The Characteristics of Silicon Nitride Films Grown at Low Temperature for Flexible Display (플렉서블 디스플레이의 적용을 위한 저온 실리콘 질화물 박막성장의 특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.26 no.11
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- pp.816-820
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- 2013