• Title/Summary/Keyword: $TiO_2$/UV Process

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AlInGaN - based multiple quantum well laser diodes for Blu-ray Disc application

  • O. H. Nam;K. H. Ha;J. S. Kwak;Lee, S.N.;Park, K.K.;T. H. Chang;S. H. Chae;Lee, W.S.;Y. J. Sung;Paek H.S.;Chae J.H.;Sakong T.;Kim, Y.;Park, Y.
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.20-20
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    • 2003
  • We developed 30 ㎽-AlInGaN based violet laser diodes. The fabrication procedures of the laser diodes are described as follows. Firstly, GaN layers having very low defect density were grown on sapphire substrates by lateral epitaxial overgrowth method. The typical dislocation density was about 1-3$\times$10$^{6}$ /$\textrm{cm}^2$ at the wing region. Secondly, AlInGaN laser structures were grown on LEO-GaN/sapphire substrates by MOCVD. UV activation method, instead of conventional annealing, was conducted to achieve good p-type conduction. Thirdly, ridge stripe laser structures were fabricated. The cavity mirrors were formed by cleaving method. Three pairs of SiO$_2$ and TiO$_2$ layers were deposited on the rear facet for mirror coating. Lastly, laser diode chips were mounted on AlN submount wafers by epi-down bonding method. The lifetime of the laser diodes was over 10,000 hrs at room temperature under automatic power controlled condition. We expect the performance of the LDs to be improved by the optimization of the growth and fabrication process. The detailed characteristics and important issues of the laser diodes will be discussed at the conference.

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Sol-gel Mechanism of Self-patternable PZT Film Starting from Alkoxides Precursors

  • Hwang, Jae-Seob;Kim, Woo-Sik;Park, Hyung-Ho;Kim, Tae-Song
    • Journal of the Korean Ceramic Society
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    • v.40 no.4
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    • pp.385-392
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    • 2003
  • Sol-gel preparation technique using a chemical reaction of metal alkoxides has been widely used for the fabrication of various materials including ceramics. However, its mechanism has been studied till now because a number of chemical ways are possible from various alkoxides and additives. In this study, the mechanism of hydrolysis, condensation, and polymerization of alkoxides were investigated from the fabrication of lead-zirconate-titanate (PbZr$\_$x/Ti$\_$l-x/O$_3$; PZT) thin film that is used as various micro-actuator, transducer, and sensor because of its high electro-mechanical coupling factors and thermal stability. Furthermore, the fabrication process and characteristics of self-patternable PZT film using photosensitive stabilizer were studied in order to resolve the problem of physical damage and properties degradation during dry etching for device fabrication. Using an optimum condition to prepare the self-patternable PZT film, more than 5000 ${\AA}$ thick self-patternable PZT film could be fabricated by three times coating. The PZT film showed 28.4 ${\mu}$c/cm$^2$ of remnant polarization (Pr) and 37.0 kV/cm of coercive field (E$\_$c/).

Fabrication of Organic-Inorganic Nano Hybrid Superlattice Thin Films by Molecular Layer Deposition

  • Cho, Bo-Ram;Yang, Da-Som;Sung, Myung-M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.115-115
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    • 2011
  • Nano hybrid superlattices consisting of organic and inorganic components have great potential for creation of new types of functional material by utilizing the wide variety of properties which differ from their constituents. They provide the opportunity for developing new materials with new useful properties. Herein, we fabricated new type of organic-inorganic nano hybrid superlattice thin films by a sequential, self-limiting surface chemistry process known as molecular layer depostion (MLD) combined with atomic layer deposition (ALD). An organic layer was formed at $150^{\circ}C$ using MLD with repeated sequintial adsorption of Hydroquinone and Titanium tetrachloride. A $TiO_2$ inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Titanium tetrachloride and water. Using UV-Vis spectroscopy, we confirmed visible light absorption by LMCT. And FTIR spectroscopy and XPS were employed to determine the chemical composition. Ellipsometry and TEM analysis were also used to confirm linear growth of the film versus number of MLD cycles at all same temperature. In addition, p-n junction diodes domonstrated in this study suggest that the film can be suitable for n-type semiconductors.

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Effects of Operating Parameters on Electrochemical Degradation of Rhodamine B and Formation of OH Radical Using BDD Electrode (BDD 전극을 이용한 OH 라디칼 생성과 염료 분해에 미치는 운전인자의 영향)

  • Park, Young-Seek;Kim, Dong-Seog
    • Journal of Environmental Science International
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    • v.19 no.9
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    • pp.1143-1152
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    • 2010
  • The purpose of this study is to degradation of Rhodamine B (RhB, dye) and N, N-Dimethyl-4-nitrosoaniline (RNO, indicator of the electro-generation of OH radical) in solution using boron doped diamond (BDD) electrode. The effects of applied current (0.2~1.0 A), electrolyte type (NaCl, KCl, and $Na_2SO_4$) and electrolyte concentration (0.5~3.0 g/L), solution pH (3~11) and air flow rate (0~4 L/min) were evaluated. Experimental results showed that RhB and RNO removal tendencies appeared with the almost similar thing, except of current. Optimum current for RhB degradation was 0.6 A, however, RNO degradations was increased with increase of applied current. The RhB and RNO degradation of Cl type electrolyte were higher than that of the sulfate type. The RhB and RNO degradation were increased with increase of NaCl concentration and optimum NaCl dosage was 2.5 g/L. The RhB and RNO concentrations were not influenced by pH under pH 7. Optimum air flow rate for the oxidants generation and RhB and RNO degradation were 2 L/min. Initial removal rate of electrolysis process was expressed Langmuir - Hinshelwood equation, which is used to express the initial removal rate of UV/$TiO_$2 process.

Optimization and Characteristics of Removal Condition of Livestock Wastewater Using a Photocatalytic Process (광촉매공정 적용시 축산폐수의 처리특성 및 최적화)

  • Park, Jae-Hong
    • Clean Technology
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    • v.13 no.3
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    • pp.222-227
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    • 2007
  • The photocatalytic degradation of livestock wastewater has been investigated over $TiO_2$ photocatalysts irradiated with a ultraviolet (UV) light. The effect of operational parameters, i.e., distance, reaction area, concentration of suspended solids(SS), and column diameter on the degradation of livestock wastewater has been performed in lab-scale. The optimal conditions for livestock wastewater were determined: distance was 3 cm (less than 7 cm), reaction area was $3.6\;m^2$, SS concentration was 40 mg/L (less than 300 mg/L) and column diameter was 5 mm (less than 10 mm). Under the optimal conditions, COD, color and coliform removal efficiencies were approximately 49%, 53% and 100%, respectively. Non-biodegradable COD removal efficiency increased with 57% using by photocatalysis process. Therefore, it is shown that photocatalysis has an effect on degradation of non-biodegradable organic matter.

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