• Journal of the Korean Institute of Gas
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• v.24 no.2
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• pp.44-49
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• 2020

In this paper, a measuring circuit is designed through analyzing manufacture specification of the sensor based on MOS. And the best input-output polynomial are induced that really gas sensors are used in gas safety management industrial fields. Response characteristics of a MOS gas sensor is analysed by through sensor's output voltages are measured after standard gases with six kinds of concentrations are manufactured and are injected to the sensor. A lookup table is created by relations of sensor's output voltages by injecting gases with other concentrations. Because data of the formed lookup table are equal interval, a polynomial can be induced of method of approximation function. So the 5th polynomial of input-output for a sensor is defined, coefficients are calculated by using least squares method, and the 5th polynomial is completed for representing characteristics of the sensor. If the proposed polynomial is applied to gas leak detectors, an inverse transformation of polynomial and programing of array codes are recreated. In this research, polynomial is implemented with array types that intervals of values of a lookup table are one-fifth sampled and interpolated. The performance of proposed 5th calibration equation is verified that errors are reduced than a linear expression when tests are performed by measurement of concentrations against injection of standard gases.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1358-1359
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• 2008

HC(hydrocarbon)센서는 최근 내연기관의 과도상태의 연소 효율 및 배기가스 저감 효율을 높이기 위하여 산소센서와 함께 연소제어 분야에서 많이 사용되고 있다. 현제 HC센서는 전기화학식 및 current limiting 방식을 많이 사용하고 있으며 이는 HC가스의 이온화를 유도하는 촉매를 매질로 하는 전기화학식 센서이다. 이러한 촉매의 경우 장기 사용 시 촉매의 열화 및 변형 등으로 신뢰도가 떨어지게 된다. 본 논문에서는 촉매를 이용하지 않고 HC 가스의 이온화를 위하여 고전압 하전방식의 hydrocarbon센서를 고안하였으며[1], 여러 배출가스를 통한 센서의 전기화학적 성능을 분석하였고 온도 및 HC성분에 따른 전류치 변화를 이용하여 이론적 계산식을 제안하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.352-353
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• 2006

가스센서용 마이크로 히터 제작에는 표연 마이크로 머시닝 또는 벌크 마이크로머시닝 기술을 이용한다. 표면 마이크로 머시닝에 의한 마이크로 히터 (MHP) 구조의 경우, 기판과 박막간의 폭이 좁기 때문에 에칭 공정 후 세정이 잘 이루어지지 않으면 열적 절연이 잘 이루어지지 않아서 히터와 센서의 성능을 저하시키는 원인이 된다. 본 연구에서는 표면 마이크로 머시닝 기술에 의한 가스 센서용 마이크로 히터를 제작한다. $SiO_2$와 $Si_3N_4$를 성분으로 하며, $100{\mu}m\;{\times}\;100{\mu}m$의 면적과 350 nm 의 두께를 갖는 가스 센서용 마이크로 히터를 제작하였다. 이를 위하여 ANSYS를 통한 유한요소해석에 의한 열분포 해석으로 최적구조를 확인하였다. 센서로의 열 전달 효율을 높이기 위해 센서 박막은 히터 위에 적층하였다. 실리콘 표면과 마이크로 히터와의 간격은 에칭 공정을 통하여 $2{\mu}m$로 하였으며, 이 공간에서는 에칭 및 세정 후에 이물질이 깨끗이 세정되지 않고 남아 있거나, 습식 공정 중에 수분의 장력에 의한 열전연성이 나빠질 수 있는 등 단점이 있다. 이는 건식 등방성 에칭 공정을 통하여 해결하였다.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.21 no.2
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• pp.20-27
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• 2007

[ $SF_6$ ] gas for compacted power facilities has a important role as an insulation gas. It is very blown well that $SF_6$ gas has the superior characteristics as an insulation gas. For reliable operation of SF6-gas-based high and medium voltage equipment it is very important to keep the insulation ability within a safe range. And the experimental and measuring system were implemented. The test chamber designed to endure up to 3 atmospheric pressure. The analysis results of the experimental data shows that positive partial discharge can be detected by discharge current and UHF signal. Additionally it is shown the possibility that $CO_2$ gas sensor of semiconductor type can be detect the variation of $SF_6$ gas condition. The UHF sensor shows good feature to detect the variation of $SF_6$ gas condition for partial discharge and breakdown discharge.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.1
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• pp.11-19
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• 2003

A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).

