• The Journal of the Korea Contents Association
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• v.9 no.3
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• pp.250-255
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• 2009

This study performed and evaluated the performance test in 40 general X-ray units among diagnostic X-ray units, which were being used in hospitals of gyeongsangnam-do gimhae-si through X-ray tube variable limiting device ability test, the light field and X-ray field alignment test and collimation and beam alignment test of diagnostic X-ray unit. The results are as followings: In a variable beam limiting device ability test, the result of maximum X-ray field test showed that 4(10%) of were incongruent while the result of minimum X-ray field test represented that 5(12.5%) of were incongruent. The result of the light field and X-ray field alignment test showed 23(57.5%) of were within 2% of maximum permissible level and the other 17(42.5%) units were misalignment. The result of beam alignment test represented that 11(27.5%) coincided and another 11(27.5%) within $0.5^{\circ}$ respectively, 10(25%) were $0.6^{\circ}-1.5^{\circ}$ intervals, 7(17.5%) were $1.6^{\circ}-3^{\circ}$ and 1(2.5%) were more than $3^{\circ}$.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.241-241
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• 2016

반도체 선폭이 20 nm급까지 감소함에 따라 기존에 수율에 문제를 끼치던 공정 외부 유입 입자뿐만 아니라, 공정 도중에 발생하는 수~수십 나노의 작은 입자도 수율에 악영향을 끼치게 되었다. 이에 따라 저압, 극청정 조건에서 진행되는 공정 중 발생하는 입자를 실시간으로 모니터링 할 수 있는 장비에 대한 수요가 발생하고 있다. Particle beam mass spectrometer (PBMS)는 이러한 요구사항을 만족할 수 있는 장비로 100 mtorr의 공정 조건에서 5 nm 이상의 입자의 직경별 수농도를 측정할 수 있는 장비이다. PBMS로 입자의 수농도를 측정하기 위해서는 PBMS 전단에서 입자를 중앙으로 집속할 필요가 있다. 공기역학렌즈는 PBMS 전단에서 입자를 집속시키기 위해 일반적으로 널리 사용되고 있는 장비로 여러 개의 오리피스로 이루어져 있다. 공기역학렌즈를 지나는 수송 유체와 입자는 이러한 연속 오리피스를 거치면서 팽창과 수축을 반복하며, 관성력의 차이로 인해 입자가 중앙으로 집속된다. 그러나 기존 공기역학렌즈는 고정된 직경의 오리피스를 사용하기 때문에 설계된 공정조건 이외에는 입자의 집속효율이 감소한다는 단점을 지닌다. 따라서 공정조건이 바뀔 경우 공기역학렌즈를 교체해야 되며, 진공이라는 환경하에서 이러한 교체는 많은 시간과 노력을 요구로 한다. 본 연구에서는 이러한 공기역학렌즈의 문제점을 해결하기 위해 다양한 공정조건에서 교체 없이 사용할 수 있는 새로운 형태의 직경 가변형 공기역학렌즈인 조리개형 공기역학렌즈를 제안하였다. 기존 연구를 통해 조리개형 공기 역학 렌즈가 다양한 압력 범위 내에서 나노입자를 성공적으로 집속할 수 있음을 보였지만, 장비를 상용화하기 위해서는 사용자가 좀 더 쉽게 렌즈직경을 결정 할 수 있어야 한다. 이에 본 연구에서는 조리개형 렌즈의 중공 직경에 따른 입자 집속 특성을 평가하였으며, 최종적으로 압력과 집속하고자 하는 직경에 따라 렌즈 중공 직경을 결정할 수 있게 해주는 데이터 베이스를 제작하였다.

• Korean Journal of Optics and Photonics
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• v.32 no.4
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• pp.153-162
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• 2021

In this article, the design of a variable F-number and triple magnification infrared optical system is described. That is a two-in-one optical system that combines an infrared search and track (IRST) system and an electro-optical tracking system (EOTS), where an afocal optical system is added to the IRST optical system designed already. The performance target is determined by analyzing system performance, and then the specification in the optical system design is calculated. This optical system contains a warm stop making it possible that one optics has two different F/# by cutting the size of aperture, and that is designed to suit this optics. The system satisfies the requirement such as a modulation transfer function (MTF). For operational assessment, the movement of the focusing lens group is analyzed over the change of temperature and target distance. By using this optical system, it is possible to develop equipment having two functions, infrared searching and electro-optical tracking.

• Journal of the Korean Society of Radiology
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• v.14 no.6
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• pp.827-832
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• 2020

X-ray equipment, which is frequently used in radiology and treatment, is the most common and most used equipment in clinical practice. Equipment must provide accurate information to patients through continuous quality control. In case of manual quality control measurement, reproducibility may be poor and there may be a problem with reliability of evaluation results. In this study, an automated program was developed and attempted to measure how much the central ray between the focus of the X-ray tube and the variable aperture of the diagnostic X-ray generator used in clinical practice coincides. As a result of the experiment, it succeeded in calculating the coordinates of the two center points, and the distance between the two points was calculated in pixels and applied to the judgment and the automatic judgment value for whether the center line coincidence is within the normal angle or the abnormal angle is presented. The results of this study are considered to be very helpful in the quality control of the X-ray apparatus.

• Korean Journal of Optics and Photonics
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• v.13 no.4
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• pp.347-355
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• 2002

We have constructed a high efficiency and broad tunable cw Ti:sapphire laser with a four-mirror symmetric Z-type laser cavity to increase the laser usability. From theoretical analyses and experimental data for a symmetric Z-type laser cavity containing a Kerr medium, the cavity mode size and the Kerr-lens mode-locking (KLM) strength for KLM lasers can be confirmed as function of the position in the cavity, the intracavity laser power, and the stability parameter. As a result, the slope efficiency and the maximum average output power of cw Ti:sapphire laser at 5 W pumping power of Ar-ion laser were 31.3% and 1420 ㎽ respectively. The tunablility was ranged from 730 ㎚ to 908 ㎚ with average output power above 700 ㎽. We obtained the KLM operation easily by self-aperturing effect in the Kerr medium and the slope efficiency and the maximum average output power of KLM Ti:sapphire laser was 16% and 550 ㎽ respectively. The spectral bandwidth was 33 ㎚ at the center wavelength of 807 ㎚ and the pulse width was 27 fs with a repetition rate of 82 ㎒.