조균열 방지를 위한 약제 흡입처리에 있어 최적의 PEG 분자량과 농도 그리고 감압력의 조건은 각각 PEG-2000과 30%(wt.)그리고 85kPa임을 알 수 있었다.

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Firing characteristics analysis of cardiovascular neurons mediating somatosympathetic reflex in the rostral ventrolateral medulla (체성교감반사를 매개하는 상부 복외측연수 심혈관계세포의 흥분발사특성 분석)

  • Goo, Yong-Sook;Cha, Eun-Jong
    • Proceedings of the KOSOMBE Conference
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    • v.1995 no.05
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    • pp.190-194
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    • 1995
  • 체성-교감 반사 유발시 동맥혈압의 조절에 관여한다고 생각되는 상부 복외측 연수 내의 심혈관계 세포를 대상으로 흥분발사의 반응특성을 측정, 분석하였다. 심장 박동주기와 시간적으로 동기되는 흥분발사를 보이는 심혈관계 세포를 찾은 후 체성-교감 반사의 승압반응과 감압반응을 유발시키며 각각에 대해 동일한 세포의 흥분발사의 변화를 측정한 결과 5가지 유형의 반응특성을 얻을 수 있었다. 이들 간에 구성되어 있는 회로망 연결을 설명하고자 2 가지 종류의 특성 세포와 적절한 자극 전달 경로 및 세포간 회로망 연결을 도입하여 본 연구의 실험결과를 모두 설명할 수 있는 가장 간단한 죄소 세포회로망 모델을 구성하였다. 최소 모델의 고찰 결과 고유한 감압경로의 존재가능성이 도출되었다.

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Trend of Bioadhesives (III) -Pressure-sensitive adhesives for medical application (생체용 접착제의 연구동향(III) - 의료용 감압 접착제의 최근의 개발동향 -)

  • Jeong, Hyun-Cheol;Cho, Chang-Min;You, Jong-Sun;Ha, Chang-Sik;Cho, Won-Jei
    • Journal of Adhesion and Interface
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    • v.2 no.2
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    • pp.28-34
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    • 2001
  • 의료용 감압 접착제(PSAs)는 접착되어지는 피부가 매우 다양한 타입이 있고 그 응용범위가 다양하므로 요구되어지는 것들이 매우 까다롭다. 본 총설은 의료용 PSAs의 특이한 성질의 합성을 포함하여 1985년 이후의 주된 화학적 개발동향에 그 초점을 두고 있다. 응집력 향상으로 Hot melt형 접착제를 주로 검토할 것이다.

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Development of a Direct-Operated Proportional Pressure Reducing Valve for Low-Band Type Active Suspension Control (Low-Band Type 능동형 현가제어를 위한 직동식 전자비례 감압밸브의 개발)

  • 홍예선;류시복;김영식
    • Transactions of the Korean Society of Automotive Engineers
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    • v.2 no.3
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    • pp.75-84
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    • 1994
  • In general direct-operated pressure reducing valves have been gardly applied to a dynamic control system such as active suspension control because of their poor control stability. But they are more robust than pilot-operated type and do not need pilot control flow. In this paper development of a new direct-operated proportional pressure reducing valve for low-band type active suspension control is reported. By means of a special damper directly linked to the valve spool, the control stability could be effectively improved without drawback in response time. The linearity error was less than $\pm$3.5%. Applied to an experimental active suspension system the new valve showed the $-90^{\circ}$ phase delay at 4Hz with 20% sinusoidal signal input and could control the suspension system with almost same performance as that with a pilot-operated type valve.

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Field Measurement of Infiltration in New Apartments using De-pressurization Method (신축 공동주택에서 감압법을 이용한 기밀성능 실측 연구)

  • Yoon, Jae Ock
    • KIEAE Journal
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    • v.13 no.3
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    • pp.27-32
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    • 2013
  • Infiltration is air flow that occurs through cracks in buildings. According to level and kind of infiltration, the cooling load and heating load in buildings may increase. In this study I conducted field measurements to evaluate air tightness in 27 new apartment units. Field measurements for new apartments was the focus. For the de-pressurization method, the equipment utilized to gauge airtightness included KNS-5000C and KNS-4000 which were installed on the window in order to measure indoor air leakage. The results are summarized as follows. The average ACH50 of a $59m^2$ APT was 3.98, 3.82 for a $84m^2$ APT, and 2.73 for a $114m^2$ APT. The total average ACH50 of 27units was 3.51.

Analysis of Decompression Control Characteristics of Pneumatic Pressure Control System Considering Heat Transfer Characteristics (열전달 특성을 고려한 공기압 압력제어계의 감압제어특성 해석)

  • Jang, J.S.
    • Journal of Power System Engineering
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    • v.10 no.1
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    • pp.90-95
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    • 2006
  • Pneumatic control systems have been mainly used as a high speed operating system. Therefore, state change of air in a control volume was assumed to be adiabatic change and, pneumatic control systems have been analyzed by using this assumption. Especially, when absolute value of pressure change in the control volume is small, there is a tendency to neglect effect of temperature change on pneumatic control system because temperature change owing to pressure change is small. In this study, an effect of temperature change of air on the decompression control process was analyzed by considering change of mass flow rate, and heat transfer characteristics between air in the chamber and the chamber wall. As a result, this study could confirm that a slight temperature change of the air in the pneumatic pressure control system can influence on the dynamic characteristics of pressure response, and pressure control performance.

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A Study on the Post Processing of Flash Boiling Spray Image from Shadowgraphy (감압비등 분무의 역광이미지 후처리 기법에 관한 연구)

  • Hyunchang Lee
    • Journal of ILASS-Korea
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    • v.29 no.2
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    • pp.91-97
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    • 2024
  • When investigating the droplet, spray, and impact of liquid on a solid plate, backlight imaging has been widely used to understand these phenomena. However, some previous studies have suffered from poor image quality. In this study, various combinations of image processing algorithms, such as white image correction, histogram equalization, CLAHE, Otsu's binarization, and multi-Otsu's binarization, have been applied to flash boiling spray images to enhance image quality for qualitative observation and semi-quantitative spray angle evaluation. To acquire images with high contrast for qualitative observation, applying CLAHE was effective, making small droplets and detailed shapes of the jet noticeable. However, when images were averaged to determine spray angle or penetration length based on intensity, this method induced artifact unphysical patterns, thus requiring careful consideration. Based on the algorithm proposed in this study, the spray angle variation according to injection pressure and temperature has been calculated, showing a reasonable trend.