• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.59-62
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• 1996

The effect of NiO addition on the microstructure and microwave dielectric properties of (Zr$_{0.8}$Sn$_{0.2}$)TiO$_4$(ZST) was investigated. With the NiO addition, a dense ZST body of density higher than 95% has been achieved in the sintering temperature range of 1400 to 150$0^{\circ}C$. Energy dispersive X-ray spectrometry (EDS) analysis of sintered specimen shows the presence of second phase at grain boundaries, which is considered to be NiTiO$_3$. Dielectric constant of the specimen is found to increase linearly with density. Q-values and TC$_{f}$decrease with increasing NiO content. The variation of dielectric properties with NiO content is discussed in term of the second phase. The ZST ceramics with small amount of additive gave $\varepsilon$$_{r}$=38, Q=7000 at 7 GHz and TC$_{f}$=-0.5 ppm/$^{\circ}C$, comparable with the values obtained by previous investigation.stigation.

• 한국세라믹학회지
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• 제42권9호
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• pp.624-630
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• 2005

To investigate the possibility of the $ZrO_2$ buffer layer as the insulator for the Metal-Ferroelectric-Insulator-semiconductor (MFIS) structure, $ZrO_2$ and $SrBi_2Ta_2O_9$ (SBT) thin films were deposited on the P-type Si(111) wafer by the R.F. magnetron-sputtering method. According to the process with and without the post-annealing of the $ZrO_2$ buffer layer and SBT thin film, the diffusion amount of Sr, Bi, Ta elements show slight difference through the Glow Discharge Spectrometer (GDS) analysis. From X-ray Photoelectron Spectroscopy (XPS) results, we could confirm that the post-annealing process affects the chemical binding condition of the interface between the $ZrO_2$ thin film and the Si substrate. Compared to the MFIS structure without the post-annealing of the $ZrO_2$ buffer layer, memory window value of MFlS structure with post-annealing of the $ZrO_2$ buffer layer were considerably improved. The window memory of the Pt/SBT (260 nm, $800^{\circ}C)/ZrO_2$ (20 nm) structure increases from 0.75 to 2.2 V under the applied voltage of 9 V after post-annealing.

• 한국결정성장학회지
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• 제30권4호
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• pp.131-135
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• 2020

단결정상을 가지는 CaZrO₃ : Eu³⁺ 형광체를 스컬용융법으로 합성하였다. 합성된 형광체의 결정구조, 형태 및 광학적 특성은 XRD, SEM, UV 형광반응 및 PL을 분석하였다. 출발 원료는 CaO : ZrO₂ : Eu₂O₃를 0.962 : 1.013 : 0.025 mol%로 하여 냉각도가니에 충진하였다. 냉각도가니는 내부 직경 120 mm, 높이 150 mm이며, 혼합된 파우더 3 kg은 3.4 MHz의 출력 주파수로 1시간 이내에 완전히 용융되어 2시간 동안 유지시킨 후 자연냉각 시켰다. XRD 측정에서는 다른 결정상은 측정되지 않았으며 페로브스카이트 구조의 정방정계로 분석되었다. 합성된 형광체는 UV 광에 의해 여기 될 수 있고 방출 스펙트럼 결과는 615 nm에서 자기 쌍극자 전이 ⁵D₀→⁷F₂로 인해 CaZrO₃ : Eu³⁺의 밝은 적색 발광이 우세하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.965-968
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• 2004

Effective transverse Piezoelectric Coefficients $(e_{31,f})$ of thick PZT $(Pb(Zr_{0.52}Ti{0.48}Ti_{0.48})O_3)$ films on $SiN_x/Si$ substrates were measured with PZT thicknesses and top electrode dimensions. $e_{31,f}$ is one of important Parameters characterizing Piezoelectricity of PZT films. Thick PZT films have been used as various sensors and actuators because of their high driving force and high breakdown voltage. Thick PZT films were fabricated on Pt/Ta/$SiN_x$/Si substrates using sol-gel method. Thicknesses of PZT films were $1{\mu}m$ and $1.8{\mu}m$. $|e_{31,f}|$ values of $1.8{\mu}m$-thick-PZT films were higher than those of $1{\mu}$-thick-PZT films. Maximum $|e_{31,f}|$ of $1.8{\mu}$-thick-PZT films was about $50^{\circ}C/m^2$.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• 한국결정성장학회지
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• 제24권4호
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• pp.140-144
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• 2014

