• Proceedings of the Materials Research Society of Korea Conference
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• 1997.10a
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• pp.96-96
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• 1997

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.176.1-176.1
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• 2015

본 연구는 플라즈마 건식 식각 후 박막의 물성 특성 변화 측정에 Nano-Indentation 분석 기법을 도입하였으며, 식각 후 박막 표면 강도를 nano 영역에서 측정하여 박막 표면의 damage 분석에 적용하여 물리적인 해석을 시도하였다. 하지만 기판의 대면적화로 인하여 반도체 공정에 사용되는 기판은 300 mm로 증가하였고 이로 인하여 플라즈마 건식 식각에서 대면적에 대한 균일도 향상 연구를 진행 중에 있다. 이 연구에서는 플라즈마 건식 식각 후 박막의 균일도를 Nano-indenter 측정 결과를 기반으로 Weibull 분포 해석을 통하여 정량적인 균일도를 측정하고자 하였다. 플라즈마 건식 식각을 위하여 플라즈마 소스는 Adaptively Coupled Plasma (ACP)를 사용하였고 식각 후 TEOS $SiO_2$ 박막 표면을 분석하기 위하여, 시료 평면의 x, y 축에 대하여 각각 $20{\mu}m$로 indent 각 지점을 이격하여 동일한 측정 조건에서 Nano-indenter를 이용하여 박막 표면의 강도를 측정하였다. 측정된 결과는 Weibull 분포를 활용하여 정량화하였다. 결과에 의하면 플라즈마 소스의 bias 파워가 300 W 일 때 균일도가 가장 높은 29.84로 측정되었고, 150 W 일 때 가장 낮은 8.38로 측정되었다. 식각 전 TEOS $SiO_2$ 박막의 Weibull 분포에 의한 균일도가 17.93으로 측정됨을 기반으로 ACP 플라즈마 소스의 식각 조건에 따라 TEOS $SiO_2$ 박막의 균일도가 상대적으로 변함을 정량적으로 분석할 수 있었다.

• Korean Journal of Materials Research
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• v.5 no.1
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• pp.55-62
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• 1995

Cordierite powders were prepared by a controlled hydrolysis of metal alkoxides with ethanol and distilled water. HC1 was used as a catalyst. The amount of HCI catalyst used was in range of 0.1-0. 5mol per lmol of TEOS. Effects of HC1 catalyst on the characteristics of cordierite powder were examined. $\alpha$-Cordierite powder prepared with HCI/TEOS mol ratio of O.lmol/mol was crystallized at $1050^{\circ}C$. On the other hand, $\alpha$-cordierite powders prepared with HCI/TEOS rnol ratio of 0.3 and 0.5rnol/mol were crystallized at $950^{\circ}C$. Spinel( mA120a) phase remained up to $1300^{\circ}C$ in the cordierite powder prepared with HCI/TEOS rnol ratio of 0.lrnolirnol. On the contrary, spinel phase was absent, and mordierite was the only phase remalned at $1300^{\circ}C$ in the cordierite powder prepared with HCI/TEOS mol ratio of 0.3 and O:5mol/mol.

• Membrane Journal
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• v.18 no.2
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• pp.146-156
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• 2008

In this study, PTMSP of high permeability and high molecular weight was synthesized, and PTMSP-PDMS graft copolymer was synthesized from poly [1-(trimethylsily)propyne] (PTMSP) and hydroxy-terminated poly(dimethylsiloxane) (PDMS). The PTMSP-PDMS-silica composites were prepared by the addition of 15, 30, or 50 wt% tetraethoxysilane (TEOS) to PTMSP-PDMS graft copolymer by sol-gel process. To investigate the physico-chemical characteristics of PTMSP-PDMS-silica/PEI composite membranes, the analytical methods such as $^1H$-NMR, FT-IR, TGA, XPS, GPC, and SEM have been utilized. The gas permeability and selectivity properties of $H_2,\;O_2,\;N_2,\;CO_2,\;CH_4,\;n-C_4H_{10}$, were evaluated. Permeability of the composite membranes increased as TEOS content and pressure increased. Selectivity of $H_2,\;O_2,\;N_2,\;CO_2,\;CH_4,\;and\;n-C_4H_{10}$, showed the maximum value at 30 wt% of TEOS content and decreased thereafter.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.214.1-214.1
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• 2013

