• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.441-446
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• 2003

The chemical mechanical polishing (CMP) process is now widely employed in the ultra large scale integrated (ULSI) semiconductor fabrication. Especially, shallow trench isolation (STI) has become a key isolation scheme for sub-0.13/0.10${\mu}{\textrm}{m}$ CMOS technology. The most important issues of STI-CMP is to decrease the various defects such as nitride residue, dishing, and tom oxide. To solve these problems, in this paper, we studied the planarization characteristics using slurry additive with the high selectivity between $SiO_2$ and $Si_3$$N_4$ films for the purpose of process simplification and in-situ end point detection. As our experimental results, it was possible to achieve a global planarization and STI-CMP process could be dramatically simplified. Also, we estimated the reliability through the repeated tests with the optimized process conditions in order to identify the reproducibility of STI-CMP process.

• Proceedings of the KIEE Conference
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• 2006.07b
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• pp.1269-1270
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• 2006

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. According to the CMP removal rates and particle size distribution, and the micro-structures of surface layer as a function of oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry.

• Journal of the Korean Applied Science and Technology
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• v.6 no.1
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• pp.15-19
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• 1989

The oxidative stability of palm oil with moisture addition during heationg was investigated and the antioxidant effects of tocopherol, citric acid and sodium polyphosphate were evaluated. The addition of natural tocopherol up to 200 ppm level did not improve the oxidative stability of palm oil with moisture (1m1 $H_2O$ additive to 200g of oil at $180^{\circ}C$). The maximum antioxidant effect was observed at the Concentration of 400 ppm. Addition of citirc acid did not influence the effective concentration of tocopherol. Whereas addition of sodium polyphosphate and citric acid increased the antioxidant effect of tocopherol. The maximum synergistice effect was observed at the concentrations of 50 ppm citric acid and 50 ppm of sodium polyphosphate. Addition of 50 ppm citric acid and 50 ppm sodium polyphosphate to 100 ppm of tocopherol exceeded the antioxidant effect of 400 ppm tocopherol alone.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1729-1730
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• 2006

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. According to the CMP removal rates and particle size distribution, and the micro-structures of surface layer as a function of oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_{2}O_{3}$ abrasive particles in CMP slurry.

• Journal of Ocean Engineering and Technology
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• v.25 no.3
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• pp.28-33
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• 2011

The thermal shock properties of SiC materials were investigated for high temperature applications. In particular, the effect of thermal shock temperature on the flexural strength of SiC materials was evaluated, in conjunction with a detailed analysis of their microstructures. The efficiency of a nondestructive technique using ultrasonic waves was also examined for the characterization of SiC materials suffering from a cyclic thermal shock history. SiC materials were fabricated by a liquid phase sintering process (LPS) associated with hot pressing, using a commercial submicron SiC powder. In the materials, a complex mixture of $Al_2O_3$ and $Y_2O_3$ powders was used as a sintering additive for the densification of the microstructure. Both the microstructure and mechanical properties of the sintered SiC materials were investigated using SEM, XRD, and a three point bending test. The SiC materials had a high density of about 3.12 Mg/m3 and an excellent flexural strength of about 700 MPa, accompanying the creation of a secondary phase in the microstructure. The SiC materials exhibited a rapid propagation of cracks with an increase in the thermal shock temperature. The flexural strength of the SiC materials was greatly decreased at thermal shock temperatures higher than $700^{\circ}C$, due to the creation of microcracks and their propagation. In addition, the SiC materials had a clear tendency for a variation in the attenuation coefficient in ultrasonic waves with an increase in thermal shock cycles.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1624-1626
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• 2004

This study was to measure the minuteness structure, piezoelectric properties of (0.3-x)PMN- xPSS -0.7PZT+0.5[wt%]NiO+0.5(wt%)$MnO_2$ (x=0.05, 0.10, 0.15, 0.20, 0.25)ceramics according to sintering temp- erature and PSS(mol%) after manufacturing the specimens with a general method. the results of this study were gotten such as follows. The crystal structure of ceramic has the rombohedral structure in XRD. It appeared that addition of Ni, Mn additive was helpful to the formation of stable structure. The electrome- chanical coupling coefficient(kp) showed good properites on the whole, showed its maximum value 25.94[%] in specimens sintered at 1100[$^{\circ}C$], x=0.25mol. The mechanical quality coefficient(Qm) showed its maximum value 272.42 in specimens sintered at 1150[$^{\circ}C$], x=0.05mol. and was decreased by increasing PSS[mol%] The temperature coefficient of the resonant frequency(TCFr) showed stable properties in all sintering temperature with x=0.05mol. Especially good stability of 0.0054[%/$^{\circ}C$] showed in specimens sintered at 1100$^{\circ}C$, x=0.05mol.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.764-767
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• 2004

