• Title/Summary/Keyword: 가시도 해석

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Effects of RF Pulsing on the Ionization Enhancement in Ionized Magnetron Sputtering (RF pulsing이 Ionized Magnetron Sputtering의 이온화율 향상에 미치는 효과)

    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.255-260
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    • 1998
  • The ionized magnetron sputtering is very useful in filling of small metal contact or via in ULSI processing with very high ionization upto 80% based on incoming flux ratio. But fairly high sputtering gas pressure is required to get high ionization, which instead gives low deposition rate and diverse incoming neutral's angular distribution. The electron quenching by heavily sputtered metals and gas rarefaction were considered the main causes of decreased ionization in this process. RF pulsing of sputtering power was proposed to solve those two problems. The results showed that 10㎳/10 ㎳ and 100㎳/100 ㎳ of on/off pulsings were optimal pulse conditions from OES measurements and also XRD of deposited Ag film showed distinct change of (111) to (200) preferred orientation. These results were analysed in a view point of neutral gas heating and cooling by high power sputtering.

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3D Unsteady Numerical Analysis to Design Defrosting System of Automotive Windshield Glass (자동차 전면유리의 제상시스템 설계를 위한 3차원 비정상 수치해석)

  • Kang, Shin-Hyung;Lee, Jin-Ho;Byun, Ju-Suk
    • Transactions of the Korean Society of Automotive Engineers
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    • v.15 no.5
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    • pp.1-8
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    • 2007
  • The present research is based upon the numerical analysis of a car windshield in order to represent the optimum design guide to improve the overall defrosting performance of the system. First, the control factors that highly affect the defrosting performance of a car windshield are chosen and afterwards, the optimum variables of each control factor are extracted out to analyze its performance. The main control factors for this research are respectively, the air injection angle of a defroster nozzle, the height of a nozzle outlet, and the ratio of the width to the height of a nozzle outlet. For such case when the air inlet angle is relatively small, the flow near the vicinity of the inner face of a windshield tends to expand. As a consequence, the heat transfer rate through the windshield decreases. Also, the height of a nozzle outlet is recommended to maintain its size to minimum. However, when the ratio mentioned before is designed less than unity, the defrosting performance decreases.

An Analysis on Spray Behavior of Liquid-thruster Injector through Pseudo-3D Distribution Measurement (준 3차원 공간분포 계측에 의한 액체 추력기 인젝터의 분무거동 해석)

  • Kim, Jin-Seok;Jung, Hun;Kim, Jeong-Soo;Kim, Sung-Cho
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.05a
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    • pp.141-144
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    • 2008
  • Atomization characteristics and spatial distribution of the spray emanating from an injector of liquid-propellant thruster are investigated by using dual-mode phase Doppler anemometry (DPDA). Spray characteristic parameters such as the mean velocity, Sauter mean diameter (SMD), and velocity fluctuation are measured at various locations along the spray axis as well as on the radial direction. Those data are quantified in radial profile and also used to scrutinize the correlation between diameter and turbulence intensity of spray droplets. For the better visual grasp, dynamic behavior of spray droplets along the spray stream is presented through the velocity vectors projected on the plane of geometric axis of nozzle orifice and radial coordinate.

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AC/DC Converter Suitable for a Pulsed Mode Switching DC Power Supply (펄스모드 스위칭 직류전원 장치에 적합한 AC/DC 컨버터)

  • 문상호;강성관;노의철;김인동;김흥근;전태원
    • The Transactions of the Korean Institute of Power Electronics
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    • v.8 no.5
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    • pp.389-396
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    • 2003
  • This paper describes a novel ac/dc power converter suitable for frequent output short-circuit faults. The output dc power of the proposed converter can be disconnected from the load within several hundred microseconds at the instant of short-circuit fault. The rising time of the dc load voltage is as small as several hundred microseconds, and there Is no overshoot of the dc voltage because the dc output fillet capacitors stay at a undischarged state. The proposed converter has the characteristics of a simplified structure, reduced cost, weight, and volume compared to the conventional power supplies for frequent output short-circuit. Analysis, simulations, and experiments are carried out to investigate the operation and usefulness of the proposed scheme.

