• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.335-335
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• 2007

본 연구에서는 RF Magnetron Sputtering 법으로 94:6 wt%의 비율로 Sb가 첨가된 $SnO_2$ 타겟을 사용하여 실온에서 ATO(Antimony doped Tin Oxide) 박막을 증착하고, 열처리가 ATO 박막의 구조적, 전기적, 광학적 특성에 미치는 효과를 연구하고자 하였다. ATO 박막의 두께는 약 200 nm로 증착하였으며, 실험 조건으로는 Ar 유량을 100 seem, 진공도는 1, 5, 10 mTorr로 변화시켰으며 스퍼터링 파워는 100, 150, 200, 250 W로 조절하였다. 증착되어진 박막은 vacuum 상태에서 300, $600^{\circ}C$의 온도에서 열처리를 수행하였으며 결과적으로 스퍼터링 파워가 증가함에 따라 비저항이 감소하였고, 250 W의 파워와 10 mTorr의 공정압력 조건에서 $600^{\circ}C$로 열처리한 ATO 박막은 $5{\times}10^{-3}{\Omega}-cm$의 저항률과 85.3%의 높은 투과도를 가지는 우수한 투명 전도막을 얻을 수 있었다.

• 자원환경지질
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• 제29권4호
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• pp.411-419
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• 1996

The Janggun magnetite deposits occur as the lens-shaped magnesian skarn, magnetite and base-metal sulfide orebodies developed in the Cambrian Janggun Limestone Formation. The K-Ar age of alteration sericite indicates that the mineralization took place during late Cretaceous age (107 to 70 Ma). The ore deposition is divided into two stages as a early skarn and late hydrothermal stage. Mineralogy of skara stage (107 Ma) consists of iron oxide, base-metal sulfides, Mg-Fe carbonates and some Mg- and Ca-skarn minerals, and those of the hydrothermal stage (70 Ma) is deposited base-metal sulfides, some Sb- and Sn-sulfosalts, and native bismuth. Based on mineral assemblages, chemical compositions and thermodynamic considerations, the formation temperature, $-logfs_2$, $-logfo_2$ and pH of ore fluids progressively decreased and/or increased with time from skarn stage (433 to $345^{\circ}C$, 8.8 to 9.9 atm, 29.4 to 31.6 atm, and 6.1 to 7.2) to hydrothermal stage (245 to $315^{\circ}C$, 11.2 to 12.3 atm, 33.6 to 35.4 atm, and 7.3 to 7.8). The ${\delta}^{34}S$ values of sulfides have a wide range between 3.2 to 11.6‰. The calculated ${\delta}^{34}S_{H_2S}$ values of ore fluids are relatively homo-geneous as 2.9 to 5.4‰ (skam stage) and 8.7 to 13.5‰ (hydrothermal stage), which are a deep-seated igneous source of sulfur indicates progressive increasing due to the mixing of oxidized sedimentary sulfur with increasing paragenetic time. The ${\delta}^{13}C$ values of carbonates in ores range from -4.6 to -2.5‰. Oxygen and hydrogen isotope data revealed that the ${\delta}^{38}O_{H_2O}$ and ${\delta}D$ values of ore fluids decreased gradually with time from 14.7 to 1.8‰ and -85 to -73‰ (skarn stage), and from 11.1 to -0.2‰ and -87 to -80‰ (hydrothermal stage), respectively. This indicates that magmatic water was dominant during the early skarn mineralization but was progressively replaced by meteoric water during the later hydrothermal replacement.