• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.04a
• /
• pp.206-209
• /
• 2003

The purpose of AR and HR coating is acquire the very low reflection rate and the high reflection rate through the deposition of a thin film using the refraction ofmaterial. Basically if the high refractive material and the low refractive material are chosen and the condition for the experiment is determined, then we solve theproject with the optical design and multi thin film coating. First of all, we choose $SiO_2$for the low refractive material and $TiO_2$ for the high refractive material and apply Sputtering System easy to control the refraction rate and excellent in reconstruction to the equipment of thin film multiplication. For the control of the refraction rate and growth rate we modify RF Power and the ratio of Gas(Ar:O2), And we use Ellipsometer for estimation and analysis of the refraction rate and growth rate and AFM&SEM for the analysis of surface and component.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.373-373
• /
• 2012

염료 감응형 태양전지는 기존 Si 기반 PN접합 무기 태양전지에 비해서 경제적이다. 하지만 그 에너지 변환 효율은 아직까지 세계 최고 수준이 10%밖에 도달하지 못하였다. 그래서 다양한 방식의 효율개선 연구가 활발히 진행되고 있는 실정이다. 본 연구에서는 진공원자층증착(ALD)를 이용하여 Core-shell 구조의 $TiO_2$층 위에 아주 얇고 균일한 $Al_2O_3$ (알루미나) 산화막을 입혔다. 이를 통해서 염료감응형 태양전지의 에너지 변환 효율을 향상시켰다. 본 연구에서는 진공원자층증착(ALD)기술을 이용한 $Al_2O_3$ (알루미나) 산화막의 증착조건에 따른 염료감응태양전지의 효율 개선 매커니즘에 대해서 고찰하였다.

• Journal of the Korean earth science society
• /
• v.18 no.6
• /
• pp.500-514
• /
• 1997

With respect to the amphibolites in the Mungyong area of the central part of the Ogcheon Fold Belt, detail field occurrence, texture and geochemical properties within each sills and petrogenetic environment are presented. We confirmed that the amphibolites in the Sangnaeri Formation (Ogcheon Supergroup) and limestone(Cambro-Ordovician Chosun Supergroup) sequences are metamorphosed dolerite sills which are roughly concordant to bedding of country rocks. Geologic distribution of the rocks is distinctly improved compared with those of previous investigations. There are four main sills so far observed in the study area. One is emplaced in limestone(Ls Sill, about 3 m thick) and the others are emplaced in Sangnaeri Formation, which are named First Sill(about 40 m thick), Second Sill(about 100 m thick) and Third Sill(about 40 m thick) from lower to upper horizons of the meta-pelitic sequences. The thick sills are intruded by minor sills and the Third Sill is a composite sill consisting of two main and two minor sills. Each sill has fine grained chilled marginal zones and grain size increases inwards from both contacts. The Second Sill has various vein and white patch in central part and the rock compositions vary systematically from margin to central part. $SiO_2,\;Na_2O,\;K_2O\;and\;P_2O_5$ increase, whereas $TiO_2,\;FeO,\;Al_2O_3\;and\;CaO$ decrease toward the contort. We investigate the major and trace element variations of ten selected rock compositions as intruding initial magma take occurrence and chemical properties into consideration. The compositional variations of them can not be explained by fractionation crystallization of single magma. Geologic distribution, geochemical properties and previous data suggest that amphibolite precursors(basaltic magma) of the study area were intrusive as sill-like in an intracontinental rift environment.