Co(0.7 wt%)와 Pr(2.0, 3.5 및 5.0 wt%)이 첨가된 큐빅지르코니아($ZrO_2:Y_2O_3=50:50wt%$) 단결정을 스컬용융법으로 성장 후 $N_2$ 분위기에서 $1150^{\circ}C$로 5시간 동안 열처리 하였다. 갈색의 단결정들은 각각 어두운 갈녹색, 녹청색 또는 밝은 녹색으로 변화되었다. 열처리 전 후의 YSZ 단결정들을 직경 7.5, 두께 3 mm의 웨이퍼로 연마 하여 UV-VIS 분광광도계 및 XRD(X-ray diffraction)로 광학적 또는 구조적 특성 분석을 행하였다. $Co^{2+}$(약 589 nm: ${\Gamma}_8[^4A_2(^4F)]{\rightarrow}{\Gamma}_8+{\Gamma}_7[^4T_1(^4F)]$, 약 610 nm: ${\Gamma}_8[^4A_2(^4F)]{\rightarrow}{\Gamma}_8[^4T_1(^4F)]$, 약 661 nm: ${\Gamma}_8[^4A_2(^4F)]{\rightarrow}{\Gamma}_6[^4T_1(^4F)]$ 및 $Pr^{3+}$(약 450 nm: ${^3}H{_4}-{^3}P{_2}$, 약 473 nm: ${^3}H{_4}{\rightarrow}{^3}P{_1}$, 약 484 nm: ${^3}H{_4}{\rightarrow}{^3}P{_0}$)에 의한 흡수, 이온화에너지 및 격자상수 변화를 확인하였다.

• 한국재료학회지
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• 제12권4호
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• pp.269-273
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• 2002

The NASICON solid electrolyte films, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$(1.5< x < 2.3), was prepared from ceramic slurry by modified doctor-blade process. The NASICON solid electrolyte and fabricated sensors, Pt-electrode/NASICON/Carbonate$(Na_2CO_3-K_2CO_3CaCO_3\; system)$ electrode, were investigated to measure phase, microstructure and e.m.f variation for sensing $CO_2$ concentration. The uniform grain size of $2-4{\mu}m$ and major phase of sodium zirconium silicon phosphate phase, $Na_{1+x}Zr_2Si_xP_{3-x}O_{12}$was identified with X-ray diffraction patterns and scanning electron microscopy, respectively. The Nernst's slope of 84 mV/decade for $CO_2$ concentration from 500 to 8000 ppm was obtained at operating temperature of $400^{\circ}C$.

• The Korean Journal of Ceramics
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• 제5권2호
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• pp.171-177
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• 1999

In the $(Pb_{1-x}M_x)[(Mn_{1/3}Sb_{2/3})_{0.05}Zr_yTi_{0.95-y}]O_3$ system, where M=Ca and Sr, the piezoelectric properties were evaluated to examine the possibility of application to piezoelectric transformer. A Rosen-type piezoelectric transformer was formed, then the electrical properties of voltage step-up ratio, frequency characteristics etc. were analysed. The morphotropic phase boundary was determined to be y=0.475 in $Pb[(Mn_{1/3}Sb_{2/3})_{0.05}Zr_yTi_{0.95-y}]O_3$ system and the piezoelectric properties of this composition was kp=0.59, Qm=1600 and $\varepsilon_r$=1150. Moreover, when 1-2 mol% of Sr are substituted, enhanced piezoelectric properties of kp=0.61, Qm=1600 and $\varepsilon_r$=1400 were shown. The temperature rising (ΔT) of a piezoelectric transformer with $Pb[Mn_{1/3}Sb_{2/3})_{0.05}Zr_{0.475}Ti_{0.475})]O_3 $ composition was $10^{\circ}C$, and the voltage step-up ratio was 500 when the output voltage was 4000V, whereas the ΔT was below $3^{\circ}C$ and the resonant frequency variation ($\Delta f_r$) as a function of load resistance was below 5% when the output voltage was 2000 V. These characteristics are superior to the properties of materials, which were substituted by Ca or without substitution.

