• 한국전기전자재료학회논문지
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• 제11권11호
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• pp.990-995
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• 1998

본 연구에서는 PZT(20/80)과 PZT(80/20) 금속 alkoxide용액을 Pt/Ti/$SiO_2$/Si 기판위에 상호 반복시킨 강유전성 PZT(20/80)/PZT(80/20) 이종층 박막을 제작하였다. 건조와 소결을 한번 행한 PZT 이종층 박막의 평균 두께는 약 80~90 nm이었다. 제작된 모든 PZT 박막은 rosette상이 없는 치밀하고 균질한 미세구조를 나타내었으며, 하부의 PZT층은 열처리시 상부 PZT층은 열처리시 상부 PZT 박막의 페로브스카이트 형성에 대해 nucleation site로 작용하였다. 유전상수, 피로특성 및 누설전류특성 등은 단일 조성의 PZT(20/80), PZT(80/20) 박막에 비해 우수한 특성을 나타내었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• E2M - 전기 전자와 첨단 소재
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• 제10권10호
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• pp.983-988
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• 1997

We investigated the structural and dielectric properties of PZT(20/80)/PZT(80/20) heterolayered thin films that fabricated by the alkoxide-based Sol-Gel method. PZT(20/80)/PZT(80/20) heterolayered thin films were spin-coated on the Pt/Ti/SiO$_2$/Si substrate with PZT(20/80) film of tetragonal structure and PZT(80/20) film of rhombohedral structure by turns. Each layers were dried to remove the organic materials at 30$0^{\circ}C$ for 30min and sintered at $650^{\circ}C$ for 1hr. This procedure was repeated several times to form PZT(20/80)/PZT(80/20) heterolayered films and thickness of the film obtained by one-times of drying/sintering process was approximately 80-90nm. PZt-1, 3, 5 films with top layer of PZT(20/80) film of tetragonal structure showed fine grain structure and PZT-2, 4, 6 films with top layer of PZT(80/20) film of rhombohedral structure showed the dense grain microstructure without rosette-type. Dielectric constant and dielectric loss of the PZT-6 film were approximaterly 1385 and 3.3% respectively. Increasing the number of coatings remanent polarization was increased and coercive field was decreased and the values of the PZT-6 film were 8.13$\mu$C/cm$^2$and 12.5kV/cm respectively.

• 한국세라믹학회지
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• 제38권8호
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• pp.724-731
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• 2001

스크린 인쇄법에 의해 Si 기판에 PZT 후막의 제조에 있어서 주요 문제점은 낮은 소결밀도 및 PZT 후막과 Si 기판과의 반응현상이다. 이러한 현상을 억제하기 위해 본 연구에서는 스크린 인쇄법 및 PZT sol-gel 처리법의 혼합된 방법을 채택하여 Pt/TiO$_2$/YSZ/SiO$_2$/Si(100) 기판에 Zr/Ti 비가 52/48인 PZT 후막을 제조하였으며, 소결온도에 따른 잔류분극(P$_{r}$), 유전상수($\varepsilon$$_{r}$) 및 압전상수(d$_{33}$)를 측정하였다. 인쇄된 PZT 후막에 졸 처리함으로써 단순히 인쇄된 후막에 비해 전기적 특성이 증진된 결과를 얻었다.다.

• 한국대기환경학회지
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• 제19권1호
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• pp.85-92
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• 2003

A new type of catalytic filers has been developed in this work. A porous photocatalytic filter was prepared by coating the titania (anatase phase) powder onto the woven metal mesh. The coating sol was prepared with unique cera-mic binder, and would assist drying condition and enhance the mechanical strength of the final ceramic filers. As a result of the test for acetone decomposition, it was found to be quite effective for the photocatalytic reaction as good at conventional glass reactors which were coated inside. The present filter type reactor is expected as one of plausible devices for the simultaneous treatment of gas - particulate materials.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.246-247
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• 2007

(Ba,Sr,Ca)$TiO_3$ powders, which were prepared by sol-gel method using a solution of Ba-acetate, Sr-acetate and Ca-acetate and Ti iso-propoxide, were mixed with organic vehicle and the BSCT thick films were fabricated by the screen-printing techniques on high purity alumina substrates. The structural and dielectric properties were investigated for various $Dy_2O_3$ doping contents. As a result of thermal analysis, the exothermic peak was observed at around $670^{\circ}C$ due to the formation of the polycrystalline perovskite phase. All BSCT thick films, sintered at $1420^{\circ}C$ for 2h, showed the typical XRD patterns of perovskite polycrystalline structure and no pyrochlore phase was observed. The average grain size of the specimens decreased with.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.257-257
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• 2012

