• Title/Summary/Keyword: 가열압력

Search Result 291, Processing Time 0.028 seconds

450 mm Wafer 가공을 위한 자화유도결합플라즈마 시뮬레이션 연구

  • Lee, Ho-Jun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.02a
    • /
    • pp.411-411
    • /
    • 2010
  • Cavity mode Whistler wave를 사용하는 자화유도결합플라즈마 (Magnetized Inductively Coupled Plasma, MICP)의 제반 특성을 비등방성 수송계수를 가지는 Drift-Diffusion 근사, 에너지 보존 방정식 및 유도전자계를 self-consistent 하게 고려하여 계산하였다. 이러한 접근법은 비충돌성 전자가열현상을 고려하지 못하는 단점에도 불구하고, 반도체 장비설계에 필수적인 전자온도, 밀도, 플라즈마 전위, 시스템의 임피던스 특성에 대한 경향성 파악에 매우 유용하다. 뿐만 아니라 전자밀도분포가 공간내에 형성되는 R-wave mode에 미치는 영향을 분석할 수 있다. 직경 320 mm를 가지는 작은 반응기에서 시뮬레이션과 실험결과를 비교하여 본 모델링 방법의 타당성을 검증한 후, 450 mm wafer가공에 적합한 대면적 플라즈마 반응기에서 플라즈마 특성을 연구하였다. 수 mTorr의 공정압력에서 약 10 Gauss전후의 약한 자장이 인가됨으로서 반경방향의 전자밀도 균일성이 대폭 향상되었다. 플라즈마 및 안테나의 대면적화에 수반되는 높은 Q값이 자장의 인가로 큰 폭으로 감소함으로서 임피던스메칭의 안정성이 비약적으로 개선되었고 전력전달 효율 또한 크게 증가함을 알 수 있었다. 본 연구 결과는 차세대 450 mm 반도체 공정장비의 개발에 있어 자화유도결합플라즈마가 매우 유용하게 사용될 수 있음을 보여준다.

  • PDF

Dewatering of Soybean Milk Residue by Hydraulic Press with Ohmic Heating (Ohmic Heating을 이용한 두유박의 압착탈수)

  • Cho, Won-Il;Pyun, Yu-Ryang;Lee, Youn-Soo;Kwon, Ik-Boo
    • Korean Journal of Food Science and Technology
    • /
    • v.28 no.2
    • /
    • pp.324-329
    • /
    • 1996
  • In order to develop a novel dewatering process for soybean milk residue, hydraulic press with ohmic heating was built and its expression conditions were examined. The electric conductivity of raw soybean milk residue was 0.128 S/m and increased linearly with increasing temperature. Water content of the residue could be reduced to 74% with the conventional hydraulic press, but to less than 70% by applying ohmic heating to the hydraulic press. The most effective dewatering was achieved by applying alternative current with 5 kHz frequency at 60 V during expression. The solid content of the expressed liauid was markedly reduced from 10% to 3.3% by ohmic heating during expression. Temperature of the cake rose to above $95^{\circ}C$ during the dewatering due to ohmic heating.

  • PDF

Quality Characteristics of Instant Nuroong-gi Prepared Using a Microwave (Microwave를 이용한 즉석 누룽지의 품질특성)

  • Lee, Hyun-Seok;Kwon, Ki-Hyun;Kim, Jong-Hoon;Cha, Hwan-Soo
    • Food Science and Preservation
    • /
    • v.16 no.5
    • /
    • pp.669-674
    • /
    • 2009
  • We prepared puffed instant Nuroong-gi samples using a microwave and investigated the physicochemical characteristics of the products. The quality of Nuroong-gi prepared using a microwave was compared with that of noodles prepared in a steam cooker and pressure cooker in terms of moisture content, color, water binding capacity ratio, viscosity, sedimented volume of insoluble solids, turbidity, and sensory evaluation. The moisture content of Nuroong-gi prepared in a microwave was similar to that of steam cooker and pressure cooker samples. The color (lightness) of steam cooker-prepared noodles was greater than that of noodles cooked using other modes. The water binding capacity ratio fell with increasing microwave cooking time. The viscosity of noodles prepared using a microwave was higher than that of pressure cooker samples and lower than that of steam cooker noodles. The sedimented volume of insoluble solids and turbidity increased with a rise in cooking temperature. Nuroong-gi prepared in a microwave scored higher in sensory evaluation tests than did steam cooker or pressure cooker samples. These results indicate that Nuroong-gi preparation using a microwave is very efficient.