• Journal of the Mineralogical Society of Korea
• /
• v.2 no.2
• /
• pp.100-106
• /
• 1989

Die Titan-Augite sind die dominierenden Einsprenglings- und Grundmassephasen in allen tephritischen Gesteinen im Kaiserstuhl. Mg-Werte ($Mg/Mg+Fe^{2+}+Mn$) der Pyroxene schwanken von 60-85. Der FATS- und TITS-Anteil nimmt von phonolithischem Basanit und -Tephrit zum fraktionierten phonolithischen Tephrit hin ab. Die Kpx der einzelnen Gesteinsgruppen zeigen auch einen Fraktionier-ungstrend, der durch Abnahme von Si und Zunahme von Al vom phonolithischen Basanit und -Tephrit zum fraktionierten phonolithischen Tephrit gekennzeichnet ist. Der in Alkaligesteinen gewohnlich auftretende $gr{\ddot{u}}ne$ Kern der Px ist Fe-reicher und $Ti-{\ddot{a}}rmer$ als der $hellbra{\ddot{u}}nliche$-farblose Rand. Die $gr{\ddot{u}}nen$ Kerne weisen $gegen{\ddot{u}}ber$ den $hellbr{\ddot{a}}unlichen$ Randern $h{\ddot{o}}here$ $Na/Fe^{+3}$-Verhaltnisse auf.

• Economic and Environmental Geology
• /
• v.25 no.4
• /
• pp.397-416
• /
• 1992

In the present study, three clay deposits, named the Seongsan, Ogmaesan and Haenam deposits, were investigated. The altered zones are recognized in the hydrothermally altered rocks of the clay deposits from the center of the alteration to the margin: Kaolin, Kaolin-Quartz, Quartz, Sericite and Chlorite zones in the Seongsan deposits; Quartz zone, Alunite zone, Kaolin zone, Sericite zone and Chlorite zone in the Ogmaesan deposits; Quartz zone, Pyrophyllite zone, Sericite zone and Chlorite zone in the Haenam deposits. These zones can be grouped into two types of alteration: Acidic alteration such as Pyrophyllite zone, Alunite zone, Quartz zone, Kaolin zone, Kaolin-Quartz zone and a part of Sericite zone; Propylitic alteration such as Chlorite zone and a part of Sericite zone. All clay deposits belong to high-sulfidation (acid-sulfate) system. The rocks of the acidic alterations are composed of pyrophyllite, alunite, kaolin minerals, sericite, quartz and pyrite. On the basis of bulk chemical compositions, it was found that some components such as $SiO_2$, $TiO_2$, $Fe_2O_3$, FeO, MgO, CaO, $K_2O$ and $Na_2O$ were mobilized considerably from the original rocks. The mobility of these major elements is related to, and controls, mineral assemblages in each altered zone. Polytypes of sericite are determined as $2M_1$ and 1M by X-ray diffraction method. The amount of $2M_1$ is nearly equal to that of 1M in the Seongsan deposits whereas $2M_1$ is less and higher than that of 1M in the Ogmaesan and the Haenam deposits. These facts indicate that formation temperature of sericite is relatively high in the Haenam deposits, moderate in the Seongsan deposits, and low in the Ogmaesan deposits. The ratios of Na/(K+Na) for alunite in the Ogmaesan deposits determined by electron microprobe analyzer (EPMA) are higher than those in the Seongsan deposits. Thus, the alunite of the Ogmaesan deposits must have been formed from the solutions with relatively high aqueous Na/(K+Na) ratios and low pH at a high temperature rather than that of the Seongsan deposits. From all data, it is clarified that alunite is hypogene in origin, and has been formed by oxidation of hydrogen sulfide in the steam-heated environment, and that alunite has been produced by the spectacular solfataric alteration observed at the surface of some present-day hydrothermal systems.

• Journal of the Microelectronics and Packaging Society
• /
• v.17 no.3
• /
• pp.79-84
• /
• 2010