• 한국표면공학회지
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• 제41권5호
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• pp.232-239
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• 2008

The dental orthodontic mini-screw requires good mechanical properties and high corrosion resistance for implantation in the bone. The purpose of this study was to investigate the electrochemical characteristics of TiN and ZrN coated orthodontic mini-screws, mini-screws were used for experiment. Ion plating was carried out for mini-screw using Ti and Zr coating materials with nitrogen gas. Ion plated surface of each specimen w as o bserved with f ield emission scanning e lectron microscopy ( FE-SEM), e nergy dispersive x-ray spectroscopy (EDX), and electrochemical tester. The surface of TiN and ZrN coated mini-screw were more smooth than that of other kinds of non-coated mini-screw due to dercrease of machined defects. The corrosion current density of the TiN and ZrN coated mini-screw decreased compared to non-coated sample. The corrosion potential of TiN and ZrN coated mini-screw were higher than that of non-coated mini-screw in 0.9% NaCl solution. The pitting corrosion resistance increased in the order of ZrN coated, TiN coated and non-coated wire. Pitting potential of ZrN coated mini-screw was the highest in the other specimens.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1996년도 제11차 KACG 학술발표회 Crystalline Particle Symposium (CPS)
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• pp.55-85
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• 1996

지르코니아 분말은 ZrO2 결정상이 온도변화에 따라 부피변화를 수반하는 상전이변태를 나타낸다. 단사정 ZrO2가 110$0^{\circ}C$에서는 정방정으로, 2$700^{\circ}C$ 내외에서는 입방정으로 결정구조가 가역적으로 변한다. 이 ZrO2에 금속산화물을 고용시키면 형석 (CaF2:Florite)형의 입방정 결정구조가 실온에서도 안정하게 존재하게 된다. 안정화제 산화물은 caO, MgO등 2가 산화물외에 3가 또는 4가의 금속산화물로서 Sc2O3, Y2O3, Sm2O3, Nd2O3, Gd2O3, Y2O3, CeO2 등이며 이들은 금속이온의 원자가가 변하기 쉬운 희토류 산화물이다. 안정화 지르코니아는 형석형 결정구조이며 결정화학적으로 보면 금속양이온이 산소이온에 대해서 정육면체형의 8배위를 하고 있다. 이때 이온반경비(양이온/음이온)에 따라 Zr+4자리와 O-2자리의 격자위치와 모양이 형성되므로 비틀어진 정육면체구조이건 이상적인 정육면체 형석구조를 이룬다. 이는 지르코니아의 결정상의 2상-3상인 부분안정화 지르코니아다결정체(PSZ : partially stabilized zirconia)이거나 단일상-2상인 정방정 지르코니아다결정체(TZP : tetragonal zirconia polycrystal)의 결정구조를 가지는데 기인한다. PSZ는 주로 MgO, CaO를 안정화제로 고용시켜 입방정 영역에서 소결하고 이를 다시 입방정과 정방정의 상 영역에서 열처리하여 입방정 입자내부에 정방정을 석출 형성시킨 것이며 TZP는 Y2O3 및 CeO2를 고용시켜 PSZ와 다르게 일반적인 상압소결한 정방정 결정상의 미립자이다. 산화지르코늄 분말은 지르콘사에서 열분해시킨 지르코늄소결.융해괴(caustic fusion clinker)를 산처리하여얻어진 지르코늄산용액(zirconyl acid solution : cloride, sulfide, nitride 등)으로부터 제조된다. 고순도 산화지르코늄은 용액 결정석출법에 의해 ZrOCl2.8H2O, 5ZrO2.3SO3.15H2O, ZrO(NO3)2.xH2O 등의 지르코늄 수화물만을 재결정화시킨 것으로부터 얻을 수 있으며 이 지르코늄염 수용액으로부터 입자미세구조를 효과적으로 제어하여 산화지르코늄 및 안정화 지르코니아 분말제조가 가능하다. 안정화 지르코니아 분말은 ZrO2와 안정화산화물의 고용을위하여 가열처리를 필요로 하며 일정온도에서 최적상태로 숙성하므로서 2가지 상(phase) 이상의 고용체를 가지게 된다. 안정화 지르코니아 분말은 고용처리온도를 낮추고 효과적으로 생성시키기 위해서는 지르코늄 및 안정화제염을 혼합하고 습식 직접합성하여 저온에서 고용체의 합해진상 영역을 생성시키는 것이다. 이는 지르코니아 원료분말의 미세구조를 제어하므로서 가능하며 이때 화학성분조성과 크기형태가 균일하게 분포된 입자분말을 얻을 수 있다.