• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.515-518
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• 2005

현재 정밀한 길이를 측정하기 위해서는 광 간섭계를 이용한 측정기술이 주로 사용되어지고 있다. 이러한 광 간섭계의 발전과 더불어 이보다 더 높은 분해능을 얻기 위해 광파장보다 1000배 정도 짧은 엑스선을 이용한 변위 측정 기술개발이 진행되고 있다. 본 연구에서는 이러한 엑스선을 이용한 간섭계를 제작하고, 광 간섭계와 결합된 광/엑스선 복합간섭계를 구성하여 광 간섭계가 안고 있는 자체의 비선형성이 제거된 정밀 변위 측정 시스템을 구성하였다. 그 응용으로써, 제작된 광/엑스선 복합간섭계를 이용하여 나노미터 영역에 서 사용하는 transducer의 비선형성을 측정하였다.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.267-276
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• 1997

We set up a four-wave holographic interferometer using a symmetric dual-beam illumination which is to measure in-plane and out-of-plane displacement simultaneously. In order to acquire the displacement phase map we applied the phase-shifting method and removed the noise of the phase map with least-squares fitting. In this approach the access to information relative to both the difference and sum of phases existing in the two arms of four-wave holographic interferometer was allowed. As a result, in-plane and out-of-plane displacement was measured to the accuracy of λ/40 and λ/100, respectively at λ=632.8nm

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.5
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• pp.864-872
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• 1992

Two double-exposure holograms are made in the different view angle at the same time, using laser, by overlapping before and after the static deformation. These images are transfered to the computer. The fringe patterns of holograms are recognized by image processing and each component of the displacement and strain at each point of the specimen is obtained by vector analysis, and the results were presented in the graphical form. For the verification of all the ment process, the two experimental cases, the in-plane displacement by tension load and the out-of-plane displacement by bending load, are measured. These results are compared with the exact solution.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.109-109
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• 2003

• Proceedings of the Optical Society of Korea Conference
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• 2001.02a
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• pp.92-93
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• 2001

주파수 안정화 레이저 광원은 10-6 이상의 상대 불확도가 필요한 간섭계에서 널리 쓰이고 있으며 특히 변위 측정 시스템에서는 반드시 쓰이고 있다. 상용화된 많은 변위 측정 시스템은 신호 대 잡음비가 우수하고 광학계의 정렬이 더 쉬운 헤테로다인 방식을 채택하고 있으며 이를 위해서 서로 수직 선형 편광인 다른 주파수의 광을 내보내는 광원이 필요하다. 현재 헤테로다인 변위 측정 시스템에 쓰이고 있는 광원은 이중 주파수 광원을 만드는 방식에 따라 지만 효과(Zeeman effect)를 이용한 지만 레이저(HP사)와 음향-광 변조기(Acousto-optic modulator)를 이용한 이중 주파수 레이저(Zy해사)가 있다. (중략)

• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.35-35
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• 2002

나노미터 표준을 확립하기 위하여 일체식 엑스선 간섭계에 광간섭계를 결합시킨 복합간섭계를 구성하였다. 복합간섭계는 광간섭계의 Zero crossing 지점부터 표준시편이 올려진 미소이동대의 이동거리를 변화된 위상값으로 읽고 그 변화량을 고분해능 변위 측정기인 엑스선 간섭계로 읽어들이는 구조로 구성된다. 본 연구에서는 미소이동대의 위치 변화와 관련된 광간섭계의 위상 안정도, 엑스선 간섭계 및 미소이동대의 위치 안정도 등이 나노미터 영역의 길이 측정에 매우 중요한 요인이 되므로, 미소이동대의 위치 변화시 정지상태에서의 위상 잠김 (phase locking) 안정도를 측정하였다. 마이켈슨 레이저간섭계의 한쪽 팔을 고정시키고 다른 한 팔은 미소이동대 위에 반사거울을 설치하여 미소이동대의 움직임을 측정하였다. 보다 안정된 위상잠김 상태를 확보하기 위하여 PID feedback loop controller를 사용하였다. 측정 결과 위상 변동폭이 0.022 degree 이하의 높은 위상잠김 안정도를 확보하였으며, 이를 길이단위로 환산하면 정지상태에서 약 0.02 nm 이하의 위치 안정도를 나타낸다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.9
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• pp.1201-1207
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• 2010

In this study, a fatigue testing system capable of performing load-controlled tension-tension tests for micro-specimens was developed by using an electro-magnetic actuator. Using this system, fatigue testing as well as tensile testing can be performed over a wide range of loading frequencies. Further, a new laser interferometric strain/displacement gage was used during fatigue testing to obtain high-resolution measurements of the cyclic deformation of thin films. Since the testing machine and the displacement gage are stable and show quick responses, the displacement can be measured instantaneously and continuously during fatigue testing, and high-resolution results can be obtained.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.199-203
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• 1997

Fine displacement of spherical suface was detected and analyzed by Twyman-Green interferometer and the interferogram analysis using Fourier transform method. The surface profile was obtained from single interferogram by introducing the carrier freguency to the interferogram. The interferogram was processed in the spatial frequency domain by fast Fourier transform, and the phase distribution was obtained by inverse Fourier transform. The 3-dimensional distribution for the surface displacement was obtained. It was compared with the calculated surface displacement and the error was less than λ/10.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.5
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• pp.1007-1012
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• 2007

A novel Michelson interferometer controlled with a feedback circuit(MIFC) has been developed and its performance has been evaluated. This new interferometer can measure the displacement of the sample by directly reading the feedback bias applied to the PZT whose piezoelectric characteristic is known. The experimental result showed that the step height the silicon membrane measured by using MIFC was actually same with the value measured by SEM, which confirms that MICS is an easy and accurate method for the nano-scale displacement measurement.

• Journal of the Korean Society for Nondestructive Testing
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• v.13 no.4
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• pp.32-41
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• 1994

The stabilized Michelson interferometer was developed in order to measure micro dynamic displacement at the surface of solids due to elastic wave propagation. The stabilizer was designed to compensate light path disturbances using a reference mirror driven by piezoelectric actuator. Using stabilizer, the effect of external vibration was reduced and the quadrature condition was satisifed. As the results, the output of photodetector had maximum sensitivity and linearity. The minimum detectable displacement was 0.3nm at the band width of 10 MHz. The epicentral displacements due to the glass capillary breaks and the steel ball drop impact were measured using the developed interferometer and the results were compared with the calculated one.