• 제목/요약/키워드: $YBa_{2}Cu_{3}O_{7-x}$ films

검색결과 96건 처리시간 0.022초

레이저 어브레이션법에 의한 ${YBa}_{2}{Cu}_{3}{O}_{7-x}$ 박막의 제조와 특성 (The fabrication and properties of ${YBa}_{2}{Cu}_{3}{O}_{7-x}$ thin films by laser ablation)

  • 이덕출;최충석
    • 대한전기학회논문지
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    • 제44권8호
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    • pp.1063-1067
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    • 1995
  • The superconducting properties of YBa$_{2}$Cu$_{3}$$O_{7-x}$(YBaCuO) thin films prepared by laser ablation have been investigated. The x-ray diffraction patterns and surface morphology of the films were substantially different from one another. The compositional ratios of YBaCuO films were controlled by the conditions of the target-substrate distance. The YBaCuO films manufactured on MgO(100) substrate were indicated T$_{c}$(zero)=91.2 K, T$_{c}$(onset)=93 K, and J$_{c}$=3.5*10$^{5}$ A/cm$^{2}$(at 77.3K). The optimum conditions were found to be a substrate temperature of 710 .deg. C, a energy density of 2 J/cm$^{2}$, and a target-substrate distance of 60 mm in an oxygen partial pressure of 200 mTorr.0 mTorr.

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RF마그네트론 스퍼터링법으로 제조한 $YBa_2Cu_3O_{7-x}$전도체 박막의 특성에 대한 기판의 영향 (Substrate effects on the characteristics of $YBa_2Cu_3O_{7-x}$ thin films prepared by RF magnetron sputtering)

  • 신현용;박창엽
    • E2M - 전기 전자와 첨단 소재
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    • 제8권1호
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    • pp.6-12
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    • 1995
  • High Tc superconducting YBa$_{2}$Cu$_{3}$$O_{7-x}$ thin films were prepared on various substrates by off-axis rf magnetron sputtering method to examine the substrate effects on the film structure and its R-T characteristics. The SEM analysis showed that the surface morphology of the grown YBa$_{2}$Cu$_{3}$O.sub 7-x/, film has different characteristic structure with different substrate used. The film on (100) SrTiO$_{3}$ substrate has critical current density of 3*10$^{5}$ A/cm$^{2}$ at 77K under zero magnetic field. The X-ray diffraction measurements revealed that the films on (100) SrTiO$_{3}$ substrate have mixed a-axis and c-axis normal to the substrate surface and the films on (100) MgO and ZrO$_{2}$/sapphire substrates have c-axis normal orientation to the substrate surface. However, YBa$_{2}$Cu$_{3}$$O_{7-x}$ films on (100) sapphire substrates showed no preferential orientation.ion.

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평면배향된 a-축 수직 $YBa_2Cu_3O_{7-x}$ 고온초전도 박막의 제작 (Fabrication of the in-plane Aligned a-Axis Oriented $YBa_2Cu_3O_{7-x}$ Thin Films)

  • 성건용;서정대
    • 한국세라믹학회지
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    • 제33권3호
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    • pp.313-320
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    • 1996
  • We have fabricated an in-plane aligned a-axis oriented YBa2Cu3O7-x (a-YBCO) thin film on a LaSrGaO4(100) substrate with a PrBa2Cu3O7-x(PBCO) template layer by two step plused laser deposition using 308 nm XeCl excimer laser. A YBCO layer and PBCO layer grown at low temperatures were used as template layers. We have investigated the effect of the deposition temperature of template layers on the superconducting and struc-tural properties of in-plane aligned a-YBCO thin films. An optimal deposition temperature of the PBCO template layers was 630. In-plane aligned a-YBCO thin films showed an anisotropy ratio in resistivity of 11.5 and a zero resistance temperature of 88 K.