Cerium doped anatase titania powders were prepared by sol-gel process, with ammonium (IV) nitrate and Titanium (IV) butoxide as the raw materials. The characteristics of anatase $TiO_2$ and cerium doped $TiO_2$ were investigated by XRD, DTA, FE-SEM and UV/Vis spectroscopy. Research results indicated that XRD data characteristic diffraction peaks of anatase phase and also showed that cerium phase was not observed. Moreover XRD and DTA results imply that the addition of cerium to titania modifies the mechanism of formation of the titania phases.

• 한국세라믹학회지
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• 제53권3호
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• pp.325-331
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• 2016

Anatase particles of titanium dioxide were prepared from $TiCl_4$ aqueous solution by using an electro-dialysis [ED] process. For the preparation of an aqueous solution of $TiCl_4$ precipitates, $TiCl_4$ liquid frozen in ice was transferred to a neck flask and then hydrolyzed using deionized [DI] $H_2O$. During the hydrolysis of the $TiCl_4$ solution at $0^{\circ}C$, a slurry solution of $TiOCl_2$ was obtained and the color changed from red to orange. The ED process was applied for the removal of chlorine content in the slurry solution. Two kinds of hydrolyzed slurry solution with lower [$Ti^{4+}$] and higher [$Ti^{4+}$] were sampled and the ED process was applied for the samples according to the removal time of [$Cl^-$]. With de-chlorination, the solution status changed from sol to gel and the color quickly changed to blue. Finally, white crystalline powders were formed and the phase was confirmed by XRD to be anatase crystallites. The morphology of the hydrous titania particles in the solution was observed by FE-SEM. The hydrous titania particles were nano-crystalline, and easily coagulated with drying.

• 한국재료학회지
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• 제10권5호
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• pp.328-334
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• 2000

산화티탄의 광촉매 반응을 이용하여 휘발성 유기화합물(VOC)를 분해제거 하기 위하여 산화티탄을 glass bead에 sol-gel법으로 코팅하였다. 코팅막의 물성은 XRD, BET, SEM을 통해 분헉하였으며, 산화티탄이 galss bead를 채운 실험실규모의 광촉매 반응기를 이용 VOC중 벤젠 및 TCE 가스의 광촉매반응에 의한 분해효율에 대해 연구 컴토하였다. 반응기내의 잔류시간에 따른 가스농도 차이를 gas chromatography로 비교 분석하여 그 분해효율을 계산하였다. 이와 같은 정적인 상태의 실험결과, 400ppmv의 농도의 TCE인 경우 80%의 분해효율을 얻었으며, 50ppmv에서 300ppmv 농도의 벤젠인 경우 65%의 분해효율을 얻었다.

• 대한환경공학회지
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• 제37권6호
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• pp.357-362
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• 2015

새로운 형태의 $TiO_2$가 합성된 코코넛 껍질 분말 복합체를 제조하기 위해 솔-젤 합성법과 열처리를 사용하였고, 제조된 TCSPC는 MB를 대상으로 제거효율을 평가하였다. TCSPC를 제조하기 위한 최적의 조건은 반응표면분석법의 중심합성설계법을 사용하여 조사하였다. 소성온도가 $400^{\circ}C$에서 $600^{\circ}C$ 증가함에 따라 BET 비표면적은 $254m^2/g$에서 $398m^2/g$로 증가하고 기공용적, 기공률 또한 증가하며, 그 이유는 소성공정 시 발생한 열분해(pyrolysis)에 의해 코코넛 껍질 분말이 가지고 있는 헤미셀룰로우스, 셀룰로우스, 그리고 리그닌과 같은 물질들의 polymerization 반응 때문인 것으로 판단된다. 코코넛 껍질 분말의 양이 10 g에서 20 g으로 증가 할수록 BET 비표면적은 $303m^2/g$에서 $398m^2/g$로 증가하였으며, 30 g으로 증가 시에는 BET 비표면적은 $345m^2/g$으로 감소하는 경향을 나타내었다. Response optimization을 사용하여 얻은 최적의 합성조건은 소성온도 $642^{\circ}C$, 코코넛 껍질 분말 주입량이 22.7 g으로 나타났다.