• 제목/요약/키워드: $YBa_2$$Cu_3$$O-{7-$\delta$}$film.

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$CeO_2$의 상전이에 따른 YBCO 박막의 결정성 및 특성의 변화 (Effect of buffer layer on YBCO film deposited on Hastelloy substrate)

  • 김성민;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.873-875
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    • 1999
  • We have fabricated good quality superconducting $YBa_{2}Cu_{3}O_{7-\delta}$ thin films on Hastelloy(Ni-Cr-Mo alloys) metallic substrate with $CeO_2$ and $BaTiO_3$ buffer layers in-situ by pulsed laser deposition in a multi-target processing chamber. We have chosen $CeO_2$ as a buffer layer which has cubic structure of $5.41{\AA}$ lattice parameter and only 0.2% of lattice mismatch with YBCO. $CeO_2$ layer may be helpful for power transmission due to its conducting property. In order to enhance the crystallization of YBCO films on metallic substrates. we deposited $CeO_2$ and $BaTiO_3$ buffer layers at various temperatures. The YBCO superconducting tape fabricated with $BaTiO_3$ and $CeO_2$ buffer layers shows 85K of transition temperature and about $8.4{\times}10^4A/cm^2$ of critical current density at 77K.

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R-면 사파이어 기판 위에 제작된 계단형 모서리 조셉슨 접합의 특성 (Fabrication and Characterization of Step-Edge Josephson Junctions on R-plane Al$_2O_3$ Substrates)

  • 임해용;김인선;김동호;박용기;박종철
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.147-151
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    • 1999
  • YBCO step-edge Josephson junction were fabricated on sapphire substrates. The steps were formed on R-plane sapphire substrates by using Ar ion milling with PR masks. The step angle was controlled in the wide range from 25$^{\circ}$ to 50$^{\circ}$ by adjusting both the Ar ion incident angle and the photoresist mask rotation angle relative to the incident Ar ion beam. CeO$_2$ buffer layer and in-situ YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) thin films was deposited on the stepped R-plane sapphire substrates by pulsed laser deposition method. The YBCO film thickness was varied to obtain the ratio of film thickness to step height in the range from 0.5 to 1. The step edge junction exhibited RSJ-like behaviors with I$_cR_n$ product of 100 ${\sim}$ 300 ${\mu}$V, critical current density of 10$^3$ ${\sim}$ 10$^5$ A/ cm$^2$ at 77 K.

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고온초전도 다층박막의 성장과 마이크로파 필터의 개발 (Growth of high-$T_{c}$ Superconducting Multilayer thin films and Fabrication of Microwave Filter)

  • 강광용;김철수;곽민환
    • 한국초전도저온공학회:학술대회논문집
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    • 한국초전도저온공학회 2003년도 학술대회 논문집
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    • pp.287-290
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    • 2003
  • For microwave device applications, c-axis oriented high temperature superconducting YBa$_2$Cu$_3$O$_{7-{\delta}}$ (HTS-YBCO) epitaxial thin films on the r-cut sapphire substrate(Al$_2$O$_3$) were prepared. In order to reduce the lattice mismatch with a substrate and to enhance the crystallity of HTS thin films, CeO$_2$ buffer layer on the r-cut sapphire substrate was grown by the RF-magnetron sputtering. The YBCO films on the CeO$_2$ buffer layer were deposited using the pulsed-laser deposition (PLD) method. These HTS YBCO /CeO$_2$/Al$_2$O$_3$ multilayer thin films(30 $\times$ 30 mm$^2$) routinely exhibited a critical temperature(T$_{c}$) of 89 K from the R-T measurement. Using HTS YBCO/CeO$_2$ /Al$_2$O$_3$ multilayer thin film. We fabricated and characterized the microwave passive devices (planar type filters) with cryopack-age such as the coupled -line type low-pass filter (LPF) and the open-loop meander type bandpass filter (BPF).filter (BPF).).

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Growth behavior of YBCO films on STO substrates with ZnO nanorods

  • Oh, Se-Kweon;Lee, Cho-Yeon;Jang, Gun-Eik;Kim, Kyoung-Won;Hyun, Ok-Bae
    • 한국초전도ㆍ저온공학회논문지
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    • 제11권4호
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    • pp.16-19
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    • 2009
  • The influence of nanorods grown on substrate prior to YBCO deposition has been investigated. We studied the microstructures and characteristic of $YBa_2Cu_3O_{7-\delta}$ films fabricated on $SrTiO_3$ (100) substrates with ZnO nanorods as one of the possible pinning centers. The growth density of ZnO nanorods was modulated through Au nanoparticles synthesized on top of the STO(100) substrates with self assembled monolayer. The density of Au nanoparticles is approximately $240{\sim}260\;{\mu}m^{-2}$ with diameters of 41~49 nm. ZnO nanorods were grown on Au nanoparticles by hot-walled PLD with Au nanoparticles. Typical size of ZnO nanorod was around 179 nm in diameter and $2{\sim}6\;{\mu}m$ in length respectively. The ZnO nanorods have apparently randomly aligned and exhibit single-crystal nature along (0002) growth direction. Our preliminary results indicate that YBCO film deposited directly on STO substrate shows the c-axis orientation while YBCO films with ZnO nanorods exhibit any mixed phases without any typical crystal orientation.

