• Journal of the Korean Ceramic Society
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• v.38 no.1
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• pp.39-44
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• 2001

솔-젤법으로 S $r_{0.9}$B $i_{2.1}$T $a_2$$O_{9}$ stock solution을 합성하고, Ir $O_2$/ $SiO_2$/Si 및 기판 위에 스핀코팅법으로 약 2000$\AA$ 정도의 두께를 가지고 SBT 박막을 제조하였다. Pt/Ti $O_{x}$ 전극을 사용한 SBT 박막과 비교하였을 때 Ir $O_2$전극을 사용한 SBT 박막의 경우 더 낮은 급속 열처리 온도 즉, 72$0^{\circ}C$에서 형석상에서 층상 페롭스카이트 상으로의 상전이가 관찰되었다. 그리고, Ir $O_2$전극을 사용한 SBT 박막은 낮은 열처리에서 결정성장이 이루어졌다. Ir $O_2$전극을 사용한 SBT 박막은 $650^{\circ}C$에서 열처리하였을 때 포화된 이력곡선을 얻었지만, Pt/Ti $O_{x}$ 전극을 사용한 SBT 박막은 $700^{\circ}C$에서 열처리하였을 때 이력곡선이 관찰되었다. Ir $O_2$전극을 사용한 SBT 박막은 $700^{\circ}C$의 열처리에서 8.79 $\mu$C/$ extrm{cm}^2$ (3V)의 2Pr 값을 나타내었다.나타내었다.다.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.11a
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• pp.150-150
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• 1998

• The Korean Journal of Ceramics
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• v.6 no.1
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• pp.64-67
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• 2000

Reactively sputtered $Pb(Zr,Ti)O_3$(PZT) films on $IrO_2$and Ir were evaluated with particular consideration on interface properties. The $IrO_2$and Ir were previously annealed at $650^{\circ}C$ in $O_2$or $N_2$atmosphere, respectively. There was no appreciable roughening in the interface of the $PZT/IrO_2$respective to that of the PZT/Ir; the rms roughness of $IrO_2$and Ir was about 3nm and 10nm, respectively. The ferroelectric properties of the $PZT/IrO_2$were found to be better than that of the PZT/Ir; however, the leakage current of the $PZT/IrO_2$was slightly larger than that of the PZT/Ir. The $PZT/IrO_2$thin films did not exhibit any fatigue up to $10^{11}$ cycles; the $P^*\;_r-P^r$ value decreased only from 16.6 to 14$\mu$C/$\textrm{cm}^2$ until $10^{12}$ polarization reversals. On the other hand, although thin $IrO_2$layer was formed between PZT and Ir, the PZT/Ir thin films began to undergo fatigue after $10^9$ polarization reversals.

• Journal of the Korean Ceramic Society
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• v.30 no.3
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• pp.222-228
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• 1993

In order to obtian TiO2 fine powder of high purity, the new method which is different from the sulfate process and the chloride one was employed. TiO2 was syntehsized by the reaction between elemental titanium particles and H2O2 solutiosn at 30~7$0^{\circ}C$, and then TiO2 powder was characterized using XRD, SEM, TEM, DTA and FT-IR. It was found that the initial reaction rate was fast at a high temperature due to the high generation of activated oxygen associated with thedecomposition of H2O2. However, the reaction was slowly proceeded at a low temperature due to slow decomposition of H2O2. In this experimental range, the optimum temeprature was ocnsidered to be about 5$0^{\circ}C$. The primary particles of the hydrous titanium dioxide (TiO2 gel) before aging were spherical, and their mean sizes were about 50nm. The similar shapes and sizes were observed with calcinatin at 40$0^{\circ}C$. The FT-IR spectrum of Ti-OH in the TiO2 gel powder appeared at around 3380cm-1, 1630cm-1 and 530cm-1. This gel powder was crystallized into the anatase type TiO2 at 300~40$0^{\circ}C$.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.439-443
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• 1987

$PbTiO_3$ thin film is prepared by rf sputtering method to implement the pyroelectric infrared detector at room temperature. Annealing of $PbTiO_3$ thin film is done from $400^{\circ}C$ to $550^{\circ}C$ each for 2 hours in furnace. The spectral response to recrystallization process of $PbTiO_3$ thin film is measured by IR photospectro meter. Pyroelectric detector Modeling is studied for implementing device using electrical equivalent circuit model. It is found that $PbTiO_3$ thin film has two IR absorption band within $1000-400\;cm^{-1}$ (10um-25um) and it's spectral response is improved as annealing temperature increase. As a result of pyroelectric detector modeling, we find the possibility of implementing optimum device structure.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.321-322
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• 2006