Nonlinear refractive index measurement for amorphous $As_2S_3$ thin film by Z-scan method (Z-scan 방법에 의한 비정질 $As_2S_3$ 박막의 비선형 굴절률 측정)

  • 김성규;이영락;곽종훈;최옥식;이윤우;송재봉;서호형;이일항
    • Korean Journal of Optics and Photonics
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    • v.9 no.5
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    • pp.342-347
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    • 1998
  • We present a theoretical analysis of Gaussian beam propagation in nonlinear Kerr media by using aberration-free approximation and Huygens-Fresnel diffraction integral and obtain a simple analytic formular for Z-scan characteristics. Z-scan experiments are carried out on amorphous $As_2S_3$ thin film and compared with the theory developed, showing good agreement. The sign and the value of ${\gamma}$ have been measured at 633 nm to be $+8.65{\times}10^{-6}\textrm{cm}^2/W$. We also measured the far-field intensity profiles, which confirm again self-focusing effect.

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Polyethersulfone 기판 위에 증착된 GaZnO 투명전도성 박막의 특성

  • Go, Ji-Hyeon;Jeong, Ui-Wan;Lee, Jin-Yong;Lee, Yeong-Min;Kim, Deuk-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.80-80
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    • 2011
  • 본 연구에서는 flexible 광전소자에 응용이 가능한 투명전극을 위해 polyethersulfone (PES) 기판 위에 GaZnO (GZO) 박막을 마그네트론 스퍼터 법으로 증착하였다. 박막 증착 중 Ar 분압의 변화가 박막의 특성에 미치는 영향을 분석하기 위해, 스퍼터 반응시 chamber내 Ar 분압을 10 sccm~50 sccm 범위에서 변화를 주었다. 박막이 증착된 후 GZO/PES 시료의 광학적 투과율을 측정한 결과 가시광 영역에서 80% 이상의 높은 투과율을 보이고 있었다. 이때 광학적 투과율은 Ar 분압의 변화에는 영향을 받고 있지 않은 것으로 분석되었다. 시료의 표면을 주사전자현미경 분광법으로 분석한 결과 Ar 분압이 증가 할수록 GZO grain 크기가 감소하여 그 조밀도가 증가하는 경향을 나타내었다. 또한 x-ray 회절 스펙트럼에서는 ZnO (002) peak의 세기가 증가함을 확인하였고, 이에 반하여 $ZnGa_2O_4$의 (311) peak의 세기는 감소하는 경향을 확인할 수 있었다. 한편 제작된 시료의 전기적 특성을 분석한 결과 Ar 분압의 증가에 따라 비저항이 약 $7.5{\times}10^{-3}{\Omega}cm$ 까지 감소하는 경향을 보였다. 이는 Ar 분압이 증가할수록 Ar-plasma enhancement 효과로 GZO의 결정학적 특성이 향상되면서 GZO의 전기전도 특성을 저해 하는 insulating $ZnGa_2O_4phase$의 형성을 억제하였기 때문인 것으로 해석된다.

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Analysis of Sapphire Microdrilling by a Nano Second Visible Laser Pulse (나노초 가시광 레이저 펄스를 이용한 사파이어 미세천공 공정의 해석)

  • O, Bu-Guk;Jeong, Yeong-Dae;Kim, Nam-Seong;Kim, Dong-Sik
    • Laser Solutions
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    • v.12 no.1
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    • pp.7-13
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    • 2009
  • Engineering ceramics as sapphire are widely used in industry owing to their superior mechanical and corrosion properties. However, micromachining of sapphire is a considerable challenge due to its transparency. Recently, direct ablation of sapphire has been demonstrated with a visible laser pulse at sufficiently high laser intensity. In this work, the theoretical model for pulsed laser ablation of sapphire is suggested and numerical analysis is carried out using the model. Sapphire ablation begins with plasma generation by the laser interaction with surface defects, impurities and contaminations in the initial stage of machining. Subsequent absorption of the visible laser beam can be explained by three mechanisms: metalization of sapphire surface due to the EUV radiation from the hot plasma, increments of surface roughness and temperature-dependent absorption coefficient. Comparison of the computation results with experimental observation indicates that the proposed model of sapphire is reasonable.