비정질 금속 기판상에 증착된 YBCO 박막의 결정성에 대한 CEO$_2$ 완충막의 효과 (Effect of CeO$_2$ buffer layer on the crystallization of YBCO thin film on Hastelloy substrate)

  • 김성민;이상렬
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.392-396
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    • 1999
  • Superconducting YBa$_2Cu_3O_{7-{\delta}}$(YBCO) thin films were grown on Hastelloy(Ni-Cr-Mo alloys) with CeO$_2$ buffer layer in-situ by pulsed laser deposition in a multi-target processing chamber. To apply superconducting property on power transmission line, we have deposited YBCO thin film on flexible metallic substrate. However, it is difficult to grow the YBCO films on flexible metallic substrates due to both interdiffusion problem between metallic substrate and superconducting overlayers and non-crystallization of YBCO on amorphous substrate. It is necessary to use a buffer layer to overcome the difficulties. We have chosen CeO$_2$ as a buffer layer which has cubic structure of 5.41 ${\AA}$ lattice parameter and only 0.2% of lattice mismatch with 3.82 ${\AA}$ of a-axis lattice parameter of YBCO on [110] direction of CeO$_2$ In order to enhance the crystallization of YBCO films on metallic substrates, we deposited CeO$_2$ buffer layers with varying temperature and 02 pressure. By XRD, it is observed that dominated film orientation is strongly depending on the deposition temperature of CeO$_2$ layer. The dominated orientation of CeO$_2$ buffer layer is changed from (200) to(111) by increasing the deposition temperature and this transition affects the crystallization of YBCO superconducting film on CeO$_2$ buffered Hastelloy.

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스퍼터링 증착된 Y-Ba-Cu-O계 박막의 열처리 전 조성이 열처리 후 박막의 초전도특성 및 미세구조에 미치는 영향 (Effects of composition of preannealed Y-Ba-Cu-0 thin films deposited by sputtering on the superconducting properties and microstructure of post-annealed thin films)

  • 조해석;김형준
    • 한국재료학회지
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    • 제1권1호
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    • pp.54-61
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    • 1991
  • $YBa_2Cu_3O_{7-\delta}$ 단일 타게트를 사용하여 R. F. 마그네트론 스퍼터링법으로 MgO(100), Si(100)기판 위에 박막을 증착한 후, $880^{\circ}C$의 산소 분위기에서 1시간 동안 열처리를 하였다. 열처리 전 박막의 미세한 조성변화에 의해서도 열처리 후 박막의 미세구조 및 전기적 특성은 크게 변화했다. MgO(100)기판의 표면에 성장되는 입자들은 선택 배향적으로 성장하려는 경향을 가지므로 가늘고 길쭉한 입자 형상을 띠는 반면에 이들 입자위에 성장되는 다른 입자들은 결정 성장 방향의 선호도가 없으므로 둥근 모양의 입자형상을 가진다. 열처리 전 박학의 조성이 1-2-3을 벗어나면 증착 후 열처리할 때 액상이 형성되며, 액상의 양이 많을수록 선택 배향적 성장이 용이해져 texture를 쉽게 이룬다. 그러나 이러한 액상은 냉각 시에 초전도입자의 입계에 이차상으로 형성되기 때문에 초전도 박막의 전기적 특성, 특히 임계온도를 저하시킨다. 또한 $T_{c,\;zero}$$T_{c,\;on}$에 비해서 입계에 형성되는 이차상의 영향을 더 크게 받는다.

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HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS PREP ARED BY PULSED LASER DEPOSITION

  • Park, Yong-Ki;Kim, In-Seon;Ha, Dong-Han;Hwang, Doo-Sup;Huh, Yun-Sung;Park, Jong-Chul
    • 한국표면공학회지
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    • 제29권5호
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    • pp.430-436
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    • 1996
  • We have grown superconducting thin films on various substrates using a pulsed laser deposition (PLD) method. $YBa_2Cu_3O_7-\delta$ (YBCO) superconducting thin films with the superconducting transition temperature ($T_{c. offset}$) of 87K were grown on Si substrates using yittria-stabilized zirconia (YSZ) and $CeO_2$ double buffer layers. We have developed a large area pulsed laser deposition system. The system was designed to deposit up to 6 different materials on a large area substrate up to 7.5cm in diameter without breaking a vacuum. The preliminary runs of the deposition of YBCO superconducting thin films on $SrTiO_3$ substrate using this system showed a very uniform thickness profile over the entire substrate holder area. $T_{c}$ of the deposited YBCO thin film, however, was scattered depending on the position and the highest value was 85K.