The electrical properties of PZT thin film capacitor on TiN/W plug structure were investigated for high density ferroelectric memory devices. In order to enhance the ferroelectric properties of PZT capacitor, the process conditions of bottom electrodes were optimized. The fabricated PZT capacitor on TiN/W plug showed good remanent polarization, leakage current, and contact resistance of TiN/W plug, which were $33\;{\mu}C/cm^2$, $1.2{\times}10^{-6}\;A/cm^2$, and 5.3 ohm/contact, respectively.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.52 no.1
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• pp.14-19
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• 2003

The effect of the Pt electrode and the $Pt-IrO_2$ hybrid electrode on the performance of ferroelectric device was investigated. The modified Pt thin films with non-columnar structure significantly reduced the oxidation of TiN diffusion barrier layer, which rendered it possible to incorporate the simple stacked structure of Pt/TiN/poly-Si plug. When a $Pt-IrO_2$ hybrid electrode is applied, PZT thin film properties are influenced by the thickness and the partial coverage of the electrode layers. The optimized $Pt-IrO_2$ hybrid electrode significantly enhanced the fatigue properties of the PZT thin film with minimal leakage current.

• Journal of the Korean Ceramic Society
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• v.40 no.2
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• pp.178-183
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• 2003

Electrical conductivity of$50Li_2O-xTiO_2-(50-x)P_2O_5$ glasses has been studied with an increase of the intermediate$TiO_2$content. Thermal properties were observed from TG-DTA measurement and the variation of glass structure was investigated by FT-IR. The density and glass transition temperature increased with an increase of the $TiO_2$ content. These results were attributed to the fact that bond strengthening was occurred because of the formation of P-O-Ti cross linkages in the glass. The ionic conductivity increased with $TiO_2$ content and a maximum value, $1.2{imes}10^{-6}$S/cm showed at x=20. The ionic conductivity showed a large increasement as a result that the pyrophosphate group become the predominant structural unit. This result can explain that Li ions mobility increased as a number of non-bridging oxygen on phosphate units increased.

• Korean Journal of Materials Research
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• v.11 no.2
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• pp.151-154
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• 2001

The leakage current behaviors of PLZT capacitors with top electrodes of Pt, Ir, and $IrO_2$ are investigated before and after hydrogen forming gas anneal. The P-E hysteresis and fatigue properties of Pt/PLZT/Pt capacitors are almost recovered after recovery anneal in $O_2$ ambient. The leakage current mechanisms of PLZT capacitors with Pt and $IrO_2$ top electrodes are consistent with space-charge influenced injection model showing the strong time dependence irrespective of annealing conditions. On the other hand, the leakage current behavior of Ir/PLZT/Pt capacitor shows steady state independent of time because IrPb, conducting phase, formed at interface between Ir top and PLZT is a high conduction path. Teh leakage current mechanism of Ir/PLZT/Pt capacitor is consistent with Schottky barrier model.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.485-488
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• 2004

1M, 2M 황산망간 수용액에서 25회 dipping하여 대기중 $450^{\circ}C$에서 1시간동안 열분해법으로 Mn 산화물을 형성시켜 Mn $oxide/IrO_2/Ti$ 전극을 제조하였다. 제조된 Mn $oxide/IrO_2/Ti$ 전극은 XRD를 통하여 MnO의 결정구조를 가지는 것을 확인하였다. 또한 전극 표면은 열분해법으로 발생하는 가스에 의해 미소 균열이 형성되어 있었다. dipping 횟수가 증가할수록 피복되는 Mn 산화물의 무게는 감소하였고, 이것은 $450^{\circ}C$에서의 계속적인 열처리에 의해 열분해되어 제거되는 가스로 인해 무게가 감소됨을 알 수 있었다. 황산망간 수용액의 농도가 높으면 형성되는 Mn 산화물의 무게도 증가하였다. 황산망간 수용액에서 25회까지 dipping을 한 후 전기비저항의 변화는 초기 Mn 산화물이 형성되는 경우에는 비저항이 증가하다가, 일정 횟수 이상에서는 감소함을 알 수 있었다. 또한 황산망간 수용액의 농도가 클수록 비저항이 증가하는 것으로 나타났다.