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적외선 센서로의 응용을 위한 반도성 YBa2Cu3O7-x 박막의 제작 및 전기적 특성 (Fabrication and Electrical Properities of Semiconducting YBa2Cu3O7-x thin Film or Application of IR Sensors)

  • 정재운;조서현;이성갑
    • 전기학회논문지
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    • 제61권9호
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    • pp.1296-1299
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    • 2012
  • $YBa_2Cu_3O_{7-x}$ thin films were fabricated by the spin-coating method on $SiO_2$/Si substrate using an alkoxide-based sol-gel method. The structural and electrical properties were investigated for various 1st annealing temperature. Due to the formation of the polycrystalline single phase, synthesis temperature was observed at around $720^{\circ}C-800^{\circ}C$. $YBa_2Cu_3O_{7-x}$ thin films with the 1st annealing temperature of $450^{\circ}C{\sim}500^{\circ}C$ showed the single XRD patterns without the second phase, such as $YBa_2Cu_4O_8$. The thickness of films was approximately $0.23{\mu}m{\sim}0.27{\mu}m$. Aerage grain size, resistance and temperature coefficient of resistance (TCR) of $YBa_2Cu_3O_{7-x}$ thin films with the 1st annealing temperature of $500^{\circ}C$ were $0.27{\mu}m$, $59.7M{\Omega}$ and -3.7 %/K, respecvitely.

Off-Axis RF 마그네트론 스퍼터링에 의한 $YBa_2Cu_3O_{7-x}$ 고온 초전도 박막의 제조 (Fabrication of High-Tc Superconducting $YBa_2Cu_3O_{7-x}$ Thin Films by Off-Axis RF Magnetron Sputtering)

  • 성건용;서정대;강광용;장순호
    • 한국세라믹학회지
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    • 제28권3호
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    • pp.243-251
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    • 1991
  • High-Tc YBa2Cu3O7-x superconducting thin films have been prepared by single-target off-axis RF magnetron sputtering. Optimal ratio of Y : Ba : Cu of the single-target was determined as 1 : 1.65 : 3.35 in order to obtain the stoichiometric films. Tc, crystalline phase, and microstructures of the surface and cross-section of the ex-situ YBa2Cu3O7-x thin films on MgO(100) had a Tc, zero of 80K, and the films on LaAlO3/Si had a Tc, on-set of 90 K and a Tc, zero of 70 K.

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펄스레이저 증착법으로 제작된 $Bi_4Ti_3O_{12}/LaAlO_3$ 박막과 $Bi_4Ti_3O_{12}/YBa_2Cu_3O_{7-x}/LaAlO_3$ 복합구조의 에피 성장 (Epitaxial Growth of Pulsed-Laser Deposited Bi4Ti3O12/LaAlO3 Thin Films and Bi4Ti3O12/YBa2Cu3O7-x/LaAlO3 Heterostructure)

  • 조월렴;조학주;노태원
    • 한국결정학회지
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    • 제5권2호
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    • pp.85-92
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    • 1994
  • 펄스 레이저 증착법을 이용하여 강유전체 Bi4T13012 박막을 laA109(001) 위에 성장시켰다. 넓은 영역의 온도에서 증착한 박막의 상 형성과 구조적 성질을 X선 회절법을 이용하여 조사하였다. 740℃에서 증착한 박막은 박막의 c-축이 기판에 수직한 형태의 에피 성장의 경향을 보인다. 펄스 레이저 증착법을 이용하여 Bi4Ti3O12/YBa2Cu3O7-x/LaAlO3 복합구조를 in-situ 성장시켰다. Yba2Cu3O7-x의 a-, b-축이 LaAlO3와 완벽하게 평행하게 배열되어 있지 않음에도 불구하고, Bi4Ti3012 박막은 에피 성장의 경향을 보인다.

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펄스레이저 입사수에 따른 $YBa_2Cu_3O_{7-x}$박막의 표면입자밀도 변화 (Effect of Laser Shot Number on the Surface Particle Density of $YBa_2Cu_3O_{7-x}$ Thin Films by Pulsed Laser Deposition)

  • 서정대;성건용
    • 한국세라믹학회지
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    • 제31권3호
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    • pp.312-320
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    • 1994
  • Effect of the laser shot number on the particulates density of the pulsed laser deposited YBa2Cu3O7-x thin films and the laser irradiated surface morphology of the YBa2Cu3O7-x bulk target have been investigated. Until 100 laser shots of cumulative irradiation, the films has the particulates density of ~103 mm-2. However, after 100 laser shots, the density was increased more than 10 times. This results has been explained by the change of particulate ejection path with the development of conical structure at the target surface.

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