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A Study of Broadband Propagation Characteristics for The Future Mobile Communications(I) - Broadband Propagation Characteristics Measurements on Indoor (차세대 이동통신에서의 광대역 전파특성 연구(I)-실내에서의 광대역 전파특성 측정-)

  • 하덕호
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.9 no.2
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    • pp.265-277
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    • 1998
  • In this paper, to investigate the possibility of fading reduction effect and high transmission rate in indoor multipath propagation environment, we measured and analyzed broadband signal conducting by frequency sweeping method in LOS(Line-of-Sight) environment. In measuring, we used vertically polarized, horizonatally polarized and circularly polarized and circularly polarized antenna to compare the fading reduction effect and the characteristic of bandwidth amplitude fluctuation between each broadband signals. As a result, it can be seen that the circularly polarized antenna can reduce the amplitude deviation of the broadband signal because it can remove the odd-times reflected wave in LOS environment. And also, It was found that the best effective diversity reception method is to use polarization branches, which install a circularly polarized antenna at the transmitting end and compose the vertical and horizontal antenna at the receiving end.

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Queuing Analysis of IEEE 802.15.4 GTS Scheme for Bursty Traffic (Bursty Traffic을 위한 IEEE 802.15.4 GTS 기법의 대기 해석)

  • Le, Nam-Tuan;Choi, Sun-Woong;Jang, Yeong-Min
    • Journal of Satellite, Information and Communications
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    • v.5 no.2
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    • pp.87-91
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    • 2010
  • The IEEE 802.15.4 and IEEE 802.15.7 standard are the typical of low rate wireless and Visible Light Wireless personal area networks. Its Medium Access Control protocol can support the QoS traffic flows for real-time application through guaranteed time slots (GTS) in beacon mode. However, how to achieve a best allocation scheme is not solved clearly. The current analytical models of IEEE 802.15.4 MAC reported in the literature have been mainly developed under the assumption of saturated traffic or non-bursty unsaturated traffic conditions. These assumptions don't capture the characteristics of bursty multimedia traffic. In this paper, we propose a new analytical model for GTS allocation with burst Markov modulated ON-OFF arrival traffic.

In-line sputtering system에서 Al:ZnO 막의 대면적 증착시 가스 유동의 영향

  • Yang, Won-Gyun;Ju, Jeong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.194-194
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    • 2010
  • 태양전지용 투명전도막에 사용되는 Al-doped ZnO (AZO) 막은 저가이면서도 가시광역 영역에서 갖는 우수한 투과율과 낮은 비저항을 갖는 특성 때문에 ITO의 대체 재료로서 최근 활발한 연구가 진행되고 있다. 특히, 양산 현장에서는 in-line type의 대형 sputtering system에서 증착하고 있으며 높은 증착 속도와 박막 특성의 균일도가 중요한 과제다. 본 연구에서는 $2\;m\;{\times}\;1\;m\;{\times}\;0.2\;m$의 sputtering system에서 기판 캐리어를 이용해서 커다란 기판을 좁고 긴 타겟의 양쪽으로 왕복 운동을 하는 swing dynamic deposition 방법으로 $272\;mm\;{\times}\;500\;mm$ 크기의 AZO target (Al 2 wt%)을 이용하여 bipolar pulsed dc로 증착하였다. 이 시스템의 배기는 TMP와 cryo pump를 이용해서 $5\;{\times}\;10^{-7}\;Torr$의 기본 진공도를 얻으며, 공정 중에는 TMP만 사용하였다. 하지만, 본 시스템의 TMP는 비대칭 적으로 한쪽에 치우쳐 설치되어 있는데, 이것이 챔버 내에서 공정 가스인 Ar의 유동의 불균일도를 초래하게 되며, 그것이 증착되는 박막의 두께 균일도 및 특성 균일도에 영향을 주고 있음을 알 수 있었다. 본 연구에서는 다른 기본 진공도에서 증착된 AZO 박막의 특성 차이를 알아보고 비대칭 배기 구조가 in-line type 시스템에서 어떠한 두께 및 특성 불균일도를 가져오는지, 그리고 시스템 내부에 발생시키는 압력 불균일도를 상용 3차원 전산 유체해석 프로그램인 CFD-ACE+를 이용하여 분석하였다.

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