• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.456-456
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• 2010

CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

• Korean Journal of Microbiology
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• v.34 no.4
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• pp.212-218
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• 1998

An obligately methylotrophic bacterium which produces extracellular polysaccharide (EPS) was isolated through methanol-enrichment culture technique. The isolate was aerobic, nonmotile, and gram negative rod and exibited catalase, but no oxidase, activity. Plasmid, carotenoid, and poly-${\beta}$-hydroxybutyric acid were not found. The guanine plus cytosine content of DNA was 52-56%. The isolate was found to grow only on methanol and monomethylamine. Growth was optimal ($t_d=2.4h$) at $35^{\circ}C$ and pH 6.5 in a mineral medium containing 0.5% (v/v) methanol, 25 mM phosphate, and 0.212% ammonium sulfate. Methanol was assimilated through the ribulose monophosphate pathway. Maximun amount of EPS was produced in cells growing at the mid-stationary growth phase at $30^{\circ}C$ in a mineral medium (PH 6.5) containing 1.0% (v/v) methanol in the CIN ratio of 54.7. Thin-layer chromatographic and high performance liquid chromatographic analysis revealed that the EPS was composed of glucose and galactose. EPS which was not treated with ethanol (Pbe) exhibited stable viscosity under various concentrations of salts and temperatures hut showed high viscosity at low pH. EPS precipitated with ethanol (Pae) was found to be more stable in viscosity than the Pbe at various salt concentrations, temperatures, and pH. The Pae also exhibited higher viscosity than the Pbe and xanthan gum. Scanning electron microscopy revealed that the lyophilized Pbe and Pae have a multi-layered structure and a structure of thick fibers, respectively.

• Korean Journal of Materials Research
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• v.11 no.2
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• pp.94-103
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• 2001

SiO$_2$ and PDMS/SiO$_2$ xerogels which are derived PDMS into TEOS have been synthesized by sol-gel process and controlled pore size and distribution through 2 step acid/base catalyzed processes using HCI and NH$_4$OH as a catalyst. In HCl catalyzed SiO$_2$ and PDMS/SiO$_2$ xerogels, pH and gellation time of xerogel were 2.3~2.5 and 12~13 days, respectively, and the shape of xerogel was identified to pellet type and column type. Under acidic condition of final reaction solution, the hydrolysis rate is accelerating, resulting in long gel times. The shape of xerogel is pellet type. In contrast, under less acidic condition, the condensation rate is accelerating, resulting in shorter gel times and the shape of xerogel is column type. The surface area and average Pore size were changed 400$\rightarrow$600($\m^2$/g) and 15$\rightarrow$28$\AA$, respectively, depending to the increase of the mole ratio of HCl/NH$_4$OH, and represented uniform pore size distribution. It is that all the alkoxide groups are hydrolyzed by HCl after the first step and the condensation rate is enhanced by NH$_4$OH. The regular backbone structures of silica are formed at low temperature and the uniform pores are produced by heat treatment.

• Korean Journal of Materials Research
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• v.7 no.3
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• pp.196-202
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• 1997

Perovskite lanthanum doped lead titanate ($(Pb,La)TiO_{3}$ or PLT) thin films were successfully fabricated on Pt/TijSiO.iSi substrates at the temperatures as low as $440~500^{\circ}C$ by eleclron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVII). Since the volatilities of the MC sources arid oxide molecules (especially Ph oxide) increased with increasing deposition temperature, the film deposition rate and the (I'b + La)/'Ti ratio decreased Stoichiometric perovskite PL'T films with good dielectric and leakeage current properties were obtained at the temperatures of $460~480^{\circ}C$. The lanthanum content of the film was nearly directly propotional to $La(DPM)_{3}$ flow rate. As the La/Ti ratio increased from 3.0 to 9.5%, the dielectric constant increased from 360 to 650 and the leakeage current density at 100kV/cm electric field decreased from $4{\times}10^{-5}$ to $4{\times}10_{-8}A/cm^2$.