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펄스 레이저 증착법에 의한 금속기판상 초전도 박막의 증착 (Growth of superconducting thin film on metallic substrate by pulsed laser deposition)

  • 정영식;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1298-1300
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    • 1997
  • 금속기판상 초전도 $YBa_2CU_3O_{7-{\delta}}$ (YBCO) 박막을 yttria-stabilized zirconia (YSZ) 완충막을 이용하여 in situ 펄스 레이저 증착법에 의해 증착하였다. YBCO 박막을 직접 금속기판에 증착하게 되면 YBCO 박막과 금속기판 사이의 계면에서 상호확산현상이 발생하기 때문에 이를 방지하기 위해 YSZ 완충막이 사용되었다. YSZ 완충막의 증착온도가 박막의 결정성과 전기적 특성에 미치는 영향을 알아보기 위해 YSZ 완충막은 여러 가지 온도로 증착되었다. YBCO 박막의 증착온도와 같은 온도로 YSZ 완충막을 증착했을 때보다 YBCO 박막의 증착온도보다 높은 온도로 YSZ 완충막을 증착했을 경우, 증착된 YBCO 박막은 x선 회절에 의해 c 축 방향으로 성장하였음을 알 수 있었고, 저항이 0이 되는 임계온도가 83K가 되는 실험 결과를 얻었다.

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PLD 연속 공정을 통한 YBCO coated conductor 제조 (Fabrication of YBCO coated conductors by PLD continuous reel-to-reel processing)

  • 고락길;신기철;;정준기;박유미;최수정;송규정;하홍수;김호섭
    • 한국초전도저온공학회:학술대회논문집
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    • 한국초전도저온공학회 2003년도 추계학술대회 논문집
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    • pp.150-152
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    • 2003
  • YBa$_2$Cu$_3$O$_{7-{\delta}}$(YBCO) coated conductors were deposited by pulsed laser deposition (PLD) on short buffered substrate in continuous PLD reel-to-reel system. The oxide multilayer buffered substrate of architectures of CeO$_2$/YSZ/Y$_2$O$_3$was fabricated by PLD at steady status. The degree of texture of each layer was investigated using X-ray diffraction including $\theta$-2$\theta$ scans, $\omega$-scans and $\Phi$-scans analysis. Their surface morphology was observed by scanning electron microscopy (SEM) The FWHM of the X-ray $\omega$-scans and $\Phi$-scans indicated that YBCO and buffer layers closely replicate the in-plane and out-of-plane texture of metal tape. Critical current at 77K self-field of 19A, critical temperature of 86K, and current density of 2MA/$\textrm{cm}^2$ were measured. The film also exhibits a homogeneous and dense surface morphology.e morphology.

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DCA-MOD 방법으로 제조된 YBCO 박막의 미세조직에 미치는 열처리 효과 (Effects of Heat Treatments on the Microstructure of YBCO Films Prepared by DCA-MOD Method)

  • 김병주;김혜진;조한우;유석구;유정희;이희균;홍계원
    • Progress in Superconductivity
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    • 제9권1호
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    • pp.96-101
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    • 2007
  • [ $YBa_2Cu_3O_{7-{\delta}}$ ] films have been prepared on $LaAlO_3$ (100) single-crystal substrates by a metalorganic deposition using dichloroacetate precursors (DCA-MOD). Calcination conditions were varied in order to optimize the microstructure and the superconducting properties of YBCO film. Coated films were calcined at various temperatures ranging from $400{\sim}700^{\circ}C$ in flowing humid oxygen atmosphere. Ramping rate to calcination tempertures was $2.22^{\circ}C/min$. Conversion heat treatment was performed at $800^{\circ}C$ for 2 h in flowing Ar gas containing 1000 ppm oxygen with a humidity of 9.45%. Observations of surface and cross sectional SEM microstructure showed that the particle size in the calcined film increased in the range of 100-200 nm with heating rate and the calcination temperature. SEM EDS analysis showed that 13 a/o of chlorine was contained in the calcined film. It was also observed that the porosity increased with the heating rate and temperature. Porous microstructure was developed when YBCO films were prepared using porous calcined film. Dense microstructure and high $J_c$ over $1\;MA/cm^2$ was obtained when calcination was carried out at the temperature of $500^{\circ}C$ with a heating rate of $2.22^{\circ}C/min$.

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