• Journal of Sensor Science and Technology
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• v.9 no.1
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• pp.36-43
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• 2000

In oder to enhance the selectivity of TMA(trimethylamine) gas, the ZnO-based films which were doped with $Al_2O_3$, $TiO_2, $In_2O_3$ and $V_2O_5$ catalysts with various weight percents were deposited in oxygen by RF magnetron sputtering method. To improve electrical stability of sensors, the ZnO-based films were annealed in oxygen at $700^{\circ}C$ for 1 hour. The TMA selectivity of sensors was defined by the magnitude($S_{TMA}/S_{DMA}$ and $S_{TMA}/S_{NH3}$) of TMA sensitivity relative to DMA and sensitivity ammonia($NH_3$) sensitivity, respectively. The $ZnO+Al_2O_3(4\;wt.%)+TiO_2(1\;wt.%)+In_2O_3(1\;wt.%)$ sensor showed high $S_{TMA}/S_{DMA}$ of 5.9 and $S_{TMA}/S_{NH3}$ of 26 to 160 ppm at the working temperature of $300^{\circ}C$ respectively.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1641-1642
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• 2006

본 연구에서는 NDIR(non dispersive infrared absorption) 가스센서의 소형화와 저가화를 목표로 2개의 오목 거울을 이용한 새로운 광 공동(optical cavity) 구조를 제안하고, 구조에 따른 광 출력 특성을 시뮬레이션하였다. Optical cavity는 광 경로증가 및 광 집속 구조로 설계하고, 각각의 출력단에서 검출되는 광 출력을 시뮬레이션한 결과 광 집속 구조의 팡 출력이 더 효율적임을 확인하였다. 집광구조에서의 광 출력을 최대로 하기 위해 광의 초점을 찾아보았다. 집광 구조를 사용하지 않는 단순 평행 광이 조사되는 경우, 적외선 센서부에 입사되는 광 출력은 최대 0.024W이다. 그러나 집광구조에서는 optical cavity의 광축에서 센서의 위치를 $15\sim20mm$까지 변화시켜 시뮬레이션한 결과 거리 18.83mm 일 때 조사되는 광 출력이 약 0.153W로 약 7배 증가됨을 확인하였다.

• Journal of the Korean Institute of Gas
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• v.13 no.5
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• pp.15-19
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• 2009

In this study, the transient responses of hydrogen sensor against abrupt hydrogen release was experimentally studied for three most common types of hydrogen sensors, i.e. the semiconductor type, electrochemical type, and catalytic combustion type. The experimental study was conducted using a 1% hydrogen - 99% nitrogen mixture gas as the standard gas, while the temperature and relative humidity (RH) of the mixture gas was varied from $25^{\circ}C$ to $50^{\circ}C$ and from 50% to 100%, respectively. The temperature of the mixture gas was found to influence the output signal levels of hydrogen sensors, especially the catalytic combustion type. However, the effect of RH on the sensor response was not noticeable in the present experimental study. Thus, the signal levels of hydrogen sensors, in case of catalytic gas sensor need to be calibrated dependent on gas temperature, when the accurate determination of hydrogen concentration is important.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.24-31
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• 1999

Ammonia gas sensors were fabricated with ZnO-based thin films grown by RF-magnetron sputtering method. The films which were doped with $MoO_3$ catalysts of various weight percents were grown in different sputtering gases to fabricate the sensors with a high sensitivity, low working temperature and rapid response time. To improve electrical stability, the films were aged in various conditions. The sensors doped with the catalysts and grown in oxygen sputtering gas showed the improvement of sensitivity. These exhibited the increase of surface carrier concentration and electron mobility. The sensor with 0.875wt.% $MoO_3$ catalysts showed the maximum sensitivity of 70 in ammonia gas concentration of 160 ppm at a working temperature of $300^{\circ}C$. The sensor which is aged at $330^{\circ}C$ for 72hrs in oxygen ambient exhibited tourer sensitivity of 57, but more stable properties, excellent linearity.

• 전기의세계
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• v.59 no.6
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• pp.14-18
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• 2010