• 한국해양학회지
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• v.7 no.1
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• pp.1-14
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• 1972

Seasonal changes in nutrients and suspended organic particulates were measured in the estuary of Nak-dong River in relation to the black laver bed. Monthly measurements of water temperature, pH, dissolved oxygen, nutrients ( $NH_4$-N, $NO_2$-N, $NO_3$\-N, $PO_4$-P and $SiO_2$-Si) and organic suspended particulates (organic carbon and nitrogen) were determined at five stations from February through December, 1970. PH varied 7.6-8.4 with an average of 8.0, and percent saturation of dissolved oxygen were 71-147% with an average of 100.8%. Studies gave evidence that Nak-dong River estuary is strongly enriched with nutrients. Concentrations of nutrients were: 0.13-12.54 ${\mu}g$-atoms/${\iota}$ (averaging 1.63 ${\mu}g$-atoms/${\iota}$) for $NH_4-N$, 0.12-2.09 ${\mu}g$-atoms/${\iota}$ (averaging 0.71 ${\mu}g$-atoms/${\iota}$) for $NO_2-N$, 3.46-56.79 ${\mu}g$-atoms/${\iota}$ (averaging 21.54 ${\mu}g$-atoms/${\iota}$) for $NO_3$-N, 4.04-57.90 ${\mu}g$-atoms/${\iota}$ (averaging 23.79 ${\mu}g$-atoms/${\iota}$) for total soluble nitrogen, 0.18-5.05 ${\mu}g$-atoms/${\iota}$ (averaging 0.96 ${\mu}g$-atoms/${\iota}$) for $PO_4$-P, and 18.33-133.29 ${\mu}g$-atoms/${\iota}$ (averaging 71.57 ${\mu}g$-atoms/${\iota}$) for $SiO_2$-Si, respectively. These nutrient levels were considerably higher compare with other productive laver beds of Wan do and Pyung-il Do in Korea or Ise Bay in Japan. Concentrations of suspended organic particulates varied 55-648 ${\mu}g/{\iota}$ (averaging 392 ${\mu}g/{\iota}$) with organic carbon, 30-155 ${\mu}g/{\iota}$ (averaging 92 ${\mu}g/{\iota}$) with organic nitrogen, and its carbon-nitrogen ratios were varied within 1.5-8.4 with an average of 4.6.

• Korean Journal of Ecology and Environment
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• v.36 no.2 s.103
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• pp.150-160
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• 2003

This study was carried out to assess inhibitory effects of light-blocking on water quality and phytoplankton community in Lake Juam from August to November 2000. The values of water temperature, DO, TN, $NO_3-N$, $NH_4-N$, TP, DIP, COD, SS and PH did not show clear differences between inside and outside light-blocked areas. Concentrations of Chl-a decreased -6.6${\sim}$40% (mean 14.7%) from inside of the light-blocked area by light blocking. During the study, 55 species of phytoplankton were indentified, and the dominant species were Microcystis aeruginosa, Aulacoseira granulata, Peridinium sp., Synedra spp., Oscillatoria sp., Fragilaria construens, and Trachelomonas sp. The successional pattern of dominant phytoplankton was diatoms (July)${\to}$ diatoms/cyanophytes (August-September)${\to}$cyanophytes (October)${\to}$ diatoms (October-November). The standing crop of phytoplankton showed maximum density in 22 September with $1.1{\times}10^4$cells/L, and minimum in 25 October with $4.7{\times}10^3$ cells/L. The decreasing efficiency of standing crop by light-blocking was 8${\sim}$38% (mean 19.9%). Through this study we found that blocking light seems to have a decreasing effect on the density of phytoplankton.

• Korean Journal of Food Science and Technology
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• v.28 no.1
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• pp.8-14
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• 1996

The effects of temperature variations during storage, pasteurization on the quality of orange juices were investigated. To evaluate the quality of orange juices pasteurized at 75, 85 and $95^{\circ}C$ for 15 sec, microbial and physicochemical measurements and sensory evaluations were conducted during storage at 10, 20 and $30^{\circ}C$ for 32days. Color(lightness) and contents of vitamin C and sucrose were not changed at $10^{\circ}C$, but decreased at $20^{\circ}C$ and $30^{\circ}C$ as the storage time was increased. The pasteurization temperature had a little effect on the color and the contents of vitamin C and sucrose. Furfural contents were apparently increased as the storage period extended, but the samples stored at $10^{\circ}C$ had less amounts than the others. On the other hand, the pasteurization temperature did not affect furfural accumulation. Furfural was produced as a result of the degradation of vitamin C and deterioration of the color. The PH values were not changed during the entire storage period, and microorganisms were not detected in most of the samples. The result of sensory evaluation indicated no taste difference between the control and the sample stored at $10^{\circ}C$, but the taste changes were recognized when the samples were stored over 24 and 20 days at $20^{\circ}C$ and $30^{\circ}C$, respectively. Therefore, the storage temperature affected the quality of orange juices more markedly than the pasteurization temperature, and the storage at lower temperature appears to reduce the deterioration of orange juices.