Phase Transition of Zeolite X under High Pressure and Temperature (고온 고압 환경에서 합성 제올라이트 X의 상전이 비교연구)

  • Hyunseung Lee;Soojin Lee;Yongmoon Lee
    • Economic and Environmental Geology
    • /
    • v.56 no.1
    • /
    • pp.13-21
    • /
    • 2023
  • X-ray powder diffraction study was conducted on the bulk modulus and phase transition behavior of synthetic zeolite X under high temperature and high pressure. Water and HCO3- solution were used as a PTM. Sample was heated and pressurized up to 250 ℃ and 5.18 GPa. The change of unit cell volume and phase transition were observed by X-ray diffraction. The lattice constants and unit cell volume of zeolite X, gmelinite, natrolite, and smectite were calculated using the GSAS2 program to which Le Bail's whole powder pattern decomposition (WPPD) method was applied. The bulk modulus of each zeolite X and smectite were calculated using the EosFit program to which the Birch-Murnaghan equation was applied. The bulk modulus of zeolite X is 89(3) GPa in water run, and zeolite X is 92(3) GPa in HCO3- solution run. In both run, pressure induced hydration (PIH) occurred due to the inflow of PTM into the zeolite X framework at initial pressure. Zeolite X transited to gmelinite, natrolite, and smectite in water run. Zeolite X, however, transited to smectite in HCO3- solution run. Interzeolite transformation occurred in water run, and did not occur in HCO3- solution run, which is assumed that conflict between the environment to form zeolite and the pH of the HCO3- solution.

Design of a pilot-scale helium heating system to support the SI cycle (파이롯 규모 SI 공정 시험 설비에서의 헬륨 가열 장치 설계)

  • Jang, Se-Hyun;Choi, Yong-Suk;Lee, Ki-Young;Shin, Young-Joon;Lee, Tae-Hoon;Kim, Jong-Ho;Yoon, Seok-Hun;Choi, Jae-Hyuk
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.40 no.3
    • /
    • pp.157-164
    • /
    • 2016
  • In this study, researchers performed preliminary design and numerical analysis for a pilot-scale helium heating system intended to support full-scale construction for a sulfur-iodine (SI) cycle. The helium heat exchanger used a liquefied petroleum gas (LPG) combustor. Exhaust gas velocity at the heat exchanger outlet was approximately 40 m/s based on computational thermal and flow analysis. The maximum gas temperature was reached with six baffles in the design; lower gas temperatures were observed with four baffles. The amount of heat transfer was also higher with six baffles. Installation of additional baffles may reduce fuel costs because of the reduced LPG exhausted to the heat exchanger. However, additional baffles may also increase the pressure difference between the exchanger's inlet and outlet. Therefore, it is important to find the optimum number of baffles. Structural analysis, followed by thermal and flow analysis, indicated a 3.86 mm thermal expansion at the middle of the shell and tube type heat exchanger when both ends were supported. Structural analysis conditions included a helium flow rate of 3.729 mol/s and a helium outlet temperature of $910^{\circ}C$. An exhaust gas temperature of $1300^{\circ}C$ and an exhaust gas rate of 52 g/s were confirmed to achieve the helium outlet temperature of $910^{\circ}C$ with an exchanger inlet temperature of $135^{\circ}C$ in an LPG-fueled helium heating system.

Optimization for the Industrial Production of Traditional Jeju Tofu (제주전통두부의 산업화를 위한 최적공정확립)

  • 오영주;이삼빈;김찬식
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.33 no.3
    • /
    • pp.603-608
    • /
    • 2004
  • Traditional Jeju tofu with a hard texture was manufactured by traditional method with a compounded coagulant. The processing condition for industrial production was optimized by determining soaking of soybean, extraction and heat treatment of soymilk as well as concentration and composition of coagulant. Maximum yield of soymilk was obtained by grinding one part of soaked soybean with eight parts of water, and the soluble solid of soymilk was about 8$^{\circ}$Brix. The free thiol group in soymilk was maximally exposed by heating at 10$0^{\circ}C$ for 2 min. A vacuum cooker for heating soymilk was effective for the improvement of yield and texture properties of tofu. The hardness of traditional Jeju tofu was obtained by increasing pressing time and drying by a fan instead of soaking in cold water. Optimization of a traditional tofu production resulted in the increase of total yield and improvement of quality control. Texture of traditional Jeju tofu prepared in industrial production scale was analyzed by instrumental analysis and sensory evaluation. Traditional Jeju tofu showed higher score in the hardness, roasting taste and overall preference compared with a commercial tofu, showing significant difference in 5% significant level..