Tetra-ethoxysilane (TEOS)은 일반적으로 저온 게이트 산화막의 원료 널리 이용되고 있으나 as-deposited 상태에서는 필수적으로 생성된 높은 계면밀도와 고정전하를 제거하기 위하여 수소계면처리, forming gas annealing 등 후처리 공정을 필수적으로 거처야만 한다. 즉 후처리 공정 없이도 일정수준의 계면밀도와 고정전하를 갖을 수 있는 출발물질이 제안되면 산업적 의미를 갖을 것이다. 본 연구에서는 TEOS를 대체할 수 있는 후보재료로써 Tetra-iso-propoxysilane (T-iso-POS)을 제안하였다. T-iso-POS는 iso 구조의 3차원적 특수 구조를 가지므로 더 쉽게 분해 될 수 있어 탄소의 결합을 억제 할 수 있다고 사료된다. 용량 결합형 PECVD (13.56 MHz) 장비를 이용하여 RCA 세정을 실시 한 p-Si (100) 기판위에 TEOS 혹은 T-iso-POS (2 sccm)와 O2를 도입(50 sccm), 플라즈마 전원(20~100 W), 압력(0.1~0.5 torr), 온도 ($170{\sim}400^{\circ}C$), 전극 간 거리 (1~4.5cm)의 조건 하에서 증착하였다. 얻어진 각각의 SiO2 막에 대해, 성장 속도, 2% BHF 용액보다 에칭 속도, IV 특성과 C-V 특성, FT-IR에 의해 화학구조 평가를 실시했다. T-iso-POS원료로 사용하여 TEOS보다 낮은 약 $200^{\circ}C$에서 증착 된 산화막에서 후 처리 없이도 10 MV/cm 이상의 절연 파괴 특성을 나타내는 우수한 게이트 절연막 제작에 성공했다. 그 성장 속도도 약 20 nm/min로 높았다.

• Journal of the Korean Ceramic Society
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• v.28 no.7
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• pp.503-508
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• 1991

High pure and fine mullite powders were synthesized from Al-secbutoxide[Al(OC4H9)3] and TEOS[Si(OC2H5)4] (SiO2/Al2O3=2/3 mole). Sol-Gel process by partial hydrolysis technique, as it were, first, TEOS was partially hydrolysized and then mixed with Al-secbutoxide for complete hydrolysis was used. The mullite precursor was synthesized within 30 hrs, which was reduced about a half of synthetic time in comparison with the other's study. Al-Si spinel was formed at 980℃ and mullite crystal was formed at 1200℃. Mullite powders synthesized in this study was spherical type like those of the other studies and particle sizes were very fine. Also mullite powders calcined at 1,600℃ had a stoichiometric composition (3Al2O3·2SiO2) and lattice constants were coincided with known theoretical values.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.2
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• pp.131-136
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• 2000

We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.

• Journal of the Korean Chemical Society
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• v.58 no.1
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• pp.100-104
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• 2014

Magnetite nanoparticles were prepared by co-precipitation method and then silica was coated onto the surface of $Fe_3O_4$ by hydrolysis of TEOS. The silica coated magnetite nanoparticles were characterized for its structural, microstructural, optical, vibrational and magnetic properties by X-ray diffraction analysis, Scanning electron microscopy, UV-visible spectroscopy, Infrared spectroscopy and Vibration sample magnetometer, respectively. XRD study confirmed the presence of $SiO_2$ on the surface of magnetite nanoparticles. SEM study indicated that with increase in TEOS content the particles become bigger and mono-disperse. It was also found that the silica coating prevents magnetic particles from aggregation and imparts excellent stability.

• Proceedings of the Korean Vacuum Society Conference
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• 2002.06a
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• pp.220-221
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• 2002

• Korean Journal of Materials Research
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• v.11 no.9
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• pp.740-744
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• 2001

The $Y_2SiO_5:Ce$ phosphors were synthesized by sol-gel technique in order to improve the performance of blue emitting phosphors for field emission display(FED). The resulted$Y_2SiO_5:Ce$ phosphors enhanced the emission intensity. In addition, calcination temperature of sol-gel technique(1300~140$0^{\circ}C$) was lower than that of the solid state reaction(>1$600^{\circ}C$). Under 365 nm and low voltage electron excitations. $Ce^{3+}$ -activated $Y_2SiO_5$phosphors showed blue emission band with a range of 400~ 430nm. Especially, 2mol% $Ce^{3+}$ doped $Y_2SiO_5:Ce$phosphors showed the maximum emission intensity. We have also controlled drying temperature of wet gel, pH, and $H_2O$/TEOS molar ratio for the optimum condition of TEOS hydrolysis.