• Resources Recycling
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• v.4 no.1
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• pp.12-19
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• 1995

This study was carried out to remove the iron and impurities usmg hydrocyclone and HGMS for recycling of sludge from the granite stone cutting and polishing industrγ in the basic of chemi떠1 analysis and minerallogical investigation. This sludge consist of 70.9% $SiO_2$ 13.6% $Al_2O_3$ and It also contained 2.52% of $Fe_2O_7$ and 0.29% of $TiO_2$, as a main impurities to decrease the whiteness. As the result of hydrocyclone experiment, It was very good condition that are 100~150 g/l of sludge amount, 2.0~ 2.5 mm of underflow nozzle size, and 1.2~1.6 kg/$\textrm{cm}^2$ of pressure for 85% sludge product with the $-37{\mu}\textrm{m}$ size. $Fe_2O_3$ and $TiO_2$, contents by treatment of HGMS were decreased with 0.65% and 0.07% each at 10,000 gauss of magnetic field strength, and addih$\upsilon$n of Sodium tripolyphosphate as a dispersant was effected to get low grade F Fe,Ol and TiO, concentrate. PhYSIcal properties of this stone sludge product were showed 58.5% of whiteness, 1 13.4% of firing shrinkage and 3.0812 $\textrm{m}^2$/g of specific surface area.

• Journal of the Korean Society of Marine Environment & Safety
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• v.12 no.2 s.25
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• pp.75-79
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• 2006

In order to study the characteristics of water quality in coastal water and mechanism of phytoplankton blooms, factors of water quality were investigated in diatom bloom area due to rainfall event and no diatom bloom area Diatom blooms occurred after heavy rain and the dominant species were Skeletonema costatum($1,200{\sim}5,000cells/mL$) and Thalassiosira spp.($750{\sim}1,200cells/mL$). In diatom bloom area, water temperature, pH, and dissolved oxygen were observed at higher level than in no diatom bloom area Although these two areas were only 20 meters apart from each other, sharp difference in coastal water quality between two areas was observed. In diatom bloom area, concentrations of nitrogen, phosphorus, and silicate were observed at lower level than in no diatom blooms area. This seems to be due to inflow of much trace metal such as Fe, Mo, Se and so on than nitrogen, phosphorus, and silicate by rainfall events. However, distinct differences in DIN/DIP and $DIN/SiO_2-Si$ between these two areas were not observed.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.41 no.4
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• pp.401-411
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• 2015

This study was performed to investigate the wound healing effect of skin regeneration cosmetics utilizing low molecular weight Polydeoxynucleotide (PDRN). High purity PDRN was prepared from salmon testes poly-deoxy-ribonucleotide through protein and toxin removal process and molecular weight reduction. In order to evaluate the wound healing effect of PDRN in SD rats, 4 sites of dorsal skin of each animal were excised by using biopsy punch and $500{\mu}L$ of test solution was topically applied once daily for 4 weeks. The tissue changes were observed for every week during the application periods. After applying the PDRN to the wound, the skin was cut flower and contraction of the wounds more quickly, and the coating of PDRN in the wound area was reduced significantly as compared to the positive control group $Fucidin^{(R)}$ applied. The microscopic observation of stained tissue showed that a positive control was most rapid in re-epithelialization ability followed by the PH group, PDRN group, HA group. In addition, transforming growth factor ($TGF-{\beta}$) and vascular endothelial growth factor (VEGF), such as in the growth factor was similar to the results of staining of tissue lesions. In conclusion, it is determined that the low molecular weight PDRN has the therapeutic effect to the wound, and could be used as a functional material of cosmetics and medical industries.