Study on Friction Welding of Torsion Bar Material(1) -Optimization of Friction Welding Technique- (토션 바재의 마찰용접에 관한 연구(I) -마찰용접기술의 최적화에 대하여-)

  • 오세규;이종두
    • Journal of Ocean Engineering and Technology
    • /
    • v.4 no.1
    • /
    • pp.101-109
    • /
    • 1990
  • The friction welding has more technical and economic advantages than the other welding processes. As this welding process has the characteristics such as curtailment of production time, materials, cost reduction, etc., it has been widely used in production of various mechanical components which have complex shapes. So, this paper deals with optimizing the friction welding conditions and analyzing various mechanical properties of the friction welded joints of torsion bar material SUP9A bar to bar. The results obtained are summarized as follows; 1) The quantitative relation between heating time($t_{1}$, sec) and total upset(U, mm)can be obtained. The empirical formula obtained is ; U = 3.29$t_{1}$ + 1.6 2) The tensile strength($\sigma_{t}$, kgf/$mm^{2}$) of friction welding joints as post weld heat treated(PWHT) depends upon heating time($t_{1}$, sec) quantitatively and the empirical formula obtained is ; $\sigma$= -5.1$t_{1}\;^{2}$+44.90$t_{1}$+45.2 3) It is certain that the optimum condition for friction welded joints of SUP9A steel bars of diameter 14.5mm is, considering on various properties such as tensile strength, torsional strength, impact energy and strain of the joints after PWTH ; n = 2000rpm, $P_{1}$=8kgf/$mm^{2}$, $P_{2}$=20kgf/$mm^{2}$, $t_{1}$=4sec, $t_{2}$=3sec 4) The tensile strength, torsional strength and hardness were increased with the increased with the increasing carbon equivalent, but toughness was decreased.

  • PDF

Performance Comparison of Heat Transfer Plates for Cooling Tower Air Heater Through Numerical Analysis (냉각탑 공기가열기용 전열판의 수치해석적 성능 비교)

  • Lee, Eul-Jong;Kim, Jung-Sik;Kim, Nae-Hyun
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.13 no.12
    • /
    • pp.5676-5683
    • /
    • 2012
  • In this study, numerical analysis was performed on three shapes of heat transfer plates (chevron, wave and dimple type), which are currently used as fillers of cooling towers. Results show that heat transfer rates per consumed power were larger for enhanced plates as compared with that of plain plate. Highest heat transfer coefficient was obtained for wave shape followed by chevron and dimple shape. For wave shape, cross corrugations induced significant mixing of fluids, which enhanced the heat transfer. Friction factor yielded a similar trend with the heat transfer coefficient. However, heat transfer rate and pressure drop per sheet was the largest for chevron shape, due to the largest heat transfer area per sheet.

Design of a Shape Transition Nozzle for Lab-scale Supersonic Combustion Experimental Equipment (소형 초음속 연소시험 장치를 위한 형상 천이 노즐 설계)

  • Sung, Bu-Kyeng;Hwang, Won-Sub;Choi, Jeong-Yeol
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.48 no.3
    • /
    • pp.207-215
    • /
    • 2020
  • Design of a shape transition nozzle is carried out as a part of building a lab-scale supersonic combustion experimental equipment. In order to connect directly the circular shaped vitiation air heater to the square shaped scramjet combustor, area change is evaluated by using the method of characteristics. Shape transition function is introduced to control the transition rate. Boundary layer correction was made through the three-dimensional computational fluid dynamics with the assessment on the several shape transition functions. The shape transition nozzle is proved minimizing the growth of boundary layer at the center of the rectangular nozzle surfaces that caused by the pressure gradient at the corners of the rectangular nozzle and the following recirculation regions.

Numerical Study on the Process of Supersonic Flow Formation in a Direct-Connect Supersonic Combustor (Direct-Connect 초음속 연소기 내 초음속 유동 형성과정에 대한 수치해석)

  • Jeong, Seong-Min;Han, Hyunh-Seok;Sung, Bu-Kyeng;Lee, Eun-Sung;Choi, Jeong-Yoel
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.48 no.11
    • /
    • pp.889-902
    • /
    • 2020
  • In this study, a numerical analysis was performed to confirm the formation of supersonic flow and the stabilization time satisfying the design condition in a Direct-connect supersonic combustor. The process was examined in which the high-pressure gas of vitiation air heater propagates downstream to the supersonic combustor and forms a supersonic flow field. It was confirmed through the analysis of pressure and temperature that the supersonic flow field satisfies the design points of Mach number 2.0 and 1,000 K, and requires a minimum of 4.0 ms for stabilization. These results indicate that the time required for the supersonic flow field stabilization should be taken into account when testing for the supersonic combustion experiment.