Ohmic Contact Formation of SiC for Harsh Environment MEMS Using a TiW Thin-film (TiW 박막을 이용한 극한 환경 MEMS용 3C-SiC의 Ohmic contact 형성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.04b
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- pp.133-136
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- 2004