This study was to measure the minuteness structure, dielectric properties of (0.3-x)PMN - XPSS-0.7PZT+0.5wt%NiO+0.5wt%$MnO_2$(x=0.05, 0.10, 0.15, 0.20, 0.25)ceramics according to sintering temperature and PSS moi percentage after manufacturing the specimens with a general method. the results of this study were gotten such as follows. The crystal structure of ceramic has the rombohedral structure in XRD. it appeared that addition of Ni, Mn additive was helpful to the formation of stable structure. Dielectric constant at $20^{\circ}C$ showed its maximum value 890.001 in specimens sintered at $1000^{\circ}C$, x=0.15mol. and dielectric loss showed its minimum value 6.95[%] in specimens sintered at $1000^{\circ}$, x=0.05mol. The variation rate of dielectric constant according to the change of frequency was decreased by increasing frequency, The variation rate of dielectric constant according to the change of temperature was increased by increasing temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.461-462
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• 2008

$BaMgAl_{10}O_{17}$:Mn, $Eu^{2+}$ green phosphors has been synthesized by the solid state reaction. Green phosphors of nano-size were manufactured in short time by shake method. which were easily manufactured respectively general method. Green phosphors of nano size were control additive, size of $ZrO_3$ ball, shake time and weight of ball in toluene. In result that green phosphors were obtained particle size of 140nm~150nm. The characteristics of fired samples were obtained by 365nm and 380nm excitation source under ultraviolet. In result that the highest PL intensity were observed in wavelength of 365nm.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2008.11a
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• pp.67-71
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• 2008

Blast Furnace slag a pigiron waste that is produced more than 800 thousand tons per year, and micronized double quenching blast furnace slag improves flexibility of concrete, and even shows improvement effect of long-term intensity. However, the concrete that used micronized double quenching blast furnace slag is restricted in its use because of many problems to assure early intensity. Even micronized blast furnace slag can assure its early intensity of concrete when maximizing, and is considered that can be applied in high strength of blast furnace slag as an alternation material for Silica-fume that depends on overall import. Hereby this paper is revised activity index and fluidity of mortar that used Nano Slag that is produced by rotten Nano crush equipment to propose its size, and possible utility of Nano Slag that was produced by blast furnace slag made in Korea as an alternation material, with the conclusion as following. 1. To measure micronized Nano slag, it is judged that it should be in progress with BET method that is based on micronized Silica-fume for concrete. 2. As a result, the test based on KS L ISO 679 is shown to satisfy the basic additive size of KS F 2563 and of KS F 2567, and to determine new combination of stipulations. 3. The strength development of Nano Slag was shown excellent in the daily initial installment of 1, 3, 7 days against the basic additive. This is judged that contains CaO controlling initial strength against Silica-fume, and contributes to higher fineness than the basic blast furnace slag 1 type.

• Journal of Environmental Science International
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• v.27 no.10
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• pp.809-820
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• 2018

DeNOx experiments for the effects of hydrocarbon additives on diesel SNCR process were conducted under oxidizing diesel exhaust conditions. A diesel-fueled combustion system was set up to simulate the actual cylinder and head, exhaust pipe and combustion products, where the reducing agent $NH_3$ and $C_2H_6/diesel$ fuel additives were separately or simultaneously injected into the exhaust pipe, used as the SNCR flow reactor. A wide range of air/fuel ratios (A/F=20~40) were maintained, based on engine speeds where an initial NOx level was 530 ppm and the molar ratios (${\beta}=NH_3/NOx$) ranged between 1.0~2.0, together with adjusting the amounts of hydrocarbon additives. Temperature windows were normally formed in the range of 1200~1350K, which were shifted downwards by 50~100K with injecting $C_2H_6/diesel$ fuel additives. About 50~68% NOx reduction was possible with the above molar ratios (${\beta}$) at the optimum flow #1 ($T_{in}=1260K$). Injecting a small amount of $C_2H_6$ or diesel fuel (${\gamma}=hydrocarbon/NOx$) gave the promising results, particularly in the lower exhaust temperatures, by contributing to the sufficient production of active radicals ($OH/O/HO_2/H$) for NOx reduction. Unfortunately, the addition of hydrocarbons increased the concentrations of byproducts such as CO, UHC, $N_2O$ and $NO_2$, and their emission levels are discussed. Among them, Injecting diesel fuel together with the primary reductant seems to be more encouraging for practical reason and could be suggested as an alternative SNCR DeNOx strategy under diesel exhaust systems, following further optimization of chemicals used for lower emission levels of byproducts.