Formation of TSV (Through-Si-Via) with an Au seed layer and Cu filling to the via, simplification of bumping process for three dimensional stacking of Si dice were investigated. In order to produce the via holes, the Si wafer was etched by a DRIE (Deep Reactive Ion Etching) process using $SF_6$ and $C_4F_8$ plasmas alternately. The vias were 40 ${\mu}m$ in diameter, 80 ${\mu}m$ in depth, and were produced by etching for 1.92 ks. On the via side wall, a dielectric layer of $SiO_2$ was formed by thermal oxidation, and an adhesion layer of Ti, and a seed layer of Au were applied by sputtering. Electroplating with pulsed DC was applied to fill the via holes with Cu. The plating condition was at a forward pulse current density of 1000 mA/$dm^2$ for 5 s and a reverse pulse current density of 190 mA/$dm^2$ for 25 s. By using these parameters, sound Cu filling was obtained in the vias with a total plating time of 57.6 ks. Sn bumping was performed on the Cu plugs without lithography process. The bumps were produced on the Si die successfully by the simplified process without serious defect.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2009.10a
• /
• pp.171-172
• /
• 2009

TSV(through via silicon)를 이용한 Via의 Cu 충전에서 Seed 층의 역할은 전류의 흐름을 가능하게 하는 중요한 역할을 하고 있다. Via에 각각 Ti/Au, Ti/Cu를 증착한 후 Ti/Cu가 Ti/Au를 대체 할 수 있는지를 알아보기 위해 먼저 실리콘 웨이퍼에 via를 형성하고, 형성된 via에 기능성 박막층으로 절연층(SiO2) 및 시드층을 형성하였다. 전해도금을 이용하여 Cu를 충전한 결과 Ti/Au 및 Ti/Cu를 증착한 두 시편 모두 via와 seed층 접합면에 박리 등의 결함이 없었고, via 내부 또한 void나 seam 등이 관찰되지 않고 우수하게 충전된 것을 확인할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.567-567
• /
• 2012

Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

• Transactions on Electrical and Electronic Materials
• /
• v.14 no.2
• /
• pp.67-70
• /
• 2013

In this study, we changed the input parameters (gas mixing ratio, RF power, DC bias voltage, and process pressure), and then monitored the effect on TiN etch rate and selectivity with $SiO_2$. When the RF power, DC-bias voltage, and process pressure were fixed at 700 W, - 150 V, and 15 mTorr, the etch rate of TiN increased with increasing $CF_4$ content from 0 to 20 % in $CF_4$/Ar plasma. The TiN etch rate reached maximum at 20% $CF_4$ addition. As RF power, DC bias voltage, and process pressure increased, all ranges of etch rates for TiN thin films showed increasing trends. The analysis of x-ray photoelectron spectroscopy (XPS) was carried out to investigate the chemical reactions between the surfaces of TiN and etch species. Based on experimental data, ion-assisted chemical etching was proposed as the main etch mechanism for TiN thin films in $CF_4$/Ar plasma.

• Journal of the Korean Society of Marine Environment & Safety
• /
• v.24 no.7
• /
• pp.916-922
• /
• 2018

Recently, power plant effluent condensers received a Renewable Energy Certificate as components of hydrothermal energy (weighted 1.5 times) as one target item of the Renewable Portfolio Standard (RPS) policy. Accordingly, more attention is being paid to the value of thermal wastewater as a heat source. However, for utilization of thermal wastewater from power plants in high-turbidity areas like the West Sea of Korea, a turbidity reducing system is required to reduce system contamination. In this study, an experimental test was performed over a month on thermal wastewater from power plants located in the West Sea of Korea. It was found that water turbidity was reduced by more than 80 % and that the concentration of organic materials and nutrient salts was partially reduced due to the reduction of floating/drifting materials. To conduct a comparative analysis of the level of contamination of the heat exchanger when thermal wastewater flows in through a turbidity reducing system versus when the condenser effluent flows in directly without passing through the turbidity system, we disassembled and analyzed heat exchangers operated for 30 days. As a result, it was found that the heat exchanger without a turbidity reducing system had a higher level of contamination. Main contaminants (scale) that flowed in to the heat exchanger included minerals such as $SiO_2$, $Na(Si_3Al)O_8$, $CaCO_3$ and NaCl. It was estimated that marine sediment soil flowed in to the heat exchanger because of the high level of turbidity in